Van Berkel; Koos

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Berkel; Koos.The latest application filed is for "method of determining a property of a structure, inspection apparatus and device manufacturing method".

Company Profile

6.6.7

Van Berkel; Koos - Waalre NL
- Waalre NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus Grant 10,955,595 - Van Berkel , et al. March 23, 2	2021-03-23
Lithographic apparatus Grant 10,747,127 - Van Der Meulen , et al. A	2020-08-18
Method of determining a property of a structure, inspection apparatus and device manufacturing method Grant 10,712,673 - Van Der Post , et al.	2020-07-14
Method Of Determining A Property Of A Structure, Inspection Apparatus And Device Manufacturing Method App 20190361360 - VAN DER POST; Sietse Thijmen ; et al.	2019-11-28
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus Grant 10488765 -	2019-11-26
Lithographic Apparatus App 20190227445 - VAN DER MEULEN; Frits ; et al.	2019-07-25
Method of Optimizing the Position and/or Size of a Measurement Illumination Spot Relative to a Target on a Substrate, and Associated Apparatus App 20190107786 - VAN BOXMEER; Johan Maria ; et al.	2019-04-11
Multilayer Reflector, Method of Manufacturing a Multilayer Reflector and Lithographic Apparatus App 20190033499 - VAN BERKEL; Koos ; et al.	2019-01-31
Method and apparatus for inspection and metrology Grant 10,185,224 - Zijp , et al. Ja	2019-01-22
Method And Apparatus For Inspection And Metrology App 20180120714 - ZIJP; Ferry ; et al.	2018-05-03
Method and apparatus for inspection and metrology Grant 9,927,722 - Van Berkel , et al. March 27, 2	2018-03-27
Method and apparatus for inspection and metrology Grant 9,811,001 - Van Voorst , et al. November 7, 2	2017-11-07
Method And Apparatus For Inspection And Metrology App 20160266503 - Van Voorst; Peter Danny ; et al.	2016-09-15
Method And Apparatus For Inspection And Metrology App 20160246189 - VAN BERKEL; Koos ; et al.	2016-08-25

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