| Patent | Date |
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Overlay Metrology Using Spectroscopic Phase
App 20220299308 - Shchegrov; Andrei V. ; et al. | 2022-09-22 |
Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices
Grant 11,409,205 - Gdor , et al. August 9, 2 | 2022-08-09 |
Measurement Of Properties Of Patterned Photoresist
App 20220236181 - Volkovich; Roie ; et al. | 2022-07-28 |
On-the-fly scatterometry overlay metrology target
Grant 11,378,394 - Paskover , et al. July 5, 2 | 2022-07-05 |
On-the-fly Scatterometry Overlay Metrology Target
App 20220187062 - Paskover; Yuri ; et al. | 2022-06-16 |
Integrated system and method
Grant 11,294,164 - April 5, 2 | 2022-04-05 |
Charged particle beam source and a method for assembling a charged particle beam source
Grant 11,189,451 - Asulin , et al. November 30, 2 | 2021-11-30 |
Non-Orthogonal Target and Method for Using the Same in Measuring Misregistration of Semiconductor Devices
App 20210364935 - Gdor; Itay ; et al. | 2021-11-25 |
Method and system for evaluating objects
Grant 11,177,048 - November 16, 2 | 2021-11-16 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source
App 20210175040 - Asulin; Itay ; et al. | 2021-06-10 |
Method And System For Evaluating Objects
App 20210151214 - Krivts (Krayvitz); Igor ; et al. | 2021-05-20 |
Sensitive Optical Metrology in Scanning and Static Modes
App 20210096061 - Hill; Andrew V. ; et al. | 2021-04-01 |
Integrated System And Method
App 20210026123 - Krivts (Krayvitz); Igor ; et al. | 2021-01-28 |
Charged particle beam source and a method for assembling a charged particle beam source
Grant 10,886,092 - Asulin , et al. January 5, 2 | 2021-01-05 |
Multi-Stage, Multi-Zone Substrate Positioning Systems
App 20200402827 - Uziel; Yoram ; et al. | 2020-12-24 |
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
App 20200384509 - Azaria; Mor ; et al. | 2020-12-10 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source
App 20200234907 - Asulin; Itay ; et al. | 2020-07-23 |
Chuck for supporting a wafer
Grant 10,446,434 - Korngut , et al. Oc | 2019-10-15 |
System for inspecting and reviewing a sample
Grant 10,177,048 - Frosien , et al. J | 2019-01-08 |
Scanning an object using multiple mechanical stages
Grant 10,068,748 - Uziel , et al. September 4, 2 | 2018-09-04 |
Near-field sensor height control
Grant 10,060,736 - Sagiv , et al. August 28, 2 | 2018-08-28 |
System and method for forming a sealed chamber
Grant 10,056,274 - Rice , et al. August 21, 2 | 2018-08-21 |
Method and system for moving a substrate
Grant 10,049,904 - Adan , et al. August 14, 2 | 2018-08-14 |
System and method for forming a sealed chamber
Grant 9,997,328 - Rice , et al. June 12, 2 | 2018-06-12 |
Evaluation system and a method for evaluating a substrate
Grant 9,835,563 - Uziel , et al. December 5, 2 | 2017-12-05 |
System and method for attaching a mask to a mask holder
Grant 9,829,809 - Avneri , et al. November 28, 2 | 2017-11-28 |
Chuck For Supporting A Wafer
App 20170309511 - Korngut; Doron ; et al. | 2017-10-26 |
Method for charging and imaging an object
Grant 9,666,412 - Litman , et al. May 30, 2 | 2017-05-30 |
Scanning An Object Using Multiple Mechanical Stages
App 20170084425 - Uziel; Yoram ; et al. | 2017-03-23 |
Slit valve with a pressurized gas bearing
Grant 9,587,749 - Rice , et al. March 7, 2 | 2017-03-07 |
System And Method For Forming A Sealed Chamber
App 20160268097 - Rice; Michael R. ; et al. | 2016-09-15 |
System For Inspecting And Reviewing A Sample
App 20160260642 - Frosien; Juergen ; et al. | 2016-09-08 |
System And Method For Attaching A Mask To A Mask Holder
App 20160161869 - Avneri; Israel ; et al. | 2016-06-09 |
System And Method For Forming A Sealed Chamber
App 20160163570 - Rice; Michael R. ; et al. | 2016-06-09 |
Chamber elements and a method for placing a chamber at a load position
Grant 9,302,358 - April 5, 2 | 2016-04-05 |
System and method for inspecting a sample using landing lens
Grant 9,297,692 - Uziel , et al. March 29, 2 | 2016-03-29 |
Evaluation System And A Method For Evaluating A Substrate
App 20160077016 - Uziel; Yoram ; et al. | 2016-03-17 |
High electron energy based overlay error measurement methods and systems
Grant 9,046,475 - Langer , et al. June 2, 2 | 2015-06-02 |
Slit Valve With A Pressurized Gas Bearing
App 20150075659 - Rice; Michael R. ; et al. | 2015-03-19 |
System And Method For Inspecting A Sample Using Landing Lens
App 20140231632 - Uziel; Yoram ; et al. | 2014-08-21 |
Conductive element for electrically coupling an EUVL mask to a supporting chuck
Grant 8,772,737 - July 8, 2 | 2014-07-08 |
Chamber Elements And A Method For Placing A Chamber At A Load Position
App 20140027968 - Krayvitz (Krivts); Igor ; et al. | 2014-01-30 |
Conductive Element For Electrically Coupling An Euvl Mask To A Supporting Chuck
App 20130075605 - Krivts (Krayvitz); Igor ; et al. | 2013-03-28 |
High Electron Energy Based Overlay Error Measurement Methods And Systems
App 20120292502 - Langer; Moshe ; et al. | 2012-11-22 |
Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system
Grant 7,428,850 - Naftali , et al. September 30, 2 | 2008-09-30 |
Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system
App 20070022831 - Naftali; Ron ; et al. | 2007-02-01 |
Manufacture of ultra-clean surfaces by selective
App 20060060213 - Huber; Walter ; et al. | 2006-03-23 |
In situ module for particle removal from solid-state surfaces
Grant 6,949,147 - Uziel , et al. September 27, 2 | 2005-09-27 |
Contaminant removal by laser-accelerated fluid
Grant 6,908,567 - Uziel June 21, 2 | 2005-06-21 |
Buffer station for wafer backside cleaning and inspection
Grant 6,900,135 - Somekh , et al. May 31, 2 | 2005-05-31 |
Iced film substrate cleaning
Grant 6,864,458 - Widmann , et al. March 8, 2 | 2005-03-08 |
In Situ module for particle removal from solid-state surfaces
App 20050000540 - Uziel, Yoram ; et al. | 2005-01-06 |
In situ module for particle removal from solid-state surfaces
Grant 6,827,816 - Uziel , et al. December 7, 2 | 2004-12-07 |
Iced Film Substrate Cleaning
App 20040140298 - Widmann, Amir ; et al. | 2004-07-22 |
Air bearing-sealed micro-processing chamber
Grant 6,764,386 - Uziel July 20, 2 | 2004-07-20 |
Buffer station for wafer backside cleaning and inspection
App 20040042877 - Somekh, Sasson R. ; et al. | 2004-03-04 |
Contaminant removal by laser-accelerated fluid
App 20040020898 - Uziel, Yoram | 2004-02-05 |
Air bearing-sealed micro-processing chamber
App 20030134574 - Uziel, Yoram | 2003-07-17 |
Light vehicle for sporting and off-road biking
App 20020062999 - De-Noor, Yoram ; et al. | 2002-05-30 |
Autofocusing apparatus and method for high resolution microscope system
Grant 6,172,349 - Katz , et al. January 9, 2 | 2001-01-09 |
Process for measuring overlay misregistration during semiconductor wafer fabrication
Grant 5,438,413 - Mazor , et al. August 1, 1 | 1995-08-01 |
Method and apparatus for the automated analysis of three-dimensional objects
Grant 5,030,008 - Scott , et al. July 9, 1 | 1991-07-09 |
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