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Patent applications and USPTO patent grants for Van De Mast; Franciscus.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,620,553 - Westerlaken , et al. | 2020-04-14 |
Lithographic Apparatus And Device Manufacturing Method App 20190235398 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2019-08-01 |
Method And Apparatus To Monitor A Process Apparatus App 20190214318 - MASLOW; Mark John ;   et al. | 2019-07-11 |
Lithographic apparatus and device manufacturing method Grant 10,216,102 - Westerlaken , et al. Feb | 2019-02-26 |
Lithographic Apparatus And Device Manufacturing Method App 20180164705 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2018-06-14 |
Lithographic apparatus and device manufacturing method Grant 9,891,542 - Westerlaken , et al. February 13, 2 | 2018-02-13 |
Lithographic Apparatus And Device Manufacturing Method App 20170242349 - Westerlaken; Jan Steven Christiaan ;   et al. | 2017-08-24 |
Lithographic apparatus and device manufacturing method Grant 9,529,277 - Westerlaken , et al. December 27, 2 | 2016-12-27 |
Lithographic Apparatus And Device Manufacturing Method App 20150185624 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2015-07-02 |
Lithographic apparatus and device manufacturing method Grant 8,988,650 - Westerlaken , et al. March 24, 2 | 2015-03-24 |
Method of updating calibration data and a device manufacturing method Grant 8,903,156 - Van De Mast , et al. December 2, 2 | 2014-12-02 |
Method Of Updating Calibration Data And A Device Manufacturing Method App 20120156807 - VAN DE MAST; Franciscus ;   et al. | 2012-06-21 |
Lithographic Apparatus And Device Manufacturing Method App 20120052447 - WESTERLAKEN; Jan Steven Christiaan ;   et al. | 2012-03-01 |
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method Grant 7,804,582 - Zaal , et al. September 28, 2 | 2010-09-28 |
Lithography system, control system and device manufacturing method Grant 7,511,797 - Van De Mast , et al. March 31, 2 | 2009-03-31 |
Lithography system, control system and device manufacturing method Grant 7,352,439 - Van De Mast , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method App 20080024748 - Zaal; Koen Jacobus Johannes Maria ;   et al. | 2008-01-31 |
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