Patent | Date |
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Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20210141312 - NAKIBOGLU; Gunes ;   et al. | 2021-05-13 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,895,808 - Nakiboglu , et al. January 19, 2 | 2021-01-19 |
Extraction Body For Lithographic Apparatus App 20200285154 - KRAMER; Gijs ;   et al. | 2020-09-10 |
Extraction body for lithographic apparatus Grant 10,705,426 - Kramer , et al. | 2020-07-07 |
A Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20200183287 - NAKIBOGLU; Gunes ;   et al. | 2020-06-11 |
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus Grant 10,571,810 - Van Sommeren , et al. Feb | 2020-02-25 |
Lithography apparatus, a method of manufacturing a device and a control program Grant 10,534,270 - Van den Nieuwelaar , et al. Ja | 2020-01-14 |
Substrate Table, A Lithographic Apparatus And A Method Of Operating A Lithographic Apparatus App 20190265597 - VAN SOMMEREN; Daan Daniel Johannes Antonius ;   et al. | 2019-08-29 |
Lithography Apparatus, A Method Of Manufacturing A Device And A Control Program App 20190187568 - VAN DEN NIEUWELAAR; Norbertus Josephus Martinus ;   et al. | 2019-06-20 |
Substrate table, lithographic apparatus and method of operating a lithographic apparatus Grant 10,317,804 - Van Sommeren , et al. | 2019-06-11 |
Extraction Body For Lithographic Apparatus App 20190163066 - KRAMER; Gijs ;   et al. | 2019-05-30 |
Lithography apparatus and method of manufacturing a device Grant 10,261,422 - Van Den Nieuwelaar , et al. | 2019-04-16 |
Lithographic Apparatus, Method For Unloading A Substrate And Method For Loading A Substrate App 20190043749 - JEUNINK; Andre Bernardus ;   et al. | 2019-02-07 |
Substrate Table, Lithographic Apparatus And Method Of Operating A Lithographic Apparatus App 20180364584 - VAN SOMMEREN; Daan Daniel Johannes Antonius ;   et al. | 2018-12-20 |
Sensor, lithographic apparatus and device manufacturing method Grant 9,971,254 - Laurent , et al. May 15, 2 | 2018-05-15 |
Sensor, Lithographic Apparatus And Device Manufacturing Method App 20170363964 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-12-21 |
Sensor, lithographic apparatus and device manufacturing method Grant 9,753,382 - Laurent , et al. September 5, 2 | 2017-09-05 |
Lithography Apparatus And Method Of Manufacturing A Device App 20170219933 - VAN DEN NIEUWELAAR; Norbertus Josephus Martinus ;   et al. | 2017-08-03 |
Module and method for producing extreme ultraviolet radiation Grant 9,363,879 - Van Empel , et al. June 7, 2 | 2016-06-07 |
Sensor, Lithographic Apparatus And Device Manufacturing Method App 20150077728 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-03-19 |
Module And Method For Producing Extreme Ultraviolet Radiation App 20150077729 - VAN EMPEL; Tjarko Adriaan Rudolf ;   et al. | 2015-03-19 |
Module and method for producing extreme ultraviolet radiation Grant 8,901,521 - Van Empel , et al. December 2, 2 | 2014-12-02 |
Lithographic apparatus and device manufacturing method Grant 8,797,504 - Nienhuys , et al. August 5, 2 | 2014-08-05 |
Lithographic apparatus and device manufacturing method Grant 8,730,448 - Nienhuys , et al. May 20, 2 | 2014-05-20 |
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus Grant 8,711,325 - Schimmel , et al. April 29, 2 | 2014-04-29 |
Lithographic Apparatus And Device Manufacturing Method App 20120229782 - Nienhuys; Han-Kwang ;   et al. | 2012-09-13 |
Lithographic Apparatus And Device Manufacturing Method App 20120229783 - Nienhuys; Han-Kwang ;   et al. | 2012-09-13 |
Gas gauge, lithographic apparatus and device manufacturing method Grant 8,220,315 - Labetski , et al. July 17, 2 | 2012-07-17 |
Lithographic apparatus and device manufacturing method Grant 8,115,900 - Van De Vijver , et al. February 14, 2 | 2012-02-14 |
Method And System For Determining A Suppression Factor Of A Suppression System And A Lithographic Apparatus App 20110261329 - Schimmel; Hendrikus Gijsbertus ;   et al. | 2011-10-27 |
Gas Gauge, Lithographic Apparatus and Device Manufacturing Method App 20100116029 - Labetski; Dzmitry ;   et al. | 2010-05-13 |