Van Buel; Henricus Wilhelmus Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Buel; Henricus Wilhelmus Maria.The latest application filed is for "metrology method, target and substrate".

Company Profile

6.32.31

Van Buel; Henricus Wilhelmus Maria - 's-Hertogenbosch NL
Van Buel; Henricus Wilhelmus Maria - Eindhoven NL
Van Buel; Henricus Wilhelmus Maria - s-Hertogenbosch NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Metrology method, target and substrate Grant 11,428,521 - Bhattacharyya , et al. August 30, 2	2022-08-30
Metrology Method, Target And Substrate App 20220057192 - BHATTACHARYYA; Kaustuve ; et al.	2022-02-24
Metrology method, target and substrate Grant 11,204,239 - Bhattacharyya , et al. December 21, 2	2021-12-21
Apparatus for and a method of removing contaminant particles from a component of an apparatus Grant 11,123,773 - Maas , et al. September 21, 2	2021-09-21
Metrology Method, Target And Substrate App 20200348125 - BHATTACHARYYA; Kaustuve ; et al.	2020-11-05
Metrology method, target and substrate Grant 10,718,604 - Bhattacharyya , et al.	2020-07-21
Metrology Method, Target And Substrate App 20190346256 - BHATTACHARYYA; Kaustuve ; et al.	2019-11-14
Metrology method, target and substrate Grant 10,386,176 - Bhattacharyya , et al. A	2019-08-20
Apparatus for and a Method of Removing Contaminant Particles from a Component of an Apparatus App 20190201943 - MAAS; Tim Peter Johan Gerard ; et al.	2019-07-04
Optimization of target arrangement and associated target Grant 10,331,043 - Van Buel , et al.	2019-06-25
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method Grant 10,162,272 - Jak , et al. Dec	2018-12-25
Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices Grant 10,101,677 - Feijen , et al. October 16, 2	2018-10-16
Optimization Of Target Arrangement And Associated Target App 20170176871 - VAN BUEL; Henricus Wilhelmus Maria ; et al.	2017-06-22
Metrology Method And Apparatus, Substrates For Use In Such Methods, Lithographic System And Device Manufacturing Method App 20170052454 - JAK; Martin Jacobus Johan ; et al.	2017-02-23
Inspection Apparatus for Measuring Properties of a Target Structure, Methods of Operating an Optical System, Method of Manufacturing Devices App 20160291479 - FEIJEN; Kim Gerard ; et al.	2016-10-06
Metrology Method, Target And Substrate App 20160061589 - BHATTACHARYYA; Kaustuve ; et al.	2016-03-03
Lithographic apparatus and method Grant 8,576,374 - Best , et al. November 5, 2	2013-11-05
Sensor, a table and lithographic apparatus Grant 8,395,772 - Van Buel , et al. March 12, 2	2013-03-12
Sensor, A Table And Lithographic Apparatus App 20100321695 - VAN BUEL; Henricus Wilhelmus Maria ; et al.	2010-12-23
Alignment and alignment marks Grant 7,751,047 - Bijnen , et al. July 6, 2	2010-07-06
Lithographic apparatus and method Grant 7,675,606 - Van Den Brink , et al. March 9, 2	2010-03-09
Lithographic Apparatus And Method App 20090237635 - Best; Keith Frank ; et al.	2009-09-24
Lithographic method App 20090207399 - Fong; Alex F. ; et al.	2009-08-20
Method and system for 3D alignment in wafer scale integration Grant 7,562,686 - Best , et al. July 21, 2	2009-07-21
Lithographic apparatus and device manufacturing method Grant 7,563,562 - Van Buel July 21, 2	2009-07-21
Lithographic apparatus and device manufacturing method App 20090075012 - Van Dijk; Paulus Wilhelmus ; et al.	2009-03-19
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program Grant 7,480,028 - Van Der Veen , et al. January 20, 2	2009-01-20
Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus Grant 7,463,337 - Van Buel , et al. December 9, 2	2008-12-09
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus Grant 7,420,676 - Lof , et al. September 2, 2	2008-09-02
Lithographic apparatus and method App 20080204683 - Van Buel; Henricus Wilhelmus Maria	2008-08-28
Cover for shielding a portion of an arc lamp App 20080170308 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2008-07-17
Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method Grant 7,349,071 - Van Buel , et al. March 25, 2	2008-03-25
Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method Grant 7,342,642 - Van Buel , et al. March 11, 2	2008-03-11
Lithographic apparatus and method App 20070258080 - Brink; Enno Van Den ; et al.	2007-11-08
Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method Grant 7,253,884 - Van Buel , et al. August 7, 2	2007-08-07
Substrate table, method of measuring a position of a substrate and a lithographic apparatus Grant 7,251,018 - Van Buel July 31, 2	2007-07-31
Substrate table, method of measuring a position of a substrate and a lithographic apparatus App 20070153253 - Van Buel; Henricus Wilhelmus Maria ; et al.	2007-07-05
Calibration method for a lithographic apparatus and device manufacturing method Grant 7,239,393 - Bleeker , et al. July 3, 2	2007-07-03
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby Grant 7,193,231 - Lof , et al. March 20, 2	2007-03-20
Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method App 20060285095 - Van Buel; Henricus Wilhelmus Maria ; et al.	2006-12-21
Lithographic apparatus and device manufacturing method App 20060275709 - Van Buel; Henricus Wilhelmus Maria	2006-12-07
Lithographic apparatus Grant 7,113,258 - Van Buel , et al. September 26, 2	2006-09-26
Lithographic apparatus and device manufacturing method Grant 7,094,506 - Van Buel August 22, 2	2006-08-22
Lithographic apparatus Grant 7,064,807 - Gui , et al. June 20, 2	2006-06-20
Substrate table, method of measuring a position of a substrate and a lithographic apparatus App 20060114442 - Van Buel; Henricus Wilhelmus Maria	2006-06-01
Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby Grant 7,041,996 - Best , et al. May 9, 2	2006-05-09
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program App 20050248740 - Veen, Michael Van Der ; et al.	2005-11-10
Lithographic apparatus and device manufacturing method App 20050200819 - Van Buel, Henricus Wilhelmus Maria	2005-09-15
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods Grant 6,936,385 - Lof , et al. August 30, 2	2005-08-30
Lithographic apparatus, alignment method and device manufacturing method Grant 6,914,664 - Best , et al. July 5, 2	2005-07-05
Lithographic apparatus App 20050140951 - Van Buel, Henricus Wilhelmus Maria ; et al.	2005-06-30
Calibration method for a lithographic apparatus and device manufacturing method App 20050024643 - Bleeker, Arno Jan ; et al.	2005-02-03
Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method App 20050018159 - Van Buel, Henricus Wilhelmus Maria ; et al.	2005-01-27
Lithographic apparatus App 20040201833 - Gui, Cheng-Qun ; et al.	2004-10-14
Lithographic apparatus App 20040174511 - Gui, Cheng-Qun ; et al.	2004-09-09
Method of aligning a substrate, computer program, device manufacturing method and device manufactured thereby App 20040124375 - Best, Keith Frank ; et al.	2004-07-01
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby App 20040108466 - Lof, Joeri ; et al.	2004-06-10
Lithographic apparatus, alignment method and device manufacturing method App 20030227604 - Best, Keith Frank ; et al.	2003-12-11
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods App 20030224262 - Lof, Joeri ; et al.	2003-12-04
Optical exposure method, device manufacturing method and lithographic projection apparatus Grant 6,618,118 - Minnaert , et al. September 9, 2	2003-09-09
Lithographic apparatus App 20020109825 - Gui, Cheng-Qun ; et al.	2002-08-15

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