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Patent applications and USPTO patent grants for van Bilsen, Franciscus B.M..The latest application filed is for "low-mass susceptor improvements".
Patent | Date |
---|---|
Low-mass susceptor improvements App 20050183829 - Goodman, Matthew G. ;   et al. | 2005-08-25 |
Self-centering wafer support system Grant 6,893,507 - Goodman , et al. May 17, 2 | 2005-05-17 |
Self-centering wafer support system App 20030029571 - Goodman, Matthew G. ;   et al. | 2003-02-13 |
Low mass wafer support system Grant 6,454,865 - Goodman , et al. September 24, 2 | 2002-09-24 |
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