Van De Groes; Henricus Martinus Johannes
Patent Applications and Registrations
Patent applications and USPTO patent grants for Van De Groes; Henricus Martinus Johannes.The latest application filed is for "alignment method and associated metrology device".
- Van De Groes; Henricus Martinus Johannes - Tiel NL
- Van De Groes; Henricus Martinus Johannes - Veldhoven NL
| Patent | Date |
|---|---|
| Alignment method and associated metrology device Grant 11,372,343 - Van De Groes , et al. June 28, 2 | 2022-06-28 |
| E-beam apparatus Grant 11,315,752 - Hempenius , et al. April 26, 2 | 2022-04-26 |
| Electron beam inspection apparatus stage positioning Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
| Alignment Method And Associated Metrology Device App 20220100107 - VAN DE GROES; Henricus Martinus Johannes ; et al. | 2022-03-31 |
| E-beam Apparatus App 20210151282 - HEMPENIUS; Peter Paul ; et al. | 2021-05-20 |
| E-beam apparatus Grant 10,867,770 - Hempenius , et al. December 15, 2 | 2020-12-15 |
| Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-11-26 |
| Stage system and metrology tool Grant 10,809,634 - Hempenius , et al. October 20, 2 | 2020-10-20 |
| Electron Beam Inspection Apparatus Stage Positioning App 20200203118 - BAGGEN; Marcel Koenraad Marie ; et al. | 2020-06-25 |
| E-beam Apparatus App 20190341224 - HEMPENIUS; Peter Paul ; et al. | 2019-11-07 |
| Illumination system and metrology system Grant 10,416,567 - De Wit , et al. Sept | 2019-09-17 |
| Stage System and Metrology Tool App 20180267410 - HEMPENIUS; Peter Paul ; et al. | 2018-09-20 |
| Illumination System and Metrology System App 20170255105 - DE WIT; Johannes Matheus Marie ; et al. | 2017-09-07 |
| Positioning system, lithographic apparatus and device manufacturing method Grant 9,383,659 - Beerens , et al. July 5, 2 | 2016-07-05 |
| Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20150168852 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2015-06-18 |
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