Vaez-Iravani; Mehdi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Vaez-Iravani; Mehdi.The latest application filed is for "spatial pattern loading measurement with imaging metrology".
Company Profile
17.102.86
- Vaez-Iravani; Mehdi - Los Gatos CA
- Vaez-Iravani; Mehdi - Santa Clara CA
- Vaez=Iravani; Mehdi - Scottsville NY
- Vaez-Iravani; Mehdi - Peekskill NY
Patent Activity
| Patent | Date |
|---|---|
| Spatial Pattern Loading Measurement With Imaging Metrology App 20220310425 - Ng; Eric Chin Hong ; et al. | 2022-09-29 |
| In-situ, real-time detection of particulate defects in a fluid Grant 11,442,000 - Vaez-Iravani , et al. September 13, 2 | 2022-09-13 |
| Method and apparatus for detection of particle size in a fluid Grant 11,441,992 - Vaez-Iravani , et al. September 13, 2 | 2022-09-13 |
| Method and apparatus for detection of particle size in a fluid Grant 11,353,389 - Vaez-Iravani , et al. June 7, 2 | 2022-06-07 |
| Multibeamlet charged particle device and method Grant 11,309,163 - Vaez-Iravani , et al. April 19, 2 | 2022-04-19 |
| Method And Apparatus For Detection Of Particle Size In A Fluid App 20220099546 - VAEZ-IRAVANI; Mehdi ; et al. | 2022-03-31 |
| Systems and methods for inspection of a specimen Grant 11,204,330 - Vaez-Iravani , et al. December 21, 2 | 2021-12-21 |
| Method And Apparatus For Detection Of Particle Size In A Fluid App 20210372911 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-12-02 |
| Imaging reflectometer Grant 11,187,654 - Zhao , et al. November 30, 2 | 2021-11-30 |
| Image Based Metrology Of Surface Deformations App 20210366143 - Vaez-Iravani; Mehdi ; et al. | 2021-11-25 |
| High sensitivity image-based reflectometry Grant 11,156,566 - Zhao , et al. October 26, 2 | 2021-10-26 |
| High sensitivity image-based reflectometry Grant 11,150,078 - Zhao , et al. October 19, 2 | 2021-10-19 |
| High Sensitivity Image-based Reflectometry App 20210302330 - Zhao; Guoheng ; et al. | 2021-09-30 |
| Particle detection for substrate processing Grant 11,119,051 - Egan , et al. September 14, 2 | 2021-09-14 |
| In-situ, Real-time Detection Of Particulate Defects In A Fluid App 20210181084 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-06-17 |
| Multibeamlet Charged Particle Device And Method App 20210142976 - VAEZ-IRAVANI; Mehdi ; et al. | 2021-05-13 |
| Metrology system for substrate deformation measurement Grant 10,923,371 - Vaez-Iravani , et al. February 16, 2 | 2021-02-16 |
| Particle Detection For Substrate Processing App 20210018449 - EGAN; Todd ; et al. | 2021-01-21 |
| Real-time Detection Of Particulate Matter During Deposition Chamber Manufacturing App 20210005436 - Vaez-Iravani; Mehdi ; et al. | 2021-01-07 |
| Particle detection for substrate processing Grant 10,845,317 - Egan , et al. November 24, 2 | 2020-11-24 |
| Imaging reflectometer Grant 10,816,464 - Zhao , et al. October 27, 2 | 2020-10-27 |
| Imaging Reflectometer App 20200232916 - Zhao; Guoheng ; et al. | 2020-07-23 |
| Quarter wave light splitting Grant 10,705,431 - Bencher , et al. | 2020-07-07 |
| Digital lithography with extended field size Grant 10,599,044 - Zhao , et al. | 2020-03-24 |
| In-situ metrology method for thickness measurement during PECVD processes Grant 10,527,407 - Paul , et al. J | 2020-01-07 |
| Monitoring system for deposition and method of operation thereof Grant 10,522,375 - Budiarto , et al. Dec | 2019-12-31 |
| Metrology systems with multiple derivative modules for substrate stress and deformation measurement Grant 10,510,624 - Vaez-Iravani , et al. Dec | 2019-12-17 |
| Wafer inspection Grant 10,488,348 - Romanovsky , et al. Nov | 2019-11-26 |
| Digital lithography with extended depth of focus Grant 10,474,041 - Zhao , et al. Nov | 2019-11-12 |
| Quarter Wave Light Splitting App 20190339622 - BENCHER; Christopher Dennis ; et al. | 2019-11-07 |
| Flexible mode scanning optical microscopy and inspection system Grant 10,422,984 - Banna , et al. Sept | 2019-09-24 |
| Quarter wave light splitting Grant 10,394,130 - Bencher , et al. A | 2019-08-27 |
| In-situ Metrology Method For Thickness Measurement During Pecvd Processes App 20190212128 - PAUL; Khokan C. ; et al. | 2019-07-11 |
| In-situ metrology method for thickness measurement during PECVD processes Grant 10,281,261 - Paul , et al. | 2019-05-07 |
| Particle Detection For Substrate Processing App 20190072497 - EGAN; Todd ; et al. | 2019-03-07 |
| Metrology System For Substrate Deformation Measurement App 20190074201 - VAEZ-IRAVANI; Mehdi ; et al. | 2019-03-07 |
| Metrology Systems For Substrate Stress And Deformation Measurement App 20190057910 - VAEZ-IRAVANI; Mehdi ; et al. | 2019-02-21 |
| Flexible Mode Scanning Optical Microscopy And Inspection System App 20180329189 - Banna; Samer ; et al. | 2018-11-15 |
| Wafer Inspection App 20180164228 - Romanovsky; Anatoly ; et al. | 2018-06-14 |
| Simultaneous multi-spot inspection and imaging Grant 9,989,477 - Vaez-Iravani , et al. June 5, 2 | 2018-06-05 |
| Method and apparatus for reducing radiation induced change in semiconductor structures Grant 9,978,620 - Dickerson , et al. May 22, 2 | 2018-05-22 |
| Enhanced Illumination Efficiency In Maskless, Programmable Optical Lithography Systems App 20180074311 - BUDIARTO; Edward ; et al. | 2018-03-15 |
| Wafer inspection Grant 9,915,622 - Romanovsky , et al. March 13, 2 | 2018-03-13 |
| Monitoring system for deposition and method of operation thereof Grant 9,870,935 - Budiarto , et al. January 16, 2 | 2018-01-16 |
| Integrated Metrology And Process Tool To Enable Local Stress/overlay Correction App 20170287752 - GODET; Ludovic ; et al. | 2017-10-05 |
| Method And Apparatus For Reducing Radiation Induced Change In Semiconductor Structures App 20170271181 - DICKERSON; Gary E. ; et al. | 2017-09-21 |
| Simultaneous Multi-spot Inspection And Imaging App 20170205358 - Vaez-Iravani; Mehdi ; et al. | 2017-07-20 |
| Apparatus and methods for inspecting extreme ultra violet reticles Grant 9,679,372 - Nasser-Ghodsi , et al. June 13, 2 | 2017-06-13 |
| Method and apparatus for reducing radiation induced change in semiconductor structures Grant 9,646,893 - Dickerson , et al. May 9, 2 | 2017-05-09 |
| Simultaneous multi-spot inspection and imaging Grant 9,568,435 - Vaez-Iravani , et al. February 14, 2 | 2017-02-14 |
| Quarter Wave Light Splitting App 20170017165 - BENCHER; Christopher Dennis ; et al. | 2017-01-19 |
| In-situ Metrology Method For Thickness Measurement During Pecvd Processes App 20160370173 - PAUL; Khokan C. ; et al. | 2016-12-22 |
| Method And Apparatus For Reducing Radiation Induced Change In Semiconductor Structures App 20160276227 - DICKERSON; Gary E. ; et al. | 2016-09-22 |
| Wafer inspection with multi-spot illumination and multiple channels Grant 9,404,873 - Biellak , et al. August 2, 2 | 2016-08-02 |
| Monitoring System For Deposition And Method Of Operation Thereof App 20160181134 - Budiarto; Edward W. ; et al. | 2016-06-23 |
| Wafer inspection Grant 9,291,575 - Zhao , et al. March 22, 2 | 2016-03-22 |
| Wafer inspection Grant 9,279,774 - Romanovsky , et al. March 8, 2 | 2016-03-08 |
| Wafer Inspection App 20150369753 - Romanovsky; Anatoly ; et al. | 2015-12-24 |
| Multi-spot defect inspection system Grant 9,182,358 - Xu , et al. November 10, 2 | 2015-11-10 |
| Dark field inspection system with ring illumination Grant 9,176,072 - Zhao , et al. November 3, 2 | 2015-11-03 |
| Sample inspection system detector Grant 9,086,389 - Kavaldjiev , et al. July 21, 2 | 2015-07-21 |
| Systems and methods for inspection of a specimen Grant 9,068,917 - Vaez-Iravani , et al. June 30, 2 | 2015-06-30 |
| Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections Grant 9,052,190 - Salehpour , et al. June 9, 2 | 2015-06-09 |
| Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles App 20150117754 - Nasser-Ghodsi; Mehran ; et al. | 2015-04-30 |
| Wafer Inspection App 20150103348 - Zhao; Guoheng ; et al. | 2015-04-16 |
| Apparatus and methods for inspecting extreme ultra violet reticles Grant 8,953,869 - Nasser-Ghodsi , et al. February 10, 2 | 2015-02-10 |
| Simultaneous Multi-Spot Inspection and Imaging App 20140362372 - Vaez-Iravani; Mehdi ; et al. | 2014-12-11 |
| Wafer inspection Grant 8,891,079 - Zhao , et al. November 18, 2 | 2014-11-18 |
| Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for Analysis App 20140291516 - Nasser-Ghodsi; Mehran ; et al. | 2014-10-02 |
| Enhanced Inspection and Metrology Techniques And Systems Using Bright-Field Differential Interference Contrast App 20140268172 - Salehpour; Ali ; et al. | 2014-09-18 |
| Multi-Spot Defect Inspection System App 20140268118 - Xu; Zhiwei ; et al. | 2014-09-18 |
| Air bearing for substrate inspection device Grant 8,817,250 - Doyle , et al. August 26, 2 | 2014-08-26 |
| Simultaneous multi-spot inspection and imaging Grant 8,817,248 - Vaez-Iravani , et al. August 26, 2 | 2014-08-26 |
| Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis Grant 8,765,496 - Nasser-Ghodsi , et al. July 1, 2 | 2014-07-01 |
| Sample Inspection System Detector App 20140118730 - Kavaldjiev; Daniel Ivanov ; et al. | 2014-05-01 |
| Wafer Inspection App 20140009759 - Zhao; Guoheng ; et al. | 2014-01-09 |
| Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles App 20130336574 - Nasser-Ghodsi; Mehran ; et al. | 2013-12-19 |
| Wafer Inspection with Multi-Spot Illumination and Multiple Channels App 20130235374 - Biellak; Stephen ; et al. | 2013-09-12 |
| LED solar illuminator Grant 8,436,554 - Zhao , et al. May 7, 2 | 2013-05-07 |
| LED Solar Illuminator App 20120256559 - Zhao; Guoheng ; et al. | 2012-10-11 |
| In-situ differential spectroscopy Grant 8,283,631 - Vaez-Iravani , et al. October 9, 2 | 2012-10-09 |
| Multi-spot scanning system and method Grant 8,194,301 - Zhao , et al. June 5, 2 | 2012-06-05 |
| Enhanced focusing capability on a sample using a spot matrix Grant 8,194,240 - Vaez-Iravani , et al. June 5, 2 | 2012-06-05 |
| Referenced Inspection Device App 20120062877 - Doyle; Paul ; et al. | 2012-03-15 |
| Detecting and repairing defects of photovoltaic devices Grant 7,989,729 - Zhao , et al. August 2, 2 | 2011-08-02 |
| Dark Field Inspection System With Ring Illumination App 20110169944 - Zhao; Guoheng ; et al. | 2011-07-14 |
| Surface inspection system with improved capabilities Grant 7,978,323 - Miller , et al. July 12, 2 | 2011-07-12 |
| System for detecting anomalies and/or features of a surface Grant 7,869,023 - Zhao , et al. January 11, 2 | 2011-01-11 |
| Systems and method for simultaneously inspecting a specimen with two distinct channels Grant 7,782,452 - Mehanian , et al. August 24, 2 | 2010-08-24 |
| Systems configured to inspect a wafer Grant 7,746,459 - Kadkly , et al. June 29, 2 | 2010-06-29 |
| Segmented optical and electrical testing for photovoltaic devices Grant 7,733,111 - Zhao , et al. June 8, 2 | 2010-06-08 |
| Defect detection using time delay lock-in thermography (LIT) and dark field LIT Grant 7,709,794 - Zhao , et al. May 4, 2 | 2010-05-04 |
| Defect Detection Using Time Delay Lock-in Thermography (lit) And Dark Field Lit App 20100073665 - Zhao; Guoheng ; et al. | 2010-03-25 |
| Optical system for detecting anomalies and/or features of surfaces Grant 7,679,735 - Lewis , et al. March 16, 2 | 2010-03-16 |
| Systems and methods for inspecting wafers Grant 7,623,229 - Vaez-Iravani , et al. November 24, 2 | 2009-11-24 |
| In-Situ Differential Spectroscopy App 20090278044 - Vaez-Iravani; Mehdi ; et al. | 2009-11-12 |
| Stabilizing a substrate using a vacuum preload air bearing chuck Grant 7,607,647 - Zhao , et al. October 27, 2 | 2009-10-27 |
| Multi-spot scanning system and method App 20090225399 - Zhao; Guoheng ; et al. | 2009-09-10 |
| Simultaneous Multi-Spot Inspection And Imaging App 20090161096 - Vaez-Iravani; Mehdi ; et al. | 2009-06-25 |
| Surface Inspection System with Improved Capabilities App 20090116004 - Miller; Lawrence Robert ; et al. | 2009-05-07 |
| Surface inspection system using laser line illumination with two dimensional imaging Grant 7,525,649 - Leong , et al. April 28, 2 | 2009-04-28 |
| Systems and Method for Simultaneously Inspecting a Specimen with Two Distinct Channels App 20090059215 - Mehanian; Courosh ; et al. | 2009-03-05 |
| Simultaneous multi-spot inspection and imaging Grant 7,492,451 - Vaez-Iravani , et al. February 17, 2 | 2009-02-17 |
| Systems Configured To Inspect A Wafer App 20090040525 - Kadkly; Azmi ; et al. | 2009-02-12 |
| Surface inspection system with improved capabilities Grant 7,471,382 - Miller , et al. December 30, 2 | 2008-12-30 |
| Methods And Systems For Measuring A Characteristic Of A Substrate Or Preparing A Substrate For Analysis App 20080264905 - Nasser-Ghodsi; Mehran ; et al. | 2008-10-30 |
| Stabilizing A Substrate Using A Vacuum Preload Air Bearing Chuck App 20080229811 - Zhao; Guoheng ; et al. | 2008-09-25 |
| System For Detecting Anomalies And/Or Features of a Surface App 20080218762 - Zhao; Guoheng ; et al. | 2008-09-11 |
| Optical System For Detecting Anomalies And/Or Features Of Surfaces App 20080165343 - Lewis; Isabella ; et al. | 2008-07-10 |
| Multi-spot illumination and collection optics for highly tilted wafer planes Grant 7,385,688 - Kadkly , et al. June 10, 2 | 2008-06-10 |
| Optical system for detecting anomalies and/or features of surfaces Grant 7,365,834 - Lewis , et al. April 29, 2 | 2008-04-29 |
| Multi-spot illumination and collection optics for highly tilted wafer planes Grant 7,345,752 - Kadkly , et al. March 18, 2 | 2008-03-18 |
| Fourier filters and wafer inspection systems Grant 7,345,754 - Zhao , et al. March 18, 2 | 2008-03-18 |
| Illumination apparatus and methods Grant 7,319,229 - Vaez-Iravani , et al. January 15, 2 | 2008-01-15 |
| System For Detecting Anomalies And/or Features Of A Surface App 20080002193 - Zhao; Guoheng ; et al. | 2008-01-03 |
| High-speed electron beam inspection Grant 7,315,022 - Adler , et al. January 1, 2 | 2008-01-01 |
| Methods and apparatus for inspecting a sample Grant 7,295,303 - Vaez-Iravani , et al. November 13, 2 | 2007-11-13 |
| System for detecting anomalies and/or features of a surface Grant 7,280,199 - Zhao , et al. October 9, 2 | 2007-10-09 |
| Simultaneous Multi-Spot Inspection and Imaging App 20070153265 - Vaez-Iravani; Mehdi ; et al. | 2007-07-05 |
| Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination Grant 7,218,392 - Biellak , et al. May 15, 2 | 2007-05-15 |
| System for Detecting Anomalies and/or Features of a Surface App 20060256327 - Vaez-Iravani; Mehdi ; et al. | 2006-11-16 |
| Simultaneous multi-spot inspection and imaging Grant 7,130,039 - Vaez-Iravani , et al. October 31, 2 | 2006-10-31 |
| Sample inspection system Grant 7,119,897 - Vaez-Iravani , et al. October 10, 2 | 2006-10-10 |
| Inspection system for integrated applications Grant 7,116,413 - Vaez-Iravani October 3, 2 | 2006-10-03 |
| System for detecting anomalies and/or features of a surface Grant 7,088,443 - Vaez-Iravani , et al. August 8, 2 | 2006-08-08 |
| Sample inspection system Grant 7,079,238 - Vaez-Iravani , et al. July 18, 2 | 2006-07-18 |
| Systems for inspection of patterned or unpatterned wafers and other specimen Grant 7,068,363 - Bevis , et al. June 27, 2 | 2006-06-27 |
| Sample inspection system Grant 7,064,821 - Vaez-Iravani , et al. June 20, 2 | 2006-06-20 |
| Surface inspection system with improved capabilities App 20060109457 - Miller; Lawrence Robert ; et al. | 2006-05-25 |
| System for detecting anomalies and/or features of a surface App 20060038984 - Vaez-Iravani; Mehdi ; et al. | 2006-02-23 |
| Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination App 20060007435 - Biellak; Steve ; et al. | 2006-01-12 |
| Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination Grant 6,956,644 - Biellak , et al. October 18, 2 | 2005-10-18 |
| Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis App 20050221229 - Nasser-Ghodsi, Mehran ; et al. | 2005-10-06 |
| Sample inspection system App 20050206886 - Vaez-Iravani, Mehdi ; et al. | 2005-09-22 |
| Sample inspection system App 20050174568 - Vaez-Iravani, Mehdi ; et al. | 2005-08-11 |
| Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection Grant 6,922,236 - Vaez-Iravani , et al. July 26, 2 | 2005-07-26 |
| Illumination apparatus and methods App 20050141810 - Vaez-Iravani, Mehdi ; et al. | 2005-06-30 |
| Sample inspection system App 20050099621 - Vaez-Iravani, Mehdi ; et al. | 2005-05-12 |
| Sample inspection system Grant 6,891,611 - Vaez-Iravani , et al. May 10, 2 | 2005-05-10 |
| Metrology system using optical phase App 20050094153 - Nikoonahad, Mehrdad ; et al. | 2005-05-05 |
| Optical system for detecting anomalies and/or features of surfaces App 20050052644 - Lewis, Isabella ; et al. | 2005-03-10 |
| Defect detection system Grant 6,862,096 - Vaez-Iravani , et al. March 1, 2 | 2005-03-01 |
| System for detecting anomalies and / or features of a surface App 20050036138 - Zhao, Guoheng ; et al. | 2005-02-17 |
| Defect detection system App 20050018181 - Vaez-Iravani, Mehdi ; et al. | 2005-01-27 |
| Systems for inspection of patterned or unpatterned wafers and other specimen App 20040246476 - Bevis, Christopher F. ; et al. | 2004-12-09 |
| Metrology system using optical phase App 20040207849 - Nikoonahad, Mehrdad ; et al. | 2004-10-21 |
| Process for identifying defects in a substrate having non-uniform surface properties Grant 6,781,688 - Kren , et al. August 24, 2 | 2004-08-24 |
| System for detecting anomalies and/or features of a surface App 20040156042 - Vaez-Iravani, Mehdi ; et al. | 2004-08-12 |
| Inspection system for integrated applications App 20040125368 - Vaez-Iravani, Mehdi | 2004-07-01 |
| Method and system using exposure control to inspect a surface Grant 6,724,473 - Leong , et al. April 20, 2 | 2004-04-20 |
| Process for identifying defects in a substrate having non-uniform surface properties App 20040066507 - Kren, George J. ; et al. | 2004-04-08 |
| Sample inspection system App 20040057045 - Vaez-Iravani, Mehdi ; et al. | 2004-03-25 |
| Metrology system using optical phase Grant 6,710,876 - Nikoonahad , et al. March 23, 2 | 2004-03-23 |
| Simultaneous multi-spot inspection and imaging App 20040042001 - Vaez-Iravani, Mehdi ; et al. | 2004-03-04 |
| System for detecting anomalies and/or features of a surface App 20040036864 - Zhao, Guoheng ; et al. | 2004-02-26 |
| Method and system using exposure control to inspect a surface App 20030223058 - Leong, Jenn-Kuen ; et al. | 2003-12-04 |
| Sample inspection system Grant 6,657,715 - Vaez-Iravani , et al. December 2, 2 | 2003-12-02 |
| Simultaneous multi-spot inspection and imaging App 20030210392 - Vaez-Iravani, Mehdi ; et al. | 2003-11-13 |
| Defect detection system App 20030210393 - Vaez-Iravani, Mehdi ; et al. | 2003-11-13 |
| Sample inspection system App 20030206295 - Vaez-Iravani, Mehdi ; et al. | 2003-11-06 |
| Sample inspection system Grant 6,639,662 - Vaez-Iravani , et al. October 28, 2 | 2003-10-28 |
| Sample inspection system Grant 6,618,134 - Vaez-Iravani , et al. September 9, 2 | 2003-09-09 |
| System for detecting anomalies and/or features of a surface Grant 6,608,676 - Zhao , et al. August 19, 2 | 2003-08-19 |
| Massively parallel inspection and imaging system Grant 6,578,961 - Vaez-Iravani June 17, 2 | 2003-06-17 |
| Defect detection system Grant 6,538,730 - Vaez-Iravani , et al. March 25, 2 | 2003-03-25 |
| Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection App 20030011760 - Vaez-Iravani, Mehdi ; et al. | 2003-01-16 |
| Defect detection system App 20020145732 - Vaez-Iravani, Mehdi ; et al. | 2002-10-10 |
| Sample inspection system App 20020080346 - Vaez-Iravani, Mehdi ; et al. | 2002-06-27 |
| Sample inspection system Grant 6,384,910 - Vaez-Iravani , et al. May 7, 2 | 2002-05-07 |
| Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination App 20010052975 - Biellak, Steve ; et al. | 2001-12-20 |
| Massively parallel inspection and imaging system App 20010048521 - Vaez-Iravani, Mehdi | 2001-12-06 |
| Sample inspection system App 20010002149 - Vaez-Iravani, Mehdi ; et al. | 2001-05-31 |
| Sample inspection system App 20010000977 - Vaez-Iravani, Mehdi ; et al. | 2001-05-10 |
| Sample inspection system App 20010000679 - Vaez-Iravani, Mehdi ; et al. | 2001-05-03 |
| Massively parallel inspection and imaging system Grant 6,208,411 - Vaez-Iravani March 27, 2 | 2001-03-27 |
| Sample inspection system Grant 6,201,601 - Vaez-Iravani , et al. March 13, 2 | 2001-03-13 |
| Single laser bright field and dark field system for detecting anomalies of a sample Grant 5,798,829 - Vaez-Iravani August 25, 1 | 1998-08-25 |
| Feedback controlled differential fiber interferometer Grant 5,280,341 - Nonnenmacher , et al. January 18, 1 | 1994-01-18 |
| Optical measuring apparatus using amplitude modulation of slipt beams Grant 5,139,336 - See , et al. August 18, 1 | 1992-08-18 |
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