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Supply system for an extreme ultraviolet light source
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Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
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A Clear-out Tool, A Lithographic Apparatus And A Device Manufacturing Method
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Supply System For An Extreme Ultraviolet Light Source
App 20200128657 - Winkels; Koen Gerhardus ; et al. | 2020-04-23 |
Supply system for an extreme ultraviolet light source
Grant 10,499,485 - Winkels , et al. De | 2019-12-03 |
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
Grant 10,481,498 - Dijksman , et al. Nov | 2019-11-19 |
Droplet Generator For Lithographic Apparatus, Euv Source And Lithographic Apparatus
App 20180368241 - DIJKSMAN; Johan Frederik ; et al. | 2018-12-20 |
Supply System For An Extreme Ultraviolet Light Source
App 20180368242 - Winkels; Koen Gerhardus ; et al. | 2018-12-20 |
Droplet Generator For Lithographic Apparatus, Euv Source And Lithographic Apparatus
App 20180364580 - Dijksman; Johan Frederik ; et al. | 2018-12-20 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator
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Substrate table system, lithographic apparatus and substrate table swapping method
Grant 9,753,381 - Van De Ven , et al. September 5, 2 | 2017-09-05 |
Stage system and a lithographic apparatus
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Lithographic apparatus, method of deforming a substrate table and device manufacturing method
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Lithographic apparatus and device manufacturing method
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Substrate Table System, Lithographic Apparatus And Substrate Table Swapping Method
App 20150153661 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2015-06-04 |
Lithographic Apparatus Comprising An Actuator, And Method For Protecting Such Actuator
App 20150070678 - Cadee; Theodorus Petrus Maria ; et al. | 2015-03-12 |
Stage System and a Lithographic Apparatus
App 20140375975 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2014-12-25 |
Lithographic Apparatus, Method Of Deforming A Substrate Table And Device Manufacturing Method
App 20120327386 - Huang; Yang-Shan ; et al. | 2012-12-27 |
Lithographic apparatus and device manufacturing method
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Gas bearing, and lithographic apparatus provided with such a bearing
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Lithographic Apparatus And Device Manufacturing Method
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Assembly of a reticle holder and a reticle
Grant 7,839,489 - Heerens , et al. November 23, 2 | 2010-11-23 |
Alignment marker and lithographic apparatus and device manufacturing method using the same
Grant 7,781,237 - Heerens , et al. August 24, 2 | 2010-08-24 |
Lithographic Apparatus and Device Manufacturing Method
App 20090246703 - Starreveld; Jeroen Pieter ; et al. | 2009-10-01 |
Safety mechanism for a lithographic patterning device
Grant 7,466,397 - Van De Ven , et al. December 16, 2 | 2008-12-16 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device
Grant 7,423,733 - Van De Ven , et al. September 9, 2 | 2008-09-09 |
Gas bearing, and lithographic apparatus provided with such a bearing
App 20070258069 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2007-11-08 |
Assembly of a reticle holder and a reticle
App 20070247609 - Heerens; Gert-Jan ; et al. | 2007-10-25 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20070159616 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2007-07-12 |
Assembly of a reticle holder and a reticle
Grant 7,236,233 - Heerens , et al. June 26, 2 | 2007-06-26 |
Lithographic apparatus and device manufacturing method
Grant 7,123,344 - Van De Ven , et al. October 17, 2 | 2006-10-17 |
Safety mechanism for a lithographic patterning device
Grant 7,084,961 - Van De Ven , et al. August 1, 2 | 2006-08-01 |
Lithographic alignment system
Grant 7,053,980 - Heerens , et al. May 30, 2 | 2006-05-30 |
Alignment marker and lithographic apparatus and device manufacturing method using the same
App 20060007442 - Heerens; Gert-Jan ; et al. | 2006-01-12 |
Safety mechanism for a lithographic patterning device
App 20050134830 - Van De Ven, Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2005-06-23 |
Assembly of a reticle holder and a reticle
App 20050117142 - Heerens, Gert-Jan ; et al. | 2005-06-02 |
Safety mechanism for a lithographic patterning device
App 20050083499 - Van De Ven, Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2005-04-21 |
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method
Grant 6,753,945 - Heerens , et al. June 22, 2 | 2004-06-22 |
Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method
App 20030224295 - Heerens, Gert-Jan ; et al. | 2003-12-04 |
Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured thereby
App 20030162101 - Heerens, Gart-Jan ; et al. | 2003-08-28 |
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