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Thin film transistor manufacturing method, thin film transistor, thin film transistor substrate and image display apparatus, image display apparatus and semiconductor device Grant 8,642,402 - Yano , et al. February 4, 2 | 2014-02-04 |
Sputtering target for oxide thin film and process for producing the sputtering target Grant 8,623,511 - Kawashima , et al. January 7, 2 | 2014-01-07 |
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Thin Film Transistor Having Crystalline Indium Oxide Semiconductor Film App 20100065835 - Inoue; Kazuyoshi ;   et al. | 2010-03-18 |