Patent | Date |
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Adjustment Of Power And Frequency Based On Three Or More States App 20220277934 - Valcore, Jr.; John C. ;   et al. | 2022-09-01 |
Adjustment of power and frequency based on three or more states Grant 11,361,942 - Valcore, Jr. , et al. June 14, 2 | 2022-06-14 |
Systems And Methods For Tuning A Mhz Rf Generator Within A Cycle Of Operation Of A Khz Rf Generator App 20220165543 - Howald; Arthur M. ;   et al. | 2022-05-26 |
Using modeling for identifying a location of a fault in an RF transmission system for a plasma system Grant 10,950,421 - Valcore, Jr. March 16, 2 | 2021-03-16 |
Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power Grant 10,911,081 - Howald , et al. February 2, 2 | 2021-02-02 |
Systems and methods for tuning an impedance matching network in a step-wise fashion Grant 10,853,444 - Howald , et al. December 1, 2 | 2020-12-01 |
Segmenting a model within a plasma system Grant 10,762,266 - Valcore, Jr. , et al. Sep | 2020-09-01 |
RF impedance model based fault detection Grant 10,748,748 - Valcore, Jr. , et al. A | 2020-08-18 |
Adjustment Of Power And Frequency Based On Three Or More States App 20200243304 - Valcore, JR.; John C. ;   et al. | 2020-07-30 |
Systems And Methods For Tuning An Impedance Matching Network In A Step-wise Fashion App 20200218774 - Howald; Arthur M. ;   et al. | 2020-07-09 |
Using modeling to determine ion energy associated with a plasma system Grant 10,707,056 - Valcore, Jr. , et al. | 2020-07-07 |
Adjustment of power and frequency based on three or more states Grant 10,629,413 - Valcore, Jr. , et al. | 2020-04-21 |
Systems and methods for tuning an impedance matching network in a step-wise fashion Grant 10,621,265 - Howald , et al. | 2020-04-14 |
Segmenting A Model Within A Plasma System App 20200074034 - Valcore, JR.; John C. ;   et al. | 2020-03-05 |
Systems And Methods For Reducing Power Reflected Towards A Higher Frequency Rf Generator During A Period Of A Lower Rf Generator App 20200067545 - Howald; Arthur M. ;   et al. | 2020-02-27 |
Dual push between a host computer system and an RF generator Grant 10,536,183 - Valcore, Jr. , et al. Ja | 2020-01-14 |
Segmenting a model within a plasma system Grant 10,474,780 - Valcore, Jr. , et al. Nov | 2019-11-12 |
Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator Grant 10,469,108 - Howald , et al. No | 2019-11-05 |
Control Of Etch Rate Using Modeling, Feedback And Impedance Match App 20190318919 - Lyndaker; Bradford J. ;   et al. | 2019-10-17 |
Systems And Methods For Tuning An Impedance Matching Network In A Step-wise Fashion App 20190272306 - Howald; Arthur M. ;   et al. | 2019-09-05 |
Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator Grant 10,403,482 - Howald , et al. Sep | 2019-09-03 |
Control of etch rate using modeling, feedback and impedance match Grant 10,381,201 - Lyndaker , et al. A | 2019-08-13 |
Using modeling to determine wafer bias associated with a plasma system Grant 10,340,127 - Valcore, Jr. , et al. | 2019-07-02 |
Multiple control modes Grant 10,325,759 - Valcore, Jr. , et al. | 2019-06-18 |
System, method and apparatus for using optical data to monitor RF generator operations Grant 10,325,760 - Valcore, Jr. , et al. | 2019-06-18 |
Determining a malfunctioning device in a plasma system Grant 10,319,570 - Valcore, Jr. , et al. | 2019-06-11 |
Systems and methods for tuning an impedance matching network in a step-wise fashion Grant 10,296,676 - Howald , et al. | 2019-05-21 |
Systems and methods for using computer-generated models to reduce reflected power towards an RF generator during state transitions of the RF generator by controlling RF values of the RF generator Grant 10,276,350 - Howald , et al. | 2019-04-30 |
Sub-pulsing during a state Grant 10256077 - | 2019-04-09 |
Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator Grant 10,256,078 - Howald , et al. | 2019-04-09 |
State-based adjustment of power and frequency Grant 10,231,321 - Valcore, Jr. , et al. | 2019-03-12 |
Rf Impedance Model Based Fault Detection App 20190057847 - Valcore, JR.; John C. ;   et al. | 2019-02-21 |
Dual Push Between A Host Computer System And An RF Generator App 20190044565 - Valcore, JR.; John C. ;   et al. | 2019-02-07 |
Systems and methods for synchronizing execution of recipe sets Grant 10,191,466 - Valcore, Jr. , et al. Ja | 2019-01-29 |
Systems and Methods for Increasing Efficiency of Delivered Power of a Megahertz Radio Frequency Generator in the Presence of a Kilohertz Radio Frequency Generator App 20190027342 - Howald; Arthur M. ;   et al. | 2019-01-24 |
Computation of statistics for statistical data decimation Grant 10,163,605 - Fong , et al. Dec | 2018-12-25 |
Soft pulsing Grant 10,157,729 - Valcore, Jr. Dec | 2018-12-18 |
RF impedance model based fault detection Grant 10,128,090 - Valcore, Jr. , et al. November 13, 2 | 2018-11-13 |
Methods And Apparatus For Controlling Plasma In A Plasma Processing System App 20180323038 - Valcore, JR.; John C. ;   et al. | 2018-11-08 |
Dual push between a host computer system and an RF generator Grant 10,103,771 - Valcore, Jr. , et al. October 16, 2 | 2018-10-16 |
System, method and apparatus for refining radio frequency transmission system models Grant 10,102,321 - Povolny , et al. October 16, 2 | 2018-10-16 |
Sub-Pulsing During a State App 20180294140 - Valcore, JR.; John C. ;   et al. | 2018-10-11 |
Adjustment of power and frequency based on three or more states Grant 10,074,520 - Valcore, Jr. , et al. September 11, 2 | 2018-09-11 |
Methods and apparatus for controlling plasma in a plasma processing system Grant 10,032,605 - Valcore, Jr. , et al. July 24, 2 | 2018-07-24 |
Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator Grant 10,020,168 - Howald , et al. July 10, 2 | 2018-07-10 |
Determining a value of a variable on an RF transmission model Grant 10,008,371 - Valcore, Jr. , et al. June 26, 2 | 2018-06-26 |
Sub-pulsing during a state Grant 9,997,333 - Valcore, Jr. , et al. June 12, 2 | 2018-06-12 |
Impedance-based adjustment of power and frequency Grant 9,960,015 - Valcore, Jr. , et al. May 1, 2 | 2018-05-01 |
Edge ramping Grant 9,947,513 - Valcore, Jr. , et al. April 17, 2 | 2018-04-17 |
Cable power loss determination for virtual metrology Grant 9,927,481 - Howald , et al. March 27, 2 | 2018-03-27 |
Using Modeling To Determine Ion Energy Associated With A Plasma System App 20180068834 - Valcore, JR.; John C. ;   et al. | 2018-03-08 |
Arrangement for plasma processing system control based on RF voltage Grant 9,911,577 - Valcore, Jr. , et al. March 6, 2 | 2018-03-06 |
Computation Of Statistics For Statistical Data Decimation App 20180053632 - Fong; Andrew S. ;   et al. | 2018-02-22 |
Sub-Pulsing During a State App 20180033596 - Valcore, Jr.; John C. ;   et al. | 2018-02-01 |
Segmenting A Model Within A Plasma System App 20180018418 - Valcore, JR.; John C. ;   et al. | 2018-01-18 |
Using modeling to determine ion energy associated with a plasma system Grant 9,842,725 - Valcore, Jr. , et al. December 12, 2 | 2017-12-12 |
Systems and methods for using one or more fixtures and efficiency to determine parameters of a match network model Grant 9,837,252 - Howald , et al. December 5, 2 | 2017-12-05 |
Systems and methods for using multiple inductive and capacitive fixtures for applying a variety of plasma conditions to determine a match network model Grant 9,831,071 - Howald , et al. November 28, 2 | 2017-11-28 |
Computation of statistics for statistical data decimation Grant 9,831,065 - Fong , et al. November 28, 2 | 2017-11-28 |
Adjustment Of Power And Frequency Based On Three Or More States App 20170330732 - Valcore, JR.; John C. ;   et al. | 2017-11-16 |
Sub-pulsing during a state Grant 9,812,294 - Valcore, Jr. , et al. November 7, 2 | 2017-11-07 |
Systems And Methods For Tuning An Impedance Matching Network In A Step-wise Fashion For Multiple States Of An Rf Generator App 20170294293 - Howald; Arthur M. ;   et al. | 2017-10-12 |
Segmenting a model within a plasma system Grant 9,779,196 - Valcore, Jr. , et al. October 3, 2 | 2017-10-03 |
Edge Ramping App 20170263419 - Valcore, JR.; John C. ;   et al. | 2017-09-14 |
Dual Push Between A Host Computer System And An RF Generator App 20170257134 - Valcore, JR.; John C. ;   et al. | 2017-09-07 |
Systems and methods for providing characteristics of an impedance matching model for use with matching networks Grant 9,720,022 - Howald , et al. August 1, 2 | 2017-08-01 |
Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator Grant 9,711,332 - Howald , et al. July 18, 2 | 2017-07-18 |
System, Method And Apparatus For Using Optical Data To Monitor Rf Generator Operations App 20170200592 - Valcore, JR.; John C. ;   et al. | 2017-07-13 |
Control Of Etch Rate Using Modeling, Feedback And Impedance Match App 20170194130 - Lyndaker; Bradford J. ;   et al. | 2017-07-06 |
Determining A Malfunctioning Device in A Plasma System App 20170178873 - Valcore, JR.; John C. ;   et al. | 2017-06-22 |
Impedance-based Adjustment Of Power And Frequency App 20170178864 - Valcore, JR.; John C. ;   et al. | 2017-06-22 |
Edge ramping Grant 9,673,026 - Valcore, Jr. , et al. June 6, 2 | 2017-06-06 |
Dual push between a host computer system and an RF generator Grant 9,667,303 - Valcore, Jr. , et al. May 30, 2 | 2017-05-30 |
Cable Power Loss Determination For Virtual Metrology App 20170146581 - Howald; Arthur M. ;   et al. | 2017-05-25 |
System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path Grant 9,652,567 - Valcore, Jr. , et al. May 16, 2 | 2017-05-16 |
Tuning a parameter associated with plasma impedance Grant 9,627,182 - Valcore, Jr. , et al. April 18, 2 | 2017-04-18 |
System, method and apparatus for using optical data to monitor RF generator operations Grant 9,627,186 - Valcore, Jr. , et al. April 18, 2 | 2017-04-18 |
Systems And Methods For Tuning An Impedance Matching Network In A Step-wise Fashion For Multiple States Of An Rf Generator App 20170103872 - Howald; Arthur M. ;   et al. | 2017-04-13 |
Control of etch rate using modeling, feedback and impedance match Grant 9,620,334 - Lyndaker , et al. April 11, 2 | 2017-04-11 |
Determining a malfunctioning device in a plasma system Grant 9,620,337 - Valcore, Jr. , et al. April 11, 2 | 2017-04-11 |
Impedance-based adjustment of power and frequency Grant 9,607,810 - Valcore, Jr. , et al. March 28, 2 | 2017-03-28 |
Multiple Control Modes App 20170084432 - Valcore, JR.; John C. ;   et al. | 2017-03-23 |
Cable power loss determination for virtual metrology Grant 9,594,105 - Howald , et al. March 14, 2 | 2017-03-14 |
Using Modeling To Determine Wafer Bias Associated With A Plasma System App 20170032945 - Valcore, JR.; John C. ;   et al. | 2017-02-02 |
Dual control modes Grant 9,530,620 - Valcore, Jr. December 27, 2 | 2016-12-27 |
Arrangement For Plasma Processing System Control Based On RF Voltage App 20160351375 - Valcore, JR.; John C. ;   et al. | 2016-12-01 |
System, method and apparatus for RF power compensation in a plasma processing system Grant 9,508,529 - Valcore, Jr. , et al. November 29, 2 | 2016-11-29 |
Systems And Methods For Providing Characteristics Of An Impedance Matching Model For Use With Matching Networks App 20160343548 - Howald; Arthur M. ;   et al. | 2016-11-24 |
Using modeling to determine wafer bias associated with a plasma system Grant 9,502,216 - Valcore, Jr. , et al. November 22, 2 | 2016-11-22 |
Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching Grant 9,502,221 - Valcore, Jr. , et al. November 22, 2 | 2016-11-22 |
Adjustment Of Power And Frequency Based On Three Or More States App 20160336152 - Valcore, JR.; John C. ;   et al. | 2016-11-17 |
Edge Ramping App 20160322202 - Valcore, JR.; John C. ;   et al. | 2016-11-03 |
Systems And Methods For Using One Or More Fixtures And Efficiency To Determine Parameters Of A Match Network Model App 20160322207 - Howald; Arthur M. ;   et al. | 2016-11-03 |
Systems And Methods For Reducing Power Reflected Towards A Higher Frequency Rf Generator During A Period Of A Lower Rf Generator And For Using A Relationship To Reduce Reflected Power App 20160308560 - Howald; Arthur M. ;   et al. | 2016-10-20 |
Systems And Methods For Reducing Reflected Power During State Transitions By Using Radio Frequency Values App 20160307736 - Howald; Arthur M. ;   et al. | 2016-10-20 |
Adjustment of power and frequency based on three or more states Grant 9,462,672 - Valcore, Jr. , et al. October 4, 2 | 2016-10-04 |
Arrangement for plasma processing system control based on RF voltage Grant 9,455,126 - Valcore, Jr. , et al. September 27, 2 | 2016-09-27 |
Sub-pulsing During A State App 20160276137 - Valcore, JR.; John C. ;   et al. | 2016-09-22 |
Methods And Apparatus For Synchronizing Rf Pulses In A Plasma Processing System App 20160268100 - Valcore, JR.; John C. ;   et al. | 2016-09-15 |
Systems And Methods For Tuning An Impedance Matching Network In A Step-wise Fashion App 20160259872 - Howald; Arthur M. ;   et al. | 2016-09-08 |
Systems And Methods For Synchronizing Execution Of Recipe Sets App 20160252892 - Valcore, JR.; John C. ;   et al. | 2016-09-01 |
Systems And Methods For Using Multiple Inductive And Capacitive Fixtures For Applying A Variety Of Plasma Conditions To Determine A Match Network Model App 20160240356 - Howald; Arthur M. ;   et al. | 2016-08-18 |
Edge ramping Grant 9,408,288 - Valcore, Jr. , et al. August 2, 2 | 2016-08-02 |
Dual Push Between A Host Computer System And An RF Generator App 20160218766 - Valcore, JR.; John C. ;   et al. | 2016-07-28 |
Sub-pulsing during a state Grant 9,390,893 - Valcore, Jr. , et al. July 12, 2 | 2016-07-12 |
Determining A Value Of A Variable On An Rf Transmission Model App 20160189937 - Valcore, JR.; John C. ;   et al. | 2016-06-30 |
Tuning A Parameter Associated With Plasma Impedance App 20160189932 - Valcore, JR.; John C. ;   et al. | 2016-06-30 |
Computation Of Statistics For Statistical Data Decimation App 20160172162 - Fong; Andrew S. ;   et al. | 2016-06-16 |
Methods and apparatus for synchronizing RF pulses in a plasma processing system Grant 9,368,329 - Valcore, Jr. , et al. June 14, 2 | 2016-06-14 |
System, Method and Apparatus for Refining RF Transmission System Models App 20160117425 - Povolny; Henry S. ;   et al. | 2016-04-28 |
System, Method and Apparatus for RF Power Compensation in a Plasma Processing System App 20160118227 - Valcore, Jr.; John C. ;   et al. | 2016-04-28 |
System, Method and Apparatus for Improving Accuracy of RF Transmission Models for Selected Portions of an RF Transmission Path App 20160109863 - Valcore, Jr.; John C. ;   et al. | 2016-04-21 |
Tuning a parameter associated with plasma impedance Grant 9,320,127 - Valcore, Jr. , et al. April 19, 2 | 2016-04-19 |
Determining a value of a variable on an RF transmission model Grant 9,320,126 - Valcore, Jr. , et al. April 19, 2 | 2016-04-19 |
Computation of statistics for statistical data decimation Grant 9,295,148 - Fong , et al. March 22, 2 | 2016-03-22 |
System, Method and Apparatus for Using Optical Data to Monitor RF Generator Operations App 20160064199 - Valcore, JR.; John C. ;   et al. | 2016-03-03 |
State-based Adjustment Of Power And Frequency App 20160044775 - Valcore, JR.; John C. ;   et al. | 2016-02-11 |
Frequency enhanced impedance dependent power control for multi-frequency RF pulsing Grant 9,236,228 - Valcore, Jr. , et al. January 12, 2 | 2016-01-12 |
Impedance-based Adjustment Of Power And Frequency App 20160005573 - Valcore, JR.; John C. ;   et al. | 2016-01-07 |
State-based adjustment of power and frequency Grant 9,197,196 - Valcore, Jr. , et al. November 24, 2 | 2015-11-24 |
Arrangement For Plasma Processing System Control Based On RF Voltage App 20150332894 - Valcore, JR.; John C. ;   et al. | 2015-11-19 |
Methods And Apparatus For Controlling Plasma In A Plasma Processing System App 20150311041 - Valcore, JR.; John C. ;   et al. | 2015-10-29 |
Impedance-based adjustment of power and frequency Grant 9,171,699 - Valcore, Jr. , et al. October 27, 2 | 2015-10-27 |
Using Modeling For Identifying A Location Of A Fault In An Rf Transmission System For A Plasma System App 20150301100 - Valcore, JR.; John C. | 2015-10-22 |
Tuning a parameter associated with plasma impedance Grant 9,155,182 - Valcore, Jr. , et al. October 6, 2 | 2015-10-06 |
Methods and apparatus for controlling plasma in a plasma processing system Grant 9,114,666 - Valcore, Jr. , et al. August 25, 2 | 2015-08-25 |
Frequency Enhanced Impedance Dependent Power Control for Multi-Frequency RF Pulsing App 20150214012 - Valcore, JR.; John C. ;   et al. | 2015-07-30 |
Tuning A Parameter Associated With Plasma Impedance App 20150206717 - Valcore, JR.; John C. ;   et al. | 2015-07-23 |
Cable Power Loss Determination For Virtual Metrology App 20150198639 - Howald; Arthur M. ;   et al. | 2015-07-16 |
Etch rate modeling and use thereof for in-chamber and chamber-to-chamber matching Grant 9,082,594 - Valcore, Jr. , et al. July 14, 2 | 2015-07-14 |
Optimizing a rate of transfer of data between an RF generator and a host system within a plasma tool Grant 9,043,525 - Valcore, Jr. May 26, 2 | 2015-05-26 |
Frequency enhanced impedance dependent power control for multi-frequency RF pulsing Grant 9,030,101 - Valcore, Jr. , et al. May 12, 2 | 2015-05-12 |
RF Impedance Model Based Fault Detection App 20150069912 - Valcore, JR.; John C. ;   et al. | 2015-03-12 |
Sub-pulsing During A State App 20150048740 - Valcore, JR.; John C. ;   et al. | 2015-02-19 |
Etch Rate Modeling and Use Thereof for In-Chamber and Chamber-to-Chamber Matching App 20150028744 - Valcore, JR.; John C. ;   et al. | 2015-01-29 |
Etch Rate Modeling and Use Thereof with Multiple Parameters for In-Chamber and Chamber-to-Chamber Matching App 20150032245 - Valcore, JR.; John C. ;   et al. | 2015-01-29 |
Methods and apparatus for controlling a plasma processing system Grant 8,909,365 - Valcore, Jr. December 9, 2 | 2014-12-09 |
Methods and apparatus for detecting the confinement state of plasma in a plasma processing system Grant 8,901,935 - Valcore, Jr. , et al. December 2, 2 | 2014-12-02 |
Soft Pulsing App 20140305589 - Valcore, JR.; John C. | 2014-10-16 |
Dual Control Modes App 20140265852 - Valcore, JR.; John C. | 2014-09-18 |
Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential Grant 8,797,705 - Valcore, Jr. , et al. August 5, 2 | 2014-08-05 |
Segmenting A Model Within A Plasma System App 20140214395 - Valcore, JR.; John C. ;   et al. | 2014-07-31 |
Using Modeling to Determine Ion Energy Associated with A Plasma System App 20140214351 - Valcore, JR.; John C. ;   et al. | 2014-07-31 |
Determining A Malfunctioning Device in A Plasma System App 20140210508 - Valcore, JR.; John C. ;   et al. | 2014-07-31 |
Using Modeling to Determine Wafer Bias Associated With A Plasma System App 20140214350 - Valcore, JR.; John C. ;   et al. | 2014-07-31 |
Tuning A Parameter Associated With Plasma Impedance App 20140197731 - Valcore, JR.; John C. ;   et al. | 2014-07-17 |
Control of Etch Rate Using Modeling, Feedback and Impedance Match App 20140195033 - Lyndaker; Bradford J. ;   et al. | 2014-07-10 |
Determining A Value Of A Variable On An Rf Transmission Model App 20140172335 - Valcore, JR.; John C. ;   et al. | 2014-06-19 |
Rate of Transfer of Data Within A Plasma System App 20140173158 - Valcore, JR.; John C. | 2014-06-19 |
Computation of Statistics for Statistical Data Decimation App 20140167613 - Fong; Andrew S. ;   et al. | 2014-06-19 |
Edge Ramping App 20140076713 - Valcore, JR.; John C. ;   et al. | 2014-03-20 |
Adjustment of Power and Frequency Based on Three or More States App 20140009073 - Valcore, JR.; John C. ;   et al. | 2014-01-09 |
Arrangement For Plasma Processing System Control Based On Rf Voltage App 20130345847 - Valcore, JR.; John C. ;   et al. | 2013-12-26 |
Methods And Apparatus For Controlling Plasma In A Plasma Processing System App 20130213934 - Valcore, JR.; John C. ;   et al. | 2013-08-22 |
Frequency Enhanced Impedance Dependent Power Control For Multi-frequency Rf Pulsing App 20130214682 - Valcore, JR.; John C. ;   et al. | 2013-08-22 |
State-based Adjustment Of Power And Frequency App 20130213573 - Valcore, JR.; John C. ;   et al. | 2013-08-22 |
Methods And Apparatus For Synchronizing Rf Pulses In A Plasma Processing System App 20130214828 - Valcore, JR.; John C, ;   et al. | 2013-08-22 |
Impedance-Based Adjustment of Power and Frequency App 20130214683 - Valcore, JR.; John C. ;   et al. | 2013-08-22 |
Plasma processing system control based on RF voltage Grant 8,501,631 - Valcore, Jr. , et al. August 6, 2 | 2013-08-06 |
System and method for plasma arc detection, isolation and prevention Grant 8,440,061 - Valcore, Jr. , et al. May 14, 2 | 2013-05-14 |
Plasma Processing System Control Based On Rf Voltage App 20110137446 - Valcore, JR.; John C. ;   et al. | 2011-06-09 |
Methods And Apparatus For Detecting The Confinement State Of Plasma In A Plasma Processing System App 20110115492 - Valcore, JR.; John C. ;   et al. | 2011-05-19 |
Methods And Apparatus For Controlling A Plasma Processing System App 20110118863 - Valcore, JR.; John C. | 2011-05-19 |
Methods And Arrangement For Detecting A Wafer-released Event Within A Plasma Processing Chamber App 20110060442 - Valcore, JR.; John C. ;   et al. | 2011-03-10 |
Methods And Arrangement For Plasma Dechuck Optimization Based On Coupling Of Plasma Signaling To Substrate Position And Potential App 20110058302 - Valcore, JR.; John C. ;   et al. | 2011-03-10 |
System And Method For Plasma Arc Detection, Isolation And Prevention App 20110011730 - Valcore, JR.; John C. ;   et al. | 2011-01-20 |