| Patent | Date |
|---|
Process control system, process control method, and method of manufacturing electronic apparatus
Grant 7,831,330 - Sugamoto , et al. November 9, 2 | 2010-11-09 |
Semiconductor device manufacturing system and method for manufacturing semiconductor devices including calculating oxide film thickness using real time simulator
Grant 7,702,413 - Ushiku , et al. April 20, 2 | 2010-04-20 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
Grant 7,700,381 - Arikado , et al. April 20, 2 | 2010-04-20 |
Process control system, process control method, and method of manufacturing electronic apparatus
App 20090276078 - Sugamoto; Junji ; et al. | 2009-11-05 |
Process control system, process control method, and method of manufacturing electronic apparatus
Grant 7,596,421 - Sugamoto , et al. September 29, 2 | 2009-09-29 |
Semiconductor device and method of manufacturing the same
Grant 7,588,973 - Ushiku September 15, 2 | 2009-09-15 |
Method of inspecting semiconductor wafer
Grant 7,531,462 - Tanzawa , et al. May 12, 2 | 2009-05-12 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
Grant 7,529,634 - Mitsutake , et al. May 5, 2 | 2009-05-05 |
Quality control system, quality control method, and method of lot-to-lot wafer processing
Grant 7,463,941 - Ogawa , et al. December 9, 2 | 2008-12-09 |
Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor device
Grant 7,413,914 - Ushiku , et al. August 19, 2 | 2008-08-19 |
Semiconductor device and method of manufacturing the same
Grant 7,361,960 - Tsunashima , et al. April 22, 2 | 2008-04-22 |
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server
Grant 7,324,855 - Ushiku , et al. January 29, 2 | 2008-01-29 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus
Grant 7,314,766 - Sugamoto , et al. January 1, 2 | 2008-01-01 |
Equipment for and method of detecting faults in semiconductor integrated circuits
Grant 7,222,026 - Matsushita , et al. May 22, 2 | 2007-05-22 |
System and method for monitoring manufacturing apparatuses
Grant 7,221,991 - Matsushita , et al. May 22, 2 | 2007-05-22 |
System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device
Grant 7,188,049 - Tsuchiya , et al. March 6, 2 | 2007-03-06 |
Process control system, process control method, and method of manufacturing electronic apparatus
App 20060287754 - Sugamoto; Junji ; et al. | 2006-12-21 |
Method of inspecting semiconductor wafer
App 20060281281 - Tanzawa; Katsujiro ; et al. | 2006-12-14 |
Quality control system, quality control method, and method of lot-to-lot wafer processing
App 20060235560 - Ogawa; Akira ; et al. | 2006-10-19 |
Semiconductor manufacturing apparatus and semiconductor device manufacturing method
App 20060217830 - Saki; Kazuo ; et al. | 2006-09-28 |
Semiconductor manufacturing apparatus and semiconductor device manufacturing method
Grant 7,082,346 - Saki , et al. July 25, 2 | 2006-07-25 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
App 20060131696 - Arikado; Tsunetoshi ; et al. | 2006-06-22 |
Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine
Grant 7,065,469 - Samata , et al. June 20, 2 | 2006-06-20 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
Grant 7,057,259 - Arikado , et al. June 6, 2 | 2006-06-06 |
Method for determining a failure of a manufacturing condition, system for determining a failure of a manufacuring condition and method for manufacturing an industrial product
App 20060085165 - Ushiku; Yukihiro ; et al. | 2006-04-20 |
Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management server
App 20060064188 - Ushiku; Yukihiro ; et al. | 2006-03-23 |
Processing system and operating method of processing system
App 20050284575 - Hasebe, Kazuhide ; et al. | 2005-12-29 |
Vacuum pumping system and method for monitoring of the same
App 20050260081 - Tanaka, Masayuki ; et al. | 2005-11-24 |
System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device
App 20050233601 - Tsuchiya, Norihiko ; et al. | 2005-10-20 |
Semiconductor device and method of manufacturing the same
App 20050233508 - Ushiku, Yukihiro | 2005-10-20 |
Apparatus for predicting life of rotary machine and equipment using the same
Grant 6,944,572 - Ushiku , et al. September 13, 2 | 2005-09-13 |
System and method for controlling manufacturing apparatuses
App 20050194590 - Matsushita, Hiroshi ; et al. | 2005-09-08 |
Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
Grant 6,937,963 - Ishii , et al. August 30, 2 | 2005-08-30 |
Semiconductor device and method of manufacturing the same
Grant 6,930,359 - Ushiku August 16, 2 | 2005-08-16 |
Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system
Grant 6,909,993 - Nakao , et al. June 21, 2 | 2005-06-21 |
System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus
Grant 6,898,551 - Samata , et al. May 24, 2 | 2005-05-24 |
Manufacturing apparatus and method for predicting life of rotary machine used in the same
App 20050107984 - Samata, Shuichi ; et al. | 2005-05-19 |
Semiconductor device manufacturing system and method for manufacturing semiconductor devices
App 20050095774 - Ushiku, Yukihiro ; et al. | 2005-05-05 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
App 20050097481 - Mitsutake, Kunihiro ; et al. | 2005-05-05 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
Grant 6,885,950 - Mitsutake , et al. April 26, 2 | 2005-04-26 |
Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system
Grant 6,885,972 - Samata , et al. April 26, 2 | 2005-04-26 |
Method for predicting life of rotary machine and determining repair timing of rotary machine
Grant 6,865,513 - Ushiku , et al. March 8, 2 | 2005-03-08 |
Semiconductor device and method of manufacturing the same
App 20040173851 - Ushiku, Yukihiro | 2004-09-09 |
Apparatus for diagnosing failure in equipment using signals relating to the equipment
Grant 6,782,348 - Ushiku August 24, 2 | 2004-08-24 |
Apparatus for predicting life of rotary machine and equipment using the same
App 20040143418 - Ushiku, Yukihiro ; et al. | 2004-07-22 |
Method for diagnosing life of manufacturing equipment using rotary machine
Grant 6,766,275 - Samata , et al. July 20, 2 | 2004-07-20 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus
App 20040137752 - Sugamoto, Junji ; et al. | 2004-07-15 |
Semiconductor device and method of manufacturing the same
Grant 6,724,045 - Ushiku April 20, 2 | 2004-04-20 |
Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machine
App 20040064277 - Samata, Shuichi ; et al. | 2004-04-01 |
System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus
App 20040064291 - Samata, Shuichi ; et al. | 2004-04-01 |
Manufacturing apparatus and method for predicting life of rotary machine used in the same
App 20040064212 - Samata, Shuichi ; et al. | 2004-04-01 |
Semiconductor manufacturing apparatus and semiconductor device manufacturing method
App 20040044419 - Saki, Kazuo ; et al. | 2004-03-04 |
Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoff
App 20030158705 - Ishii, Ken ; et al. | 2003-08-21 |
Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting system
App 20030153997 - Samata, Shuichi ; et al. | 2003-08-14 |
Method for diagnosing life of manufacturing equipment using rotary machine
App 20030154052 - Samata, Shuichi ; et al. | 2003-08-14 |
Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system
App 20030149547 - Nakao, Takashi ; et al. | 2003-08-07 |
Vacuum pumping system and method for monitoring of the same
App 20030041802 - Tanaka, Masayuki ; et al. | 2003-03-06 |
Equipment for and method of detecting faults in semiconductor integrated circuits
App 20030011376 - Matsushita, Hiroshi ; et al. | 2003-01-16 |
Apparatus for predicting life of rotary machine, equipment using the same, method for predicting life and determining repair timing of the same
App 20030009311 - Ushiku, Yukihiro ; et al. | 2003-01-09 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
App 20030003608 - Arikado, Tsunetoshi ; et al. | 2003-01-02 |
Apparatus for diagnosing failure in equipment using signals relating to the equipment
App 20020193891 - Ushiku, Yukihiro | 2002-12-19 |
Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor device
App 20020180449 - Ushiku, Yukihiro ; et al. | 2002-12-05 |
Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturing
App 20020053065 - Mitsutake, Kunihiro ; et al. | 2002-05-02 |
Semiconductor device having solid phase diffusion sources
Grant 5,898,203 - Yoshitomi , et al. April 27, 1 | 1999-04-27 |
Semiconductor device having a projecting element region
Grant 5,844,278 - Mizuno , et al. December 1, 1 | 1998-12-01 |
Semiconductor device and method of manufacturing the same
Grant 5,766,965 - Yoshitomi , et al. June 16, 1 | 1998-06-16 |
Semiconductor device and method of manufacturing the same
Grant 5,763,953 - IIjima , et al. June 9, 1 | 1998-06-09 |
Dielectrically isolated substrate and method for manufacturing the same
Grant 5,739,575 - Numano , et al. April 14, 1 | 1998-04-14 |
MOSFET with solid phase diffusion source
Grant 5,698,881 - Yoshitomi , et al. December 16, 1 | 1997-12-16 |
Semiconductor device and a method for manufacturing the same
Grant 5,675,176 - Ushiku , et al. October 7, 1 | 1997-10-07 |
Semiconductor device and method of manufacturing the same
Grant 5,434,440 - Yoshitomi , et al. July 18, 1 | 1995-07-18 |
Method of manufacturing insulated-gate type field effect transistor
Grant 5,185,279 - Ushiku February 9, 1 | 1993-02-09 |
Semiconductor integrated circuit with dummy patterns
Grant 5,032,890 - Ushiku , et al. July 16, 1 | 1991-07-16 |
Method of manufacturing insulated-gate type field effect transistor
Grant 5,028,552 - Ushiku July 2, 1 | 1991-07-02 |
Multilayer interconnection structure for semiconductor device
Grant 4,587,549 - Ushiku May 6, 1 | 1986-05-06 |
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