loadpatents
Patent applications and USPTO patent grants for VAN DE VIJVER; Yuri Johannes Gabriel.The latest application filed is for "system, device and method for reconditioning a substrate support".
Patent | Date |
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System, Device And Method For Reconditioning A Substrate Support App 20210053177 - SCHOLTEN; Bert Dirk ;   et al. | 2021-02-25 |
Lithographic apparatus, a projection system and a device manufacturing method Grant 10,310,394 - Van De Vijver , et al. | 2019-06-04 |
Lithographic Apparatus, A Projection System And A Device Manufacturing Method App 20170097579 - VAN DE VIJVER; Yuri Johannes Gabriel ;   et al. | 2017-04-06 |
Lithographic Apparatus And Device Manufacturing Method App 20120147348 - VAN DE VIJVER; Yuri Johannes Gabriel ;   et al. | 2012-06-14 |
Lithographic appararus and method Grant 8,094,287 - Van Empel , et al. January 10, 2 | 2012-01-10 |
Lithographic Apparatus, A Projection System And A Device Manufacturing Method App 20100309447 - Van de Vijver; Yuri Johannes Gabriel ;   et al. | 2010-12-09 |
Module And Method For Producing Extreme Ultraviolet Radiation App 20090090877 - Van Empel; Tjarko Adriaan Rudolf ;   et al. | 2009-04-09 |
Lithographic appararus and method App 20090027638 - Van Empel; Tjarko Adriaan Rudolf ;   et al. | 2009-01-29 |
Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby Grant 7,476,491 - Van Der Net , et al. January 13, 2 | 2009-01-13 |
Lithographic apparatus and device manufacturing method Grant 7,446,849 - Van Empel , et al. November 4, 2 | 2008-11-04 |
Lithographic apparatus, gas supply system, method for purging, and device manufacturing method and device manufactured thereby App 20060055900 - Van Der Net; Antonius Johannes ;   et al. | 2006-03-16 |
Lithographic apparatus and device manufacturing method App 20060017894 - Van Empel; Tjarko Adriaan Rudolf ;   et al. | 2006-01-26 |
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