Utess; Benno
Patent Applications and Registrations
Patent applications and USPTO patent grants for Utess; Benno.The latest application filed is for "arrangement and method for conditioning a polishing pad".
- Utess; Benno - Dresden DE
- Utess; Benno - Dresden-Weixdorf DE
| Patent | Date |
|---|---|
| Method and configuration for conditioning a polishing pad surface Grant 7,097,535 - Glashauser , et al. August 29, 2 | 2006-08-29 |
| Arrangement and method for conditioning a polishing pad Grant 7,070,479 - Faustmann , et al. July 4, 2 | 2006-07-04 |
| Arrangement and method for conditioning a polishing pad App 20040192168 - Faustmann, Peter ; et al. | 2004-09-30 |
| Method and configuration for conditioning a polishing pad surface App 20020142706 - Glashauser, Walter ; et al. | 2002-10-03 |
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