Van Benten; Johannes Maria
Patent Applications and Registrations
Patent applications and USPTO patent grants for Van Benten; Johannes Maria.The latest application filed is for "measurement system, calibration method, lithographic apparatus and positioner".
- Van Benten; Johannes Maria - Heeze NL
- Van Benten; Johannes Maria - Eindhoven NL
| Patent | Date |
|---|---|
| Measurement system, calibration method, lithographic apparatus and positioner Grant 10,520,835 - Van Benten Dec | 2019-12-31 |
| Measurement System, Calibration Method, Lithographic Apparatus and Positioner App 20190129314 - VAN BENTEN; Johannes Maria | 2019-05-02 |
| Lithographic Apparatus, Substrate Table And Device Manufacturing Method App 20130050674 - Prosyentsov; Vitaliy ; et al. | 2013-02-28 |
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