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Patent applications and USPTO patent grants for Vakshtein; Irina.The latest application filed is for "pupil plane calibration for scatterometry overlay measurement".
Patent | Date |
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Method and system for providing a quality metric for improved process control Grant 11,372,340 - Kandel , et al. June 28, 2 | 2022-06-28 |
Pupil plane calibration for scatterometry overlay measurement Grant 9,909,982 - Bringoltz , et al. March 6, 2 | 2018-03-06 |
Pupil Plane Calibration For Scatterometry Overlay Measurement App 20140257734 - Bringoltz; Barak ;   et al. | 2014-09-11 |
Method And System For Providing A Quality Metric For Improved Process Control App 20130035888 - Kandel; Daniel ;   et al. | 2013-02-07 |
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