Vahedi; Vahid

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vahedi; Vahid.The latest application filed is for "photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch pro".

Company Profile

7.40.31

Vahedi; Vahid - Oakland CA
Vahedi; Vahid - Albany CA
Vahedi; Vahid - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System implementing machine learning in complex multivariate wafer processing equipment Grant 10,615,009 - Guha , et al.	2020-04-07
Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework Grant 10,585,347 - Sriraman , et al.	2020-03-10
Tunable multi-zone gas injection system Grant 10,403,475 - Cooperberg , et al. Sep	2019-09-03
Photoresist Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction Via A Physics-based Etch Pro App 20190250501 - Sriraman; Saravanapriyan ; et al.	2019-08-15
High aspect ratio etch of oxide metal oxide metal stack Grant 10,242,883 - Guha , et al.	2019-03-26
Internal plasma grid for semiconductor fabrication Grant 10,224,221 - Singh , et al.	2019-03-05
Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework Grant 10,197,908 - Sriraman , et al. Fe	2019-02-05
High Aspect Ratio Etch Of Oxide Metal Oxide Metal Stack App 20180374712 - GUHA; Joydeep ; et al.	2018-12-27
System Implementing Machine Learning in Complex Multivariate Wafer Processing Equipment App 20180247798 - Guha; Joydeep ; et al.	2018-08-30
Adjusting substrate temperature to improve CD uniformity Grant 10,056,225 - Gaff , et al. August 21, 2	2018-08-21
Method and process of implementing machine learning in complex multivariate wafer processing equipment Grant 9,972,478 - Guha , et al. May 15, 2	2018-05-15
Method and Process of Implementing Machine Learning in Complex Multivariate Wafer Processing Equipment App 20180082826 - Guha; Joydeep ; et al.	2018-03-22
Photoresist Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction Via A Physics-based Etch Profile Modeling Framework App 20170363950 - Sriraman; Saravanapriyan ; et al.	2017-12-21
Equipment front end module for transferring wafers and method of transferring wafers Grant 9,818,633 - Lill , et al. November 14, 2	2017-11-14
High aspect ratio etch with combination mask Grant 9,659,783 - Guha , et al. May 23, 2	2017-05-23
Internal Plasma Grid For Semiconductor Fabrication App 20160203990 - Singh; Harmeet ; et al.	2016-07-14
Internal Plasma Grid For Semiconductor Fabrication App 20160181130 - Singh; Harmeet ; et al.	2016-06-23
Equipment Front End Module For Transferring Wafers And Method Of Transferring Wafers App 20160111309 - Lill; Thorsten ; et al.	2016-04-21
Internal plasma grid for semiconductor fabrication Grant 9,245,761 - Singh , et al. January 26, 2	2016-01-26
Tunable Multi-zone Gas Injection System App 20150235811 - Cooperberg; David J. ; et al.	2015-08-20
High Aspect Ratio Etch With Combination Mask App 20150200106 - GUHA; Joydeep ; et al.	2015-07-16
High aspect ratio etch with combination mask Grant 9,018,103 - Guha , et al. April 28, 2	2015-04-28
High Aspect Ratio Etch With Combination Mask App 20150087154 - GUHA; Joydeep ; et al.	2015-03-26
Internal Plasma Grid For Semiconductor Fabrication App 20140302681 - Paterson; Alex ; et al.	2014-10-09
Internal Plasma Grid For Semiconductor Fabrication App 20140302680 - Singh; Harmeet ; et al.	2014-10-09
Adjusting Substrate Temperature To Improve Cd Uniformity App 20140110060 - Gaff; Keith William ; et al.	2014-04-24
Adjusting substrate temperature to improve CD uniformity Grant 8,642,480 - Gaff , et al. February 4, 2	2014-02-04
Method and apparatus of halogen removal Grant 8,525,139 - Singh , et al. September 3, 2	2013-09-03
Adjusting Substrate Temperature To Improve Cd Uniformity App 20110143462 - Gaff; Keith William ; et al.	2011-06-16
Method And Apparatus Of Halogen Removal App 20110097902 - Singh; Harmeet ; et al.	2011-04-28
Edge gas injection for critical dimension uniformity improvement Grant 7,932,181 - Singh , et al. April 26, 2	2011-04-26
Method to improve profile control and N/P loading in dual doped gate applications Grant 7,682,980 - Del Puppo , et al. March 23, 2	2010-03-23
Tunable Multi-zone Gas Injection System App 20100041238 - Cooperberg; David J. ; et al.	2010-02-18
Components For Use In A Plasma Chamber Having Reduced Particle Generation And Method Of Making App 20090261065 - SINGH; HARMEET ; et al.	2009-10-22
Method and apparatus for tuning a set of plasma processing steps Grant 7,578,945 - Vahedi , et al. August 25, 2	2009-08-25
Edge gas injection for critical dimension uniformity improvement App 20070293043 - Singh; Harmeet ; et al.	2007-12-20
Method To Improve Profile Control And N/p Loading In Dual Doped Gate Applications App 20070119545 - Del Puppo; Helene ; et al.	2007-05-31
Method To Improve Profile Control And N/p Loading In Dual Doped Gate Applications App 20070117399 - Del Puppo; Helene ; et al.	2007-05-24
Method for planarization etch with in-situ monitoring by interferometry prior to recess etch Grant 7,204,934 - Braly , et al. April 17, 2	2007-04-17
Method and apparatus to calibrate a semi-empirical process simulator Grant RE39,534 - Cooperberg , et al. March 27, 2	2007-03-27
Method to improve profile control and N/P loading in dual doped gate applications Grant 7,186,661 - Puppo , et al. March 6, 2	2007-03-06
Method and apparatus for tuning a set of plasma processing steps App 20070034604 - Vahedi; Vahid ; et al.	2007-02-15
Methods and apparatus for tuning a set of plasma processing steps Grant 7,138,067 - Vahedi , et al. November 21, 2	2006-11-21
Enhanced process and profile simulator algorithms Grant 7,139,632 - Cooperberg , et al. November 21, 2	2006-11-21
Methods and apparatus for tuning a set of plasma processing steps App 20060065628 - Vahedi; Vahid ; et al.	2006-03-30
Methods for controlling and reducing profile variation in photoresist trimming Grant 7,018,780 - Vahedi , et al. March 28, 2	2006-03-28
In-situ cleaning of a polymer coated plasma processing chamber Grant 6,994,769 - Singh , et al. February 7, 2	2006-02-07
Enhanced process and profile simulator algorithms App 20050278057 - Cooperberg, David ; et al.	2005-12-15
Variable temperature processes for tunable electrostatic chuck Grant 6,921,724 - Kamp , et al. July 26, 2	2005-07-26
Plasma processor with electrode simultaneously responsive to plural frequencies Grant 6,841,943 - Vahedi , et al. January 11, 2	2005-01-11
In-situ cleaning of a polymer coated plasma processing chamber App 20040231800 - Singh, Harmeet ; et al.	2004-11-25
Enhanced process and profile simulator algorithms Grant 6,804,572 - Cooperberg , et al. October 12, 2	2004-10-12
Method to improve profile control and n/p loading in dual doped gate applications App 20040175950 - Puppo, Helene Del ; et al.	2004-09-09
In-situ cleaning of a polymer coated plasma processing chamber Grant 6,776,851 - Singh , et al. August 17, 2	2004-08-17
Plasma processor with electrode simultaneously responsive to plural frequencies App 20040000875 - Vahedi, Vahid ; et al.	2004-01-01
Methods for reducing profile variation in photoresist trimming Grant 6,653,058 - Vahedi , et al. November 25, 2	2003-11-25
Variable temperature processes for tunable electrostatic chuck App 20030186545 - Kamp, Tom A. ; et al.	2003-10-02
Method for scaling processes between different etching chambers and wafer sizes Grant 6,618,638 - Vahedi , et al. September 9, 2	2003-09-09
Methods for controlling and reducing profile variation in photoresist trimming App 20030148224 - Vahedi, Vahid ; et al.	2003-08-07
Applications of a semi-empirical, physically based, profile simulator Grant 6,577,915 - Cooperberg , et al. June 10, 2	2003-06-10
Tunable multi-zone gas injection system App 20030070620 - Cooperberg, David J. ; et al.	2003-04-17
Methods for reducing profile variation in photoresist trimming App 20020018965 - Vahedi, Vahid ; et al.	2002-02-14
Techniques for improving etch rate uniformity Grant 6,344,105 - Daugherty , et al. February 5, 2	2002-02-05
Methods for reducing profile variation in photoresist trimming Grant 6,316,169 - Vahedi , et al. November 13, 2	2001-11-13
Method and apparatus to calibrate a semi-empirical process simulator Grant 6,301,510 - Cooperberg , et al. October 9, 2	2001-10-09
Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features Grant 6,218,309 - Miller , et al. April 17, 2	2001-04-17
Method and apparatus for predicting plasma-process surface profiles Grant 6,151,532 - Barone , et al. November 21, 2	2000-11-21
Methods for reducing mask erosion during plasma etching Grant 6,093,332 - Winniczek , et al. July 25, 2	2000-07-25
Method for reduction of plasma charging damage during chemical vapor deposition Grant 5,913,140 - Roche , et al. June 15, 1	1999-06-15

Company Registrations

SEC

0001707826

Vahedi Vahid

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