Van Boxtel; Frank Johannes Jacobus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Boxtel; Frank Johannes Jacobus.The latest application filed is for "lithographic apparatus with improved patterning performance".

Company Profile

13.39.36

Van Boxtel; Frank Johannes Jacobus - Eindhoven NL

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Patent Activity

Patent	Date
Lithographic apparatus with improved patterning performance Grant 11,048,178 - La Torre , et al. June 29, 2	2021-06-29
Patterning device cooling system and method of thermally conditioning a patterning device Grant 11,036,148 - Cekli , et al. June 15, 2	2021-06-15
Measurement system, lithographic apparatus and device manufacturing method Grant 11,009,800 - Nienhuys , et al. May 18, 2	2021-05-18
Lithographic Apparatus With Improved Patterning Performance App 20200393769 - LA TORRE; Federico ; et al.	2020-12-17
Measurement System, Lithographic Apparatus And Device Manufacturing Method App 20200379360 - Nienhuys; Han-Kwang ; et al.	2020-12-03
Lithographic apparatus Grant 10,788,763 - Westerlaken , et al. September 29, 2	2020-09-29
Patterning device cooling apparatus Grant 10,642,166 -	2020-05-05
Patterning Device Cooling System And Method Of Thermally Conditioning A Patterning Device App 20200103767 - CEKLI; Hakki Ergun ; et al.	2020-04-02
Patterning device cooling system and method of thermally conditioning a patterning device Grant 10,495,986 - Cekli , et al. De	2019-12-03
Lithographic apparatus and device manufacturing method Grant 10,495,985 - Nakiboglu , et al. De	2019-12-03
Patterning Device Cooling Apparatus App 20190346777 - NAK BOGLU; Gunes ; et al.	2019-11-14
Patterning device cooling apparatus Grant 10,394,139 - A	2019-08-27
Lithographic apparatus and method Grant 10,345,717 - Nakiboglu , et al. July 9, 2	2019-07-09
Patterning Device Cooling Apparatus App 20190121248 - NAKIBOGLU; Gunes ; et al.	2019-04-25
Lithographic apparatus and a device manufacturing method Grant 10,222,707 - Polet , et al.	2019-03-05
Lithographic Apparatus And Device Manufacturing Method App 20190041761 - NAKIBOGLU; Gunes ; et al.	2019-02-07
Lithographic apparatus and device manufacturing method Grant 10,133,197 - Nakiboglu , et al. November 20, 2	2018-11-20
Lithographic apparatus and device manufacturing method Grant 10,114,295 - Nakiboglu , et al. October 30, 2	2018-10-30
Lithographic apparatus Grant 10,114,299 - Nakiboglu , et al. October 30, 2	2018-10-30
Lithographic Apparatus App 20180299796 - NAKIBOGLU; Gunes ; et al.	2018-10-18
Lithographic Apparatus And Method App 20180239258 - NAKIBOGLU; Gunes ; et al.	2018-08-23
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2	2018-07-24
Lithographic apparatus and method Grant 9,977,348 - Nakiboglu , et al. May 22, 2	2018-05-22
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,977,351 - Ebert , et al. May 22, 2	2018-05-22
Lithographic Apparatus App 20180101099 - NAKIBOGLU; Gunes ; et al.	2018-04-12
Lithographic apparatus and device manufacturing method Grant 9,939,740 - Nakiboglu , et al. April 10, 2	2018-04-10
Lithographic apparatus and method of cooling a component in a lithographic apparatus Grant 9,811,007 - Van Boxtel , et al. November 7, 2	2017-11-07
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170307986 - EBERT; Earl William ; et al.	2017-10-26
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,766,557 - Ebert , et al. September 19, 2	2017-09-19
Lithographic Apparatus And Device Manufacturing Method App 20170261864 - NAKIBOGLU; Gunes ; et al.	2017-09-14
Lithographic Apparatus And Method App 20170219930 - NAKIBOGLU; Gunes ; et al.	2017-08-03
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170160652 - EBERT; Earl William ; et al.	2017-06-08
Lithographic Apparatus And Device Manufacturing Method App 20170160653 - NAKIBOGLU; Gunes ; et al.	2017-06-08
Reticle cooling system in a lithographic apparatus Grant 9,632,434 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,632,433 - Ebert, Jr. , et al. April 25, 2	2017-04-25
Lithographic Apparatus App 20170090296 - NAKIBOGLU; Gunes ; et al.	2017-03-30
Lithographic Apparatus App 20170068175 - WESTERLAKEN; Jan Steven Christiaan ; et al.	2017-03-09
Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method Grant 9,575,406 - Van Der Gaag , et al. February 21, 2	2017-02-21
Lithographic apparatus Grant 9,513,568 - Westerlaken , et al. December 6, 2	2016-12-06
Lithographic Apparatus And A Device Manufacturing Method App 20160179015 - POLET; Theodorus Wilhelmus ; et al.	2016-06-23
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method Grant 9,280,063 - Kunnen , et al. March 8, 2	2016-03-08
Lithographic apparatus and a device manufacturing method Grant 9,274,436 - Polet , et al. March 1, 2	2016-03-01
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ; et al.	2015-12-10
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20150301456 - EBERT, JR.; Earl William ; et al.	2015-10-22
Reticle Cooling System In A Lithographic Apparatus App 20150241796 - EBERT, JR.; Earl William ; et al.	2015-08-27
Lithographic apparatus and device manufacturing method Grant 9,081,311 - Vogel , et al. July 14, 2	2015-07-14
Lithographic Apparatus App 20150168854 - Westerlaken; Jan Steven Christiaan ; et al.	2015-06-18
Lithographic apparatus and device manufacturing method Grant 8,988,657 - Van Boxtel , et al. March 24, 2	2015-03-24
Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus Grant 8,810,769 - Gosen , et al. August 19, 2	2014-08-19
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,675,169 - Van Boxtel , et al. March 18, 2	2014-03-18
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,675,170 - Van Boxtel , et al. March 18, 2	2014-03-18
Pump System, A Carbon Dioxide Supply System, An Extraction System, A Lithographic Apparatus And A Device Manufacturing Method App 20130155380 - Van Der Gaag; Marc Leon ; et al.	2013-06-20
Lithographic Apparatus And A Device Manufacturing Method App 20130149649 - POLET; Theodorus Wilhelmus ; et al.	2013-06-13
Lithographic Apparatus And Method Of Cooling A Component In A Lithographic Apparatus App 20130088694 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2013-04-11
Substrate Table Assembly, An Immersion Lithographic Apparatus And A Device Manufacturing Method App 20130038854 - KUNNEN; Johan Gertrudis Cornelis ; et al.	2013-02-14
Lithographic Apparatus And Device Manufacturing Method App 20130010270 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2013-01-10
Lithographic Apparatus And Device Manufacturing Method App 20120249983 - Vogel; Herman ; et al.	2012-10-04
Projection System, Lithographic Apparatus And Device Manufacturing Method App 20120236275 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2012-09-20
Gas Manifold, Module For A Lithographic Apparatus, Lithographic Apparatus And Device Manufaturing Method App 20120218532 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2012-08-30
Gas Manifold, Module For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120092631 - VAN BOXTEL; Frank Johannes Jacobus ; et al.	2012-04-19
Lithographic Apparatus, An Illumination System, A Projection System And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110228239 - GOSEN; Jeroen Gerard ; et al.	2011-09-22