VAN DAM; Marinus Johannes Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for VAN DAM; Marinus Johannes Maria.The latest application filed is for "wavelength selection module, illumination system and metrology system".

Company Profile

7.13.16

VAN DAM; Marinus Johannes Maria - Venlo NL
- Venlo NL
Van Dam; Marinus Johannes Maria - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Wavelength Selection Module, Illumination System And Metrology System App 20220299365 - VAN DER ZOUW; Gerbrand ; et al.	2022-09-22
Metrology apparatus Grant 11,262,661 - Pandey , et al. March 1, 2	2022-03-01
Metrology Apparatus App 20210123724 - VAN DAM; Marinus Johannes Maria ; et al.	2021-04-29
Metrology apparatus Grant 10,895,452 - Van Dam , et al. January 19, 2	2021-01-19
Inspection apparatus having non-linear optics Grant 10,809,193 - Van Dam , et al. October 20, 2	2020-10-20
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein Grant 10,775,704 - Pandey , et al. Sept	2020-09-15
Metrology Apparatus App 20200072599 - VAN DAM; Marinus Johannes Maria ; et al.	2020-03-05
Metrology Apparatus App 20190384184 - Pandey; Nitesh ; et al.	2019-12-19
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus Grant 10488765 -	2019-11-26
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective App 20190346771 - PANDEY; Nitesh ; et al.	2019-11-14
Inspection Apparatus Having Non-Linear Optics App 20190310190 - VAN DAM; Marinus Johannes Maria ; et al.	2019-10-10
Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use therein Grant 10,365,565 - Pandey , et al. July 30, 2	2019-07-30
Method of Optimizing the Position and/or Size of a Measurement Illumination Spot Relative to a Target on a Substrate, and Associated Apparatus App 20190107786 - VAN BOXMEER; Johan Maria ; et al.	2019-04-11
Actuation mechanism, optical apparatus and lithography apparatus Grant 9,927,711 - Hol , et al. March 27, 2	2018-03-27
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,785,051 - Van Schoot , et al. October 10, 2	2017-10-10
Method of Measuring a Structure, Inspection Apparatus, Lithographic System, Device Manufacturing Method and Wavelength-Selective Filter for Use therein App 20170242343 - PANDEY; Nitesh ; et al.	2017-08-24
Actuation Mechanism, Optical Apparatus and Lithography Apparatus App 20160313649 - HOL; Sven Antoin Johan ; et al.	2016-10-27
Actuation Mechanism, Optical Apparatus, Lithography Apparatus And Method Of Manufacturing Devices App 20150277233 - Van Schoot; Jan Bernard Plechelmus ; et al.	2015-10-01
Illumination system, lithographic apparatus and method of adjusting an illumination mode Grant 8,867,021 - De Vries , et al. October 21, 2	2014-10-21
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,675,169 - Van Boxtel , et al. March 18, 2	2014-03-18
Device manufacturing method and lithographic apparatus,and computer program product Grant 8,218,130 - Van Dam July 10, 2	2012-07-10
Gas Manifold, Module For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120092631 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2012-04-19
Device manufacturing method and lithographic apparatus,and computer program product App 20090122290 - Van Dam; Marinus Johannes Maria	2009-05-14
Optical element for use in lithography apparatus and method of conditioning radiation beam App 20070058151 - Eurlings; Markus Franciscus Antonius ; et al.	2007-03-15
Lithographic apparatus and method for its use Grant 7,148,954 - Van Dam December 12, 2	2006-12-12
Lithographic apparatus and method for its use App 20060215141 - Van Dam; Marinus Johannes Maria	2006-09-28
Parameter control in a lithographic apparatus using polarization App 20060192149 - Van Dam; Marinus Johannes Maria ; et al.	2006-08-31
Lithographic apparatus and device manufacturing method App 20040263816 - Van Dam, Marinus Johannes Maria	2004-12-30

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