Patent | Date |
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Metal-containing onium salt compound, photodegradable base, resist composition, and method for manufacturing device using said resist composition Grant 11,347,147 - Naito , et al. May 31, 2 | 2022-05-31 |
Photosensitive compound, photoacid generator and resist composition containing the photosensitive compound, and method for manufacturing device using the resist composition Grant 11,048,166 - Naito , et al. June 29, 2 | 2021-06-29 |
Photosensitive Compound, Photoacid Generator And Resist Composition Containing The Photosensitive Compound, And Method For Manuf App 20190243238 - NAITO; Michiya ;   et al. | 2019-08-08 |
Metal-containing Onium Salt Compound, Photodegradable Base, Resist Composition, And Method For Manufacturing Device Using Said R App 20190243243 - NAITO; Michiya ;   et al. | 2019-08-08 |
Sulfonic acid derivative, photoacid generator using same, resist composition, and device manufacturing method Grant 10,216,084 - Utsumi , et al. Feb | 2019-02-26 |
Sulfonic Acid Derivative, Photoacid Generator Using Same, Resist Composition, And Device Manufacturing Method App 20180011401 - Utsumi; Yoshiyuki ;   et al. | 2018-01-11 |
Monomer having N-acyl carbamoyl group and lactone skeleton, and polymeric compound Grant 9,862,695 - Koyama , et al. January 9, 2 | 2018-01-09 |
Resist composition, method of forming resist pattern, polymeric compound, compound Grant 9,778,567 - Arai , et al. October 3, 2 | 2017-10-03 |
Method of producing structure containing phase-separated structure and method of forming top coat film Grant 9,644,110 - Seshimo , et al. May 9, 2 | 2017-05-09 |
Resist composition and method of forming resist pattern Grant 9,618,842 - Utsumi , et al. April 11, 2 | 2017-04-11 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 9,606,433 - Utsumi , et al. March 28, 2 | 2017-03-28 |
Undercoat agent and method of producing structure containing phase-separated structure Grant 9,567,477 - Seshimo , et al. February 14, 2 | 2017-02-14 |
Negative resist composition, method of forming resist pattern and complex Grant 9,499,646 - Yamashita , et al. November 22, 2 | 2016-11-22 |
Method of producing polymeric compound, resist composition and method of forming resist pattern Grant 9,469,712 - Hirano , et al. October 18, 2 | 2016-10-18 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern Grant 9,442,371 - Seshimo , et al. September 13, 2 | 2016-09-13 |
Negative Resist Composition, Method Of Forming Resist Pattern And Complex App 20160259244 - YAMASHITA; Naoki ;   et al. | 2016-09-08 |
Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern Grant 9,383,642 - Dazai , et al. July 5, 2 | 2016-07-05 |
Negative resist composition, method of forming resist pattern, and complex Grant 9,366,960 - Yamashita , et al. June 14, 2 | 2016-06-14 |
Resist composition, acid generator, polymeric compound and method of forming resist pattern Grant 9,354,515 - Nagamine , et al. May 31, 2 | 2016-05-31 |
Monomer Having N-acyl Carbamoyl Group And Lactone Skeleton, And Polymeric Compound App 20160060374 - KOYAMA; Hiroshi ;   et al. | 2016-03-03 |
Resist composition, compound, polymeric compound and method of forming resist pattern Grant 9,244,347 - Komuro , et al. January 26, 2 | 2016-01-26 |
Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern Grant 9,206,307 - Matsumiya , et al. December 8, 2 | 2015-12-08 |
Method of producing structure containing phase-separation structure, method of forming pattern, and method of forming fine pattern Grant 9,188,869 - Seshimo , et al. November 17, 2 | 2015-11-17 |
Resist composition and method of forming resist pattern Grant 9,188,863 - Utsumi , et al. November 17, 2 | 2015-11-17 |
Resist composition, method for forming resist pattern, and compound Grant 9,164,379 - Utsumi , et al. October 20, 2 | 2015-10-20 |
Resist composition and method of forming resist pattern Grant 9,164,380 - Komuro , et al. October 20, 2 | 2015-10-20 |
Method Of Producing Structure Containing Phase-separated Structure And Method Of Forming Top Coat Film App 20150291832 - Seshimo; Takehiro ;   et al. | 2015-10-15 |
Resist composition, method of forming resist pattern and polymeric compound Grant 9,133,102 - Takaki , et al. September 15, 2 | 2015-09-15 |
Resist composition and method for forming resist pattern Grant 9,122,157 - Arai , et al. September 1, 2 | 2015-09-01 |
Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern Grant 9,097,971 - Utsumi , et al. August 4, 2 | 2015-08-04 |
Compound, resist composition and method of forming resist pattern Grant 9,097,969 - Utsumi , et al. August 4, 2 | 2015-08-04 |
Positive-type photoresist composition, photoresist laminate, method for producing photoresist pattern, and method for producing connecting terminal Grant 9,091,916 - Shimizu , et al. July 28, 2 | 2015-07-28 |
Resist composition, method of forming resist pattern, polymeric compound and method of producing polymeric compound Grant 9,091,915 - Takaki , et al. July 28, 2 | 2015-07-28 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern App 20150205207 - Seshimo; Takehiro ;   et al. | 2015-07-23 |
Negative Resist Composition, Method Of Forming Resist Pattern, And Complex App 20150192851 - Yamashita; Naoki ;   et al. | 2015-07-09 |
Method of producing ammonium salt compound, method of producing compound, and compound, polymeric compound, acid generator, resist composition and method of forming resist pattern Grant 9,075,304 - Arai , et al. July 7, 2 | 2015-07-07 |
Resist composition, method of forming resist pattern and compound Grant 9,063,416 - Komuro , et al. June 23, 2 | 2015-06-23 |
Sulfonium salt and photo-acid generator Grant 9,045,398 - Suzuki , et al. June 2, 2 | 2015-06-02 |
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern Grant 9,040,220 - Hada , et al. May 26, 2 | 2015-05-26 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, Compound App 20150140497 - Arai; Masatoshi ;   et al. | 2015-05-21 |
Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern Grant 9,034,556 - Hada , et al. May 19, 2 | 2015-05-19 |
Resist composition, method of forming resist pattern, polymeric compound, and compound Grant 9,023,581 - Kawaue , et al. May 5, 2 | 2015-05-05 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 9,017,924 - Takaki , et al. April 28, 2 | 2015-04-28 |
Resist composition, method of forming resist pattern, novel compound and acid generator Grant 9,017,919 - Utsumi , et al. April 28, 2 | 2015-04-28 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Polymeric Compound App 20150111155 - Kawaue; Akiya ;   et al. | 2015-04-23 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 9,012,129 - Hada , et al. April 21, 2 | 2015-04-21 |
Compound, polymeric compound, acid generator, resist composition, and method of forming resist pattern Grant 9,005,874 - Komuro , et al. April 14, 2 | 2015-04-14 |
Method of producing polymeric compound, resist composition, and method of forming resist pattern Grant 8,987,386 - Utsumi , et al. March 24, 2 | 2015-03-24 |
Method Of Producing Structure Containing Phase-separated Structure, Method Of Forming Pattern And Method Of Forming Fine Pattern App 20150034593 - Matsumiya; Tasuku ;   et al. | 2015-02-05 |
Resist Composition, Acid Generator, Polymeric Compound And Method Of Forming Resist Pattern App 20150037734 - Nagamine; Takashi ;   et al. | 2015-02-05 |
Method Of Producing Structure Containing Phase-separation Structure, Method Of Forming Pattern, And Method Of Forming Fine Pattern App 20150034595 - Seshimo; Takehiro ;   et al. | 2015-02-05 |
Undercoat Agent And Method Of Producing Structure Containing Phase-separated Structure App 20150030773 - Seshimo; Takehiro ;   et al. | 2015-01-29 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,932,795 - Seshimo , et al. January 13, 2 | 2015-01-13 |
Resist Composition, Compound, Polymeric Compound And Method Of Forming Resist Pattern App 20140356787 - Komuro; Yoshitaka ;   et al. | 2014-12-04 |
Sulfonium Salt And Photo-acid Generator App 20140357896 - Suzuki; Issei ;   et al. | 2014-12-04 |
Resist composition, method of forming resist pattern and novel compound Grant 8,900,795 - Utsumi , et al. December 2, 2 | 2014-12-02 |
Resist composition for immersion exposure and method of forming resist pattern Grant 8,900,788 - Utsumi , et al. December 2, 2 | 2014-12-02 |
Resist composition, method of forming resist pattern, and new compound Grant 8,846,291 - Utsumi , et al. September 30, 2 | 2014-09-30 |
Method Of Producing Polymeric Compound, Resist Composition And Method Of Forming Resist Pattern App 20140272727 - Hirano; Tomoyuki ;   et al. | 2014-09-18 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20140255853 - Takaki; Daichi ;   et al. | 2014-09-11 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,808,959 - Hada , et al. August 19, 2 | 2014-08-19 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20140221673 - Takaki; Daichi ;   et al. | 2014-08-07 |
Resist composition, method of forming resist pattern, and polymeric compound Grant 8,778,595 - Takaki , et al. July 15, 2 | 2014-07-15 |
Resist Composition, Method For Forming Resist Pattern, And High-molecular Weight Compound App 20140186769 - Kaiho; Takaaki ;   et al. | 2014-07-03 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,765,352 - Utsumi , et al. July 1, 2 | 2014-07-01 |
Resist composition for negative development and method of forming resist pattern Grant 8,765,354 - Utsumi , et al. July 1, 2 | 2014-07-01 |
Resist Composition And Method For Forming Resist Pattern App 20140147788 - Arai; Masatoshi ;   et al. | 2014-05-29 |
Resist Composition And Method For Forming Resist Pattern App 20140147787 - Dazai; Takahiro ;   et al. | 2014-05-29 |
Polymerization Method Of High-molecular Weight Compound, Resist Composition, And Method For Forming Resist Pattern App 20140147792 - Dazai; Takahiro ;   et al. | 2014-05-29 |
Compound, Radical Polymerization Initiator, Method For Producing Compound, Polymer, Resist Composition, And Method For Forming Resist Pattern App 20140141373 - Utsumi; Yoshiyuki ;   et al. | 2014-05-22 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20140120472 - HADA; Hideo ;   et al. | 2014-05-01 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,703,387 - Kawaue , et al. April 22, 2 | 2014-04-22 |
Resist composition, method of forming resist pattern and polymeric compound Grant 8,685,620 - Takaki , et al. April 1, 2 | 2014-04-01 |
Method Of Producing Ammonium Salt Compound, Method Of Producing Compound, And Compound, Polymeric Compound, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20140017617 - Arai; Masatoshi ;   et al. | 2014-01-16 |
Resist Compposition And Method Of Forming Resist Pattern App 20130344435 - Utsumi; Yoshiyuki ;   et al. | 2013-12-26 |
Resist composition and method of forming resist pattern Grant 8,614,049 - Utsumi , et al. December 24, 2 | 2013-12-24 |
Compound, Resist Composition And Method Of Forming Resist Pattern App 20130337382 - Utsumi; Yoshiyuki ;   et al. | 2013-12-19 |
Resist composition, method of forming resist pattern, polymeric compound and compound Grant 8,609,320 - Utsumi , et al. December 17, 2 | 2013-12-17 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Method Of Producing Polymeric Compound App 20130316285 - Takaki; Daichi ;   et al. | 2013-11-28 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20130309614 - Utsumi; Yoshiyuki ;   et al. | 2013-11-21 |
Resist Composition, Method For Forming Resist Pattern, And Compound App 20130302736 - Utsumi; Yoshiyuki ;   et al. | 2013-11-14 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Polymeric Compound App 20130260314 - Kawaue; Akiya ;   et al. | 2013-10-03 |
Method Of Producing Polymeric Compound, Resist Composition And Method Of Forming Resist Pattern App 20130260319 - Arai; Masatoshi ;   et al. | 2013-10-03 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20130252180 - Dazai; Takahiro ;   et al. | 2013-09-26 |
Resist composition, method of forming resist pattern, compound and acid generator including the same Grant 8,541,157 - Kawaue , et al. September 24, 2 | 2013-09-24 |
Positive resist composition and method of forming resist pattern Grant 8,535,868 - Takeshita , et al. September 17, 2 | 2013-09-17 |
Positive-type Photoresist Composition, Photoresist Laminate, Method For Producing Photoresist Pattern, And Method For Producing Connecting Terminal App 20130230801 - Shimizu; Takahiro ;   et al. | 2013-09-05 |
Compound and polymeric compound Grant 8,519,073 - Utsumi , et al. August 27, 2 | 2013-08-27 |
Compound Grant 8,497,395 - Utsumi , et al. July 30, 2 | 2013-07-30 |
Resist Composition And Method Of Forming Resist Pattern App 20130189619 - Komuro; Yoshitaka ;   et al. | 2013-07-25 |
Resist Composition, Method Of Forming Resist Pattern And Novel Compound App 20130177854 - Utsumi; Yoshiyuki ;   et al. | 2013-07-11 |
Resist Composition, Method Of Forming Resist Pattern And Compound App 20130157197 - Komuro; Yoshitaka ;   et al. | 2013-06-20 |
Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20130157201 - Takaki; Daichi ;   et al. | 2013-06-20 |
Resist Composition, Method Of Forming Resist Pattern And Polymeric Compound App 20130115554 - Takaki; Daichi ;   et al. | 2013-05-09 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound App 20130089819 - Kawaue; Akiya ;   et al. | 2013-04-11 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,415,085 - Hada , et al. April 9, 2 | 2013-04-09 |
Resist composition, method of forming resist pattern, compound and method of producing the same, acid generator Grant 8,415,082 - Utsumi , et al. April 9, 2 | 2013-04-09 |
Polymer, Resist Composition And Method Of Forming Resist Pattern App 20130045443 - Utsumi; Yoshiyuki ;   et al. | 2013-02-21 |
Resist composition, method of forming resist pattern, compound and acid generator Grant 8,367,299 - Kawaue , et al. February 5, 2 | 2013-02-05 |
Resist composition, method of forming resist pattern, novel compound and acid generator Grant 8,367,297 - Kawaue , et al. February 5, 2 | 2013-02-05 |
Polymer, Resist Composition And Method Of Forming Resist Pattern App 20130022911 - Utsumi; Yoshiyuki ;   et al. | 2013-01-24 |
Method Of Producing Polymeric Compound, Resist Composition, And Method Of Forming Resist Pattern App 20120328993 - Utsumi; Yoshiyuki ;   et al. | 2012-12-27 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,338,076 - Kawaue , et al. December 25, 2 | 2012-12-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120301829 - Kawaue; Akiya ;   et al. | 2012-11-29 |
Positive resist composition, method of forming resist pattern, and polymeric compound Grant 8,298,748 - Seshimo , et al. October 30, 2 | 2012-10-30 |
Compound, Polymeric Compound, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern App 20120270155 - Komuro; Yoshitaka ;   et al. | 2012-10-25 |
Resist Composition For Negative Development And Method Of Forming Resist Pattern App 20120264058 - Utsumi; Yoshiyuki ;   et al. | 2012-10-18 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120264061 - HADA; Hideo ;   et al. | 2012-10-18 |
Positive resist composition, method of forming resist pattern, polymeric compound, and compound Grant 8,268,530 - Utsumi , et al. September 18, 2 | 2012-09-18 |
Compound and method of producing same, acid generator, resist composition, and method of forming resist pattern Grant 8,252,505 - Kawaue , et al. August 28, 2 | 2012-08-28 |
Resist composition and method of forming resist pattern Grant 8,252,509 - Utsumi , et al. August 28, 2 | 2012-08-28 |
Resist composition, method of forming resist pattern, and novel compound and acid generator Grant 8,247,160 - Utsumi , et al. August 21, 2 | 2012-08-21 |
Compound, acid generator, resist composition, and method of forming resist pattern Grant 8,227,169 - Kawaue , et al. July 24, 2 | 2012-07-24 |
Positive resist composition and method of forming resist pattern Grant 8,211,616 - Shimizu , et al. July 3, 2 | 2012-07-03 |
Novel Compound And Method Of Producing The Same, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20120164580 - Hada; Hideo ;   et al. | 2012-06-28 |
Resist composition, method of forming resist pattern, compound and acid generator Grant 8,206,890 - Kawaue , et al. June 26, 2 | 2012-06-26 |
Positive resist composition and method of forming resist pattern Grant 8,206,891 - Seshimo , et al. June 26, 2 | 2012-06-26 |
Novel Compound App 20120149916 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Resist Composition And Method Of Forming Resist Pattern App 20120148956 - UTSUMI; Yoshiyuki ;   et al. | 2012-06-14 |
Resist Composition, Method Of Forming Resist Pattern, And New Compound App 20120148955 - Utsumi; Yoshiyuki ;   et al. | 2012-06-14 |
Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound And Compound App 20120135347 - UTSUMI; Yoshiyuki ;   et al. | 2012-05-31 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound And Acid Generator App 20120107744 - Utsumi; Yoshiyuki ;   et al. | 2012-05-03 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120058430 - Utsumi; Yoshiyuki ;   et al. | 2012-03-08 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 8,124,313 - Seshimo , et al. February 28, 2 | 2012-02-28 |
Positive resist composition and method of forming resist pattern Grant 8,105,747 - Utsumi , et al. January 31, 2 | 2012-01-31 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120015297 - KOMURO; Yoshitaka ;   et al. | 2012-01-19 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20120015299 - Komuro; Yoshitaka ;   et al. | 2012-01-19 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20120009520 - Takeshita; Masaru ;   et al. | 2012-01-12 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator App 20120009521 - Kawaue; Akiya ;   et al. | 2012-01-12 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20110287362 - Seshimo; Takehiro ;   et al. | 2011-11-24 |
Resist Composition And Method Of Forming Resist Pattern App 20110165512 - Utsumi; Yoshiyuki ;   et al. | 2011-07-07 |
Compound, acid generator, resist composition and method of forming resist pattern Grant 7,955,777 - Seshimo , et al. June 7, 2 | 2011-06-07 |
Resist Composition And Method Of Forming Resist Pattern App 20110117491 - UTSUMI; Yoshiyuki ;   et al. | 2011-05-19 |
Positive Resist Composition, Method Of Forming Resist Pattern, And Polymeric Compound App 20100297560 - SESHIMO; Takehiro ;   et al. | 2010-11-25 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Method Of Producing The Same, Acid Generator App 20100273105 - Utsumi; Yoshiyuki ;   et al. | 2010-10-28 |
Positive Resist Composition, Method Of Forming Resist Pattern, Polymeric Compound, And Compound App 20100273106 - Utsumi; Yoshiyuki ;   et al. | 2010-10-28 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100266955 - UTSUMI; Yoshiyuki ;   et al. | 2010-10-21 |
Positive resist composition for immersion lithography and method for forming resist pattern Grant 7,799,507 - Endo , et al. September 21, 2 | 2010-09-21 |
Resist composition, method of forming resist pattern, novel compound and acid generator App 20100196820 - Kawaue; Akiya ;   et al. | 2010-08-05 |
Resist composition, method of forming resist pattern, novel compound, and acid generator App 20100136478 - Kawaue; Akiya ;   et al. | 2010-06-03 |
Resist composition, method of forming resist pattern, novel compound, and acid generator App 20100119974 - Hada; Hideo ;   et al. | 2010-05-13 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20100121077 - Seshimo; Takehiro ;   et al. | 2010-05-13 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 7,713,679 - Ishiduka , et al. May 11, 2 | 2010-05-11 |
Compound, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern App 20100104973 - Kawaue; Akiya ;   et al. | 2010-04-29 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100086873 - Seshimo; Takehiro ;   et al. | 2010-04-08 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator Including The Same App 20100081088 - KAWAUE; Akiya ;   et al. | 2010-04-01 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100075249 - Utsumi; Yoshiyuki ;   et al. | 2010-03-25 |
Resist composition, method of forming resist pattern, novel compound, and acid generator Grant 7,682,772 - Seshimo , et al. March 23, 2 | 2010-03-23 |
Compound And Polymeric Compound App 20100069590 - Utsumi; Yoshiyuki ;   et al. | 2010-03-18 |
Resist Composition, Method Of Forming Resist Pattern, Compound And Acid Generator App 20100015552 - Kawaue; Akiya ;   et al. | 2010-01-21 |
Positive Resist Composition And Method Of Forming Resist Pattern App 20100015553 - Shimizu; Hiroaki ;   et al. | 2010-01-21 |
Resist Composition, Method Of Forming Resist Pattern, And Novel Compound And Acid Generator App 20100015555 - UTSUMI; Yoshiyuki ;   et al. | 2010-01-21 |
Resist Composition For Immersion Exposure And Method Of Forming Resist Pattern App 20100009291 - Utsumi; Yoshiyuki ;   et al. | 2010-01-14 |
Novel Compound And Method Of Producing Same, Acid Generator, Resist Composition, And Method Of Forming Resist Pattern App 20090208871 - Kawaue; Akiya ;   et al. | 2009-08-20 |
Novel Compound, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20090162787 - Seshimo; Takehiro ;   et al. | 2009-06-25 |
Novel Compound And Method Of Producing The Same, Acid Generator, Resist Composition And Method Of Forming Resist Pattern App 20090162788 - Hada; Hideo ;   et al. | 2009-06-25 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20090130597 - Seshimo; Takehiro ;   et al. | 2009-05-21 |
Positive Resist Composition For Immersion Lithography And Method For Forming Resist Pattern App 20090117490 - Endo; Kotaro ;   et al. | 2009-05-07 |
Resist Composition, Method Of Forming Resist Pattern, Novel Compound, And Acid Generator App 20090104563 - Ishiduka; Keita ;   et al. | 2009-04-23 |
Cruise control apparatus for a vehicle Grant 5,085,287 - Utsumi , et al. February 4, 1 | 1992-02-04 |