Van De Wal; Marinus Maria Johannes

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van De Wal; Marinus Maria Johannes.The latest application filed is for "control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program".

Company Profile

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Van De Wal; Marinus Maria Johannes - Oirschot NL
Van De Wal; Marinus Maria Johannes - Olrschot N/A NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program Grant 10,095,123 - Van De Wal , et al. October 9, 2	2018-10-09
Control System, Positioning System, Lithographic Apparatus, Control Method, Device Manufacturing Method And Control Program App 20170212431 - VAN DE WAL; Marinus Maria Johannes ; et al.	2017-07-27
Lithographic apparatus, substrate support system, device manufacturing method and control program Grant 9,715,182 - Van De Wal , et al. July 25, 2	2017-07-25
Positioning system, lithographic apparatus and device manufacturing method Grant 9,383,659 - Beerens , et al. July 5, 2	2016-07-05
Lithographic Apparatus, Substrate Support System, Device Manufacturing Method And Control Program App 20150316860 - VAN DE WAL; Marinus Maria Johannes ; et al.	2015-11-05
Lithographic apparatus and method Grant 9,141,004 - Vermeulen , et al. September 22, 2	2015-09-22
Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150168852 - Beerens; Ruud Antonius Catharina Maria ; et al.	2015-06-18
Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method Grant 8,854,607 - Kamidi , et al. October 7, 2	2014-10-07
Lithographic Apparatus And Method App 20120249987 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al.	2012-10-04
Controller, Lithographic Apparatus, Method of Controlling the Position of an Object and Device Manufacturing Method App 20120127449 - Kamidi; Ramidin Izair ; et al.	2012-05-24

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