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Patent applications and USPTO patent grants for Van Ballegoij; Robertus Nicodemus Jacobus.The latest application filed is for "lithographic apparatus and method".
Patent | Date |
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Lithographic apparatus and method Grant 10,139,735 - Baselmans , et al. Nov | 2018-11-27 |
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2 | 2018-07-24 |
Lithographic Apparatus and Method App 20170131642 - BASELMANS; Johannes Jacobus Matheus ;   et al. | 2017-05-11 |
Fluid extraction system, lithographic apparatus and device manufacturing method Grant 9,213,246 - Kemper , et al. December 15, 2 | 2015-12-15 |
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ;   et al. | 2015-12-10 |
Fluid Extraction System, Lithographic Apparatus And Device Manufacturing Method App 20140300879 - KEMPER; Nicolaas Rudolf ;   et al. | 2014-10-09 |
Fluid extraction system, lithographic apparatus and device manufacturing method Grant 8,654,309 - Kemper , et al. February 18, 2 | 2014-02-18 |
Fluid Extraction System, Lithographic Apparatus And Device Manufacturing Method App 20100149501 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-17 |
Lithographic apparatus and device manufacturing method Grant 7,361,911 - Moors , et al. April 22, 2 | 2008-04-22 |
Lithographic apparatus and device manufacturing method Grant 7,072,025 - Cox , et al. July 4, 2 | 2006-07-04 |
Lithographic apparatus, device manufacturing method and substrate holder Grant 7,030,967 - Van Ballegoij , et al. April 18, 2 | 2006-04-18 |
Lithographic apparatus and device manufacturing method App 20050190351 - Cox, Henrikus Herman Marie ;   et al. | 2005-09-01 |
Lithographic apparatus and device manufacturing method Grant 6,906,786 - Cox , et al. June 14, 2 | 2005-06-14 |
Lithographic apparatus, device manufacturing method and substrate holder App 20040179183 - Van Ballegoij, Robertus Nicodemus Jacobus ;   et al. | 2004-09-16 |
Lithographic apparatus and device manufacturing method App 20040008331 - Cox, Henrikus Herman Marie ;   et al. | 2004-01-15 |
Lithographic projection apparatus, supporting assembly and device manufacturing method App 20020005939 - Cuijpers, Martinus Agnes Willem ;   et al. | 2002-01-17 |
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