Uto; Sachio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Uto; Sachio.The latest application filed is for "defect inspection method and its device".
Company Profile
0.84.76
- Uto; Sachio - Tokyo JP
- Uto; Sachio - Yokohama N/A JP
- Uto; Sachio - Yokoama JP
- Uto, Sachio - Yokohama-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Defect inspection method and its device Grant 9,976,966 - Shibata , et al. May 22, 2 | 2018-05-22 |
| Defect Inspection Method And Its Device App 20170102338 - SHIBATA; Yukihiro ; et al. | 2017-04-13 |
| Defect inspection method and its device Grant 9,513,228 - Shibata , et al. December 6, 2 | 2016-12-06 |
| Inspection apparatus Grant 9,151,719 - Taniguchi , et al. October 6, 2 | 2015-10-06 |
| Method and apparatus for reviewing defects Grant 8,975,582 - Nishiyama , et al. March 10, 2 | 2015-03-10 |
| Defect Inspection Method And Its Device App 20150022806 - Shibata; Yukihiro ; et al. | 2015-01-22 |
| Inspection Apparatus App 20140333923 - Taniguchi; Koichi ; et al. | 2014-11-13 |
| Apparatus and method for inspecting defect in object surface Grant 8,760,643 - Uto , et al. June 24, 2 | 2014-06-24 |
| Method for inspecting pattern defect and device for realizing the same Grant 8,748,795 - Urano , et al. June 10, 2 | 2014-06-10 |
| Apparatus And Method For Inspecting Defect In Object Surface App 20130269126 - UTO; Sachio ; et al. | 2013-10-17 |
| Method and equipment for detecting pattern defect Grant 8,553,214 - Shishido , et al. October 8, 2 | 2013-10-08 |
| Defects inspecting apparatus and defects inspecting method Grant 8,508,727 - Uto , et al. August 13, 2 | 2013-08-13 |
| Apparatus and method for inspecting defect on object surface Grant 8,482,728 - Uto , et al. July 9, 2 | 2013-07-09 |
| Pattern defect inspection apparatus and method Grant 8,467,048 - Nishiyama , et al. June 18, 2 | 2013-06-18 |
| Method and apparatus for detecting defects Grant 8,462,330 - Nakano , et al. June 11, 2 | 2013-06-11 |
| Apparatus and method for inspecting pattern Grant 8,451,439 - Uto , et al. May 28, 2 | 2013-05-28 |
| Pattern Defect Inspection Apparatus And Method App 20120268734 - NISHIYAMA; Hidetoshi ; et al. | 2012-10-25 |
| Defects Inspecting Apparatus And Defects Inspecting Method App 20120262709 - Uto; Sachio ; et al. | 2012-10-18 |
| Method of apparatus for detecting particles on a specimen Grant 8,289,507 - Hamamatsu , et al. October 16, 2 | 2012-10-16 |
| Inspection method and inspection apparatus Grant 8,269,959 - Hamamatsu , et al. September 18, 2 | 2012-09-18 |
| Method And Apparatus For Detecting Defects App 20120194809 - Nakano; Hiroyuki ; et al. | 2012-08-02 |
| Pattern defect inspection apparatus and method Grant 8,233,145 - Nishiyama , et al. July 31, 2 | 2012-07-31 |
| Defects inspecting apparatus and defects inspecting method Grant 8,228,495 - Uto , et al. July 24, 2 | 2012-07-24 |
| Apparatus And Method For Inspecting Pattern App 20120176602 - UTO; Sachio ; et al. | 2012-07-12 |
| Apparatus and method for inspecting defects Grant 8,218,138 - Nakano , et al. July 10, 2 | 2012-07-10 |
| Inspection Method And Inspection Apparatus App 20120133929 - HAMAMATSU; Akira ; et al. | 2012-05-31 |
| Apparatus and method for inspecting pattern Grant 8,149,395 - Uto , et al. April 3, 2 | 2012-04-03 |
| Method And Apparatus For Reviewing Defects App 20120074319 - NISHIYAMA; Hidetoshi ; et al. | 2012-03-29 |
| Method and apparatus for detecting defects Grant 8,107,065 - Nakano , et al. January 31, 2 | 2012-01-31 |
| Method and apparatus for reviewing defects Grant 8,093,557 - Nishiyama , et al. January 10, 2 | 2012-01-10 |
| Inspection method and inspection apparatus Grant 8,094,295 - Hamamatsu , et al. January 10, 2 | 2012-01-10 |
| Defects Inspecting Apparatus And Defects Inspecting Method App 20110310382 - UTO; Sachio ; et al. | 2011-12-22 |
| Apparatus and Method for Inspecting Defects App 20110255074 - Nakano; Hiroyuki ; et al. | 2011-10-20 |
| Method Of Apparatus For Detecting Particles On A Specimen App 20110228258 - HAMAMATSU; Akira ; et al. | 2011-09-22 |
| Pattern Defect Inspecting Apparatus And Method App 20110221886 - Nishiyama; Hidetoshi ; et al. | 2011-09-15 |
| Defects inspecting apparatus and defects inspecting method Grant 8,013,989 - Uto , et al. September 6, 2 | 2011-09-06 |
| Apparatus And Method For Inspecting Pattern App 20110170092 - UTO; Sachio ; et al. | 2011-07-14 |
| Apparatus and method for inspecting defects Grant 7,973,920 - Nakano , et al. July 5, 2 | 2011-07-05 |
| Apparatus And Method For Inspecting An Object Surface Defect App 20110141272 - Uto; Sachio ; et al. | 2011-06-16 |
| Method of apparatus for detecting particles on a specimen Grant 7,952,700 - Hamamatsu , et al. May 31, 2 | 2011-05-31 |
| Defect Inspection Method and System App 20110075134 - UTO; Sachio ; et al. | 2011-03-31 |
| Apparatus and method for inspecting pattern Grant 7,911,601 - Uto , et al. March 22, 2 | 2011-03-22 |
| Apparatus And Method For Inspecting Defects App 20110063603 - Nakano; Hiroyuki ; et al. | 2011-03-17 |
| Method for inspecting defect and apparatus for inspecting defect Grant 7,903,244 - Hamamatsu , et al. March 8, 2 | 2011-03-08 |
| Method Of Apparatus For Detecting Particles On A Specimen App 20110032515 - HAMAMATSU; Akira ; et al. | 2011-02-10 |
| Method And Equipment For Detecting Pattern Defect App 20110001972 - Shishido; Hiroaki ; et al. | 2011-01-06 |
| Defect inspection method and system Grant 7,859,656 - Uto , et al. December 28, 2 | 2010-12-28 |
| Method and apparatus for reviewing defects Grant 7,851,753 - Uto , et al. December 14, 2 | 2010-12-14 |
| Method of manufacturing display device Grant 7,834,353 - Hongo , et al. November 16, 2 | 2010-11-16 |
| Method And Apparatus For Detecting Defects App 20100271628 - NAKANO; Hiroyuki ; et al. | 2010-10-28 |
| Apparatus And Method For Inspecting Defects App 20100265496 - Nakano; Hiroyuki ; et al. | 2010-10-21 |
| Method of apparatus for detecting particles on a specimen Grant 7,817,261 - Hamamatsu , et al. October 19, 2 | 2010-10-19 |
| Defects Inspecting Apparatus And Defects Inspecting Method App 20100259751 - UTO; Sachio ; et al. | 2010-10-14 |
| Pattern Defect Inspection Apparatus And Method App 20100225903 - NISHIYAMA; Hidetoshi ; et al. | 2010-09-09 |
| Method and equipment for detecting pattern defect Grant 7,791,725 - Shishido , et al. September 7, 2 | 2010-09-07 |
| Apparatus and method for inspecting defects Grant 7,768,635 - Nakano , et al. August 3, 2 | 2010-08-03 |
| Defects inspecting apparatus and defects inspecting method Grant 7,768,634 - Uto , et al. August 3, 2 | 2010-08-03 |
| Method and apparatus for detecting defects Grant 7,751,037 - Nakano , et al. July 6, 2 | 2010-07-06 |
| Pattern defect inspection apparatus and method Grant 7,746,453 - Nishiyama , et al. June 29, 2 | 2010-06-29 |
| Method and apparatus for inspecting foreign particle defects Grant 7,724,360 - Uto , et al. May 25, 2 | 2010-05-25 |
| Method And Apparatus For Reviewing Defects App 20100019150 - Nishiyama; Hidetoshi ; et al. | 2010-01-28 |
| Inspection Method And Inspection Apparatus App 20100002227 - HAMAMATSU; Akira ; et al. | 2010-01-07 |
| Method For Inspecting Defect And Apparatus For Inspecting Defect App 20090323054 - HAMAMATSU; Akira ; et al. | 2009-12-31 |
| Method and apparatus for reviewing defects Grant 7,601,954 - Nishiyama , et al. October 13, 2 | 2009-10-13 |
| Method for inspecting defect and apparatus for inspecting defect Grant 7,586,594 - Hamamatsu , et al. September 8, 2 | 2009-09-08 |
| Inspection method and inspection apparatus Grant 7,586,593 - Hamamatsu , et al. September 8, 2 | 2009-09-08 |
| Method And Apparatus For Detecting Defects App 20090213366 - Nakano; Hiroyuki ; et al. | 2009-08-27 |
| Method and apparatus for detecting defects on a wafer Grant 7,567,343 - Ohshima , et al. July 28, 2 | 2009-07-28 |
| Defect Inspection Method And System App 20090141269 - UTO; Sachio ; et al. | 2009-06-04 |
| Apparatus And Method For Inspecting Defects App 20090122303 - Nakano; Hiroyuki ; et al. | 2009-05-14 |
| Method and apparatus for detecting defects Grant 7,528,942 - Nakano , et al. May 5, 2 | 2009-05-05 |
| Apparatus And Method For Inspecting Defect In Object Surface App 20090103079 - UTO; Sachio ; et al. | 2009-04-23 |
| Method For Inspecting Pattern Defect And Device For Realizing The Same App 20090091750 - URANO; Yuta ; et al. | 2009-04-09 |
| Method And Apparatus For Inspecting Foreign Particle Defects App 20090079973 - UTO; Sachio ; et al. | 2009-03-26 |
| Method And Equipment For Detecting Pattern Defect App 20090073443 - Shishido; Hiroaki ; et al. | 2009-03-19 |
| Apparatus And Method For Inspecting Pattern App 20090066943 - UTO; Sachio ; et al. | 2009-03-12 |
| Defect inspection method and system Grant 7,492,452 - Uto , et al. February 17, 2 | 2009-02-17 |
| Defects Inspecting Apparatus And Defects Inspecting Method App 20090033924 - Uto; Sachio ; et al. | 2009-02-05 |
| Method for inspecting pattern defect and device for realizing the same Grant 7,465,935 - Urano , et al. December 16, 2 | 2008-12-16 |
| Method and equipment for detecting pattern defect Grant 7,456,963 - Shishido , et al. November 25, 2 | 2008-11-25 |
| Method and apparatus for inspecting foreign particle defects Grant 7,453,561 - Uto , et al. November 18, 2 | 2008-11-18 |
| Pattern Defect Inspection Apparatus And Method App 20080273193 - NISHIYAMA; Hidetoshi ; et al. | 2008-11-06 |
| Apparatus and method for inspecting pattern Grant 7,446,866 - Uto , et al. November 4, 2 | 2008-11-04 |
| Method Of Apparatus For Detecting Particles On A Specimen App 20080204724 - Hamamatsu; Akira ; et al. | 2008-08-28 |
| Defect detector and defect detecting method Grant 7,417,721 - Uto , et al. August 26, 2 | 2008-08-26 |
| Apparatus And Method For Inspecting Defects App 20080144024 - Nakano; Hiroyuki ; et al. | 2008-06-19 |
| Method Of Manufacturing Display Device App 20080121894 - HONGO; Mikio ; et al. | 2008-05-29 |
| Method of apparatus for detecting particles on a specimen Grant 7,369,223 - Hamamatsu , et al. May 6, 2 | 2008-05-06 |
| Method And Apparatus For Reviewing Defects App 20080073524 - Nishiyama; Hidetoshi ; et al. | 2008-03-27 |
| Apparatus and method for inspecting defects Grant 7,333,192 - Nakano , et al. February 19, 2 | 2008-02-19 |
| Method of manufacturing display device Grant 7,326,623 - Hongo , et al. February 5, 2 | 2008-02-05 |
| Inspection method and inspection apparatus Grant 7,315,363 - Hamamatsu , et al. January 1, 2 | 2008-01-01 |
| Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 7,305,015 - Uto , et al. December 4, 2 | 2007-12-04 |
| Method For Inspecting Defect And Apparatus For Inspecting Defect App 20070247616 - HAMAMATSU; AKIRA ; et al. | 2007-10-25 |
| Defect Inspection Method And System App 20070206184 - Uto; Sachio ; et al. | 2007-09-06 |
| Apparatus and method for inspecting defects App 20070177136 - Nakano; Hiroyuki ; et al. | 2007-08-02 |
| Defect inspection method and apparatus therefor Grant 7,251,024 - Maeda , et al. July 31, 2 | 2007-07-31 |
| Method for inspecting defect and apparatus for inspecting defect Grant 7,248,352 - Hamamatsu , et al. July 24, 2 | 2007-07-24 |
| Method and apparatus for inspecting pattern defects Grant 7,218,389 - Uto , et al. May 15, 2 | 2007-05-15 |
| Inspection method and inspection apparatus App 20070070339 - Hamamatsu; Akira ; et al. | 2007-03-29 |
| Method and apparatus for detecting defects on a wafer App 20070070337 - Ohshima; Yoshimasa ; et al. | 2007-03-29 |
| Method and apparatus for reviewing defects App 20070057184 - Uto; Sachio ; et al. | 2007-03-15 |
| Method and equipment for detecting pattern defect App 20070052955 - Shishido; Hiroaki ; et al. | 2007-03-08 |
| Apparatus for fabricating a display device App 20070041410 - Hongo; Mikio ; et al. | 2007-02-22 |
| Method and apparatus for detecting defects App 20060290923 - Nakano; Hiroyuki ; et al. | 2006-12-28 |
| Method and apparatus for inspecting pattern defects App 20060290930 - Nishiyama; Hidetoshi ; et al. | 2006-12-28 |
| Apparatus and method for inspecting pattern App 20060256328 - Uto; Sachio ; et al. | 2006-11-16 |
| Method and equipment for detecting pattern defect Grant 7,132,669 - Shishido , et al. November 7, 2 | 2006-11-07 |
| Display device, process of fabricating same, and apparatus for fabricating same Grant 7,129,124 - Hongo , et al. October 31, 2 | 2006-10-31 |
| Method and apparatus for inspecting foreign particle defects App 20060203231 - Uto; Sachio ; et al. | 2006-09-14 |
| Method for inspecting pattern defect and device for realizing the same App 20060163503 - Urano; Yuta ; et al. | 2006-07-27 |
| Apparatus and method for inspecting pattern Grant 7,081,953 - Uto , et al. July 25, 2 | 2006-07-25 |
| Defect detector and defect detecting method App 20060124874 - Uto; Sachio ; et al. | 2006-06-15 |
| Method of manufacturing display device App 20060003478 - Hongo; Mikio ; et al. | 2006-01-05 |
| Method and apparatus for detecting defects App 20050264797 - Nakano, Hiroyuki ; et al. | 2005-12-01 |
| Method and equipment for detecting pattern defect App 20050253081 - Shishido, Hiroaki ; et al. | 2005-11-17 |
| Method of apparatus for detecting particles on a specimen App 20050213086 - Hamamatsu, Akira ; et al. | 2005-09-29 |
| Laser annealing apparatus, TFT device and annealing method of the same Grant 6,943,086 - Hongo , et al. September 13, 2 | 2005-09-13 |
| Method and apparatus for detecting pattern defects Grant 6,943,876 - Yoshida , et al. September 13, 2 | 2005-09-13 |
| Method and equipment for detecting pattern defect Grant 6,921,905 - Shishido , et al. July 26, 2 | 2005-07-26 |
| Method and apparatus for reviewing defects App 20050122508 - Uto, Sachio ; et al. | 2005-06-09 |
| Defect inspection method and apparatus therefor App 20050083519 - Maeda, Shunji ; et al. | 2005-04-21 |
| Apparatus and method for inspecting pattern App 20050062961 - Uto, Sachio ; et al. | 2005-03-24 |
| Method and equipment for detecting pattern defect App 20050045830 - Shishido, Hiroaki ; et al. | 2005-03-03 |
| Apparatus and method for inspecting pattern Grant 6,831,737 - Uto , et al. December 14, 2 | 2004-12-14 |
| Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20040240493 - Uto, Sachio ; et al. | 2004-12-02 |
| Defect inspection method and apparatus therefor Grant 6,819,416 - Maeda , et al. November 16, 2 | 2004-11-16 |
| Method and equipment for detecting pattern defect Grant 6,800,859 - Shishido , et al. October 5, 2 | 2004-10-05 |
| Method for inspecting defect and apparatus for inspecting defect App 20040160599 - Hamamatsu, Akira ; et al. | 2004-08-19 |
| Ultraviolet laser-generating device and defect inspection apparatus and method therefor Grant 6,765,201 - Uto , et al. July 20, 2 | 2004-07-20 |
| Inspection method and inspection apparatus App 20040105093 - Hamamatsu, Akira ; et al. | 2004-06-03 |
| Method and apparatus for inspecting defects of a specimen Grant 6,721,047 - Shimoda , et al. April 13, 2 | 2004-04-13 |
| Display device, process of fabricating same, and apparatus for fabricating same App 20040041158 - Hongo, Mikio ; et al. | 2004-03-04 |
| Method and apparatus for detecting pattern defects App 20030227617 - Yoshida, Minoru ; et al. | 2003-12-11 |
| Method and apparatus for inspecting pattern defects App 20030210391 - Uto, Sachio ; et al. | 2003-11-13 |
| Method and apparatus for inspecting defects in a patterned specimen Grant 6,621,571 - Maeda , et al. September 16, 2 | 2003-09-16 |
| Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses Grant 6,576,559 - Nakata , et al. June 10, 2 | 2003-06-10 |
| Defect inspection method and apparatus therefor App 20030095251 - Maeda, Shunji ; et al. | 2003-05-22 |
| Defect inspection method and apparatus therefor Grant 6,556,290 - Maeda , et al. April 29, 2 | 2003-04-29 |
| Laser annealing apparatus, TFT device and annealing method of the same App 20030068836 - Hongo, Mikio ; et al. | 2003-04-10 |
| Apparatus and method for inspecting pattern App 20030020904 - Uto, Sachio ; et al. | 2003-01-30 |
| Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses App 20020094685 - Nakata, Toshihiko ; et al. | 2002-07-18 |
| Method and apparatus for inspecting defects of a specimen App 20020036769 - Shimoda, Atsushi ; et al. | 2002-03-28 |
| Defect inspection method and apparatus therefor App 20020030807 - Maeda, Shunji ; et al. | 2002-03-14 |
| Ultraviolet laser-generating device and defect inspection apparatus and method therefor App 20010025924 - Uto, Sachio ; et al. | 2001-10-04 |
| Method of and apparatus for inspecting surface defects Grant 5,135,303 - Uto , et al. August 4, 1 | 1992-08-04 |
| Foreign particle detecting method and apparatus Grant RE33,991 - Shiba , et al. July 14, 1 | 1992-07-14 |
| Method of and apparatus for detecting foreign substance Grant 4,922,308 - Noguchi , et al. May 1, 1 | 1990-05-01 |
| Alignment method and apparatus for reduction projection type aligner Grant 4,725,737 - Nakata , et al. February 16, 1 | 1988-02-16 |
| Semiconductor exposure apparatus and alignment method therefor Grant 4,701,050 - Oshida , et al. October 20, 1 | 1987-10-20 |
| Exposure apparatus with foreign particle detector Grant 4,676,637 - Uto , et al. June 30, 1 | 1987-06-30 |
| Foreign particle detecting method and apparatus Grant 4,669,875 - Shiba , et al. June 2, 1 | 1987-06-02 |
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