Van Boxmeer; Johan Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Boxmeer; Johan Maria.The latest application filed is for "method of determining an optimal focus height for a metrology apparatus".

Company Profile

4.5.5

Van Boxmeer; Johan Maria - Sint-Oedenrode NL
- Sint-Oedenrode NL
Van Boxmeer; Johan Maria - Saint Oedenrode NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of determining an optimal focus height for a metrology apparatus Grant 10,571,363 - Medvedyeva , et al. Feb	2020-02-25
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus Grant 10488765 -	2019-11-26
Method Of Determining An Optimal Focus Height For A Metrology Apparatus App 20190242782 - MEDVEDYEVA; Mariya Vyacheslavivna ; et al.	2019-08-08
Method of Optimizing the Position and/or Size of a Measurement Illumination Spot Relative to a Target on a Substrate, and Associated Apparatus App 20190107786 - VAN BOXMEER; Johan Maria ; et al.	2019-04-11
Scatterometer and lithographic apparatus Grant 8,994,921 - Van Boxmeer , et al. March 31, 2	2015-03-31
Scatterometer And Lithographic Apparatus App 20110261339 - Van Boxmeer; Johan Maria ; et al.	2011-10-27
Focus Sensor, Inspection Apparatus, Lithographic Apparatus and Control System App 20110102774 - Sinke; Arnold ; et al.	2011-05-05
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system Grant 7,869,022 - Van Boxmeer , et al. January 11, 2	2011-01-11
Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured thereby Grant 7,835,017 - Modderman , et al. November 16, 2	2010-11-16
Lithographic Apparatus, Method of Exposing a Substrate, Method of Measurement, Device Manufacturing Method, and Device Manufacturing Thereby App 20070252963 - Modderman; Theodorus Marinus ; et al.	2007-11-01

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