Patent | Date |
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Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor Grant 6,975,497 - Nagao , et al. December 13, 2 | 2005-12-13 |
Ceramics joint structure and method of producing the same Grant 6,617,514 - Ushikoshi , et al. September 9, 2 | 2003-09-09 |
Plasma processing apparatus Grant 6,432,208 - Kawakami , et al. August 13, 2 | 2002-08-13 |
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor Grant 6,252,758 - Nagao , et al. June 26, 2 | 2001-06-26 |
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor App 20010002871 - Nagao, Mie ;   et al. | 2001-06-07 |
Electrostatic chuck Grant 6,134,096 - Yamada , et al. October 17, 2 | 2000-10-17 |
Joined articles, corrosion-resistant joining materials and process for producing joined articles Grant 6,106,960 - Fujii , et al. August 22, 2 | 2000-08-22 |
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof Grant 6,101,969 - Niori , et al. August 15, 2 | 2000-08-15 |
Joint structure of metal member and ceramic member and method of producing the same Grant 6,057,513 - Ushikoshi , et al. May 2, 2 | 2000-05-02 |
Joined ceramic structures and a process for the production thereof Grant 6,020,076 - Fujii , et al. February 1, 2 | 2000-02-01 |
Ceramic susceptor with embedded metal electrode and brazing material connection Grant 5,817,406 - Cheung , et al. October 6, 1 | 1998-10-06 |
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof Grant 5,800,618 - Niori , et al. September 1, 1 | 1998-09-01 |
Ceramics joined body and method of joining ceramics Grant 5,794,838 - Ushikoshi , et al. August 18, 1 | 1998-08-18 |
Aluminum nitride sintered body and its production method Grant 5,767,027 - Sakon , et al. June 16, 1 | 1998-06-16 |
Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles Grant 5,616,024 - Nobori , et al. April 1, 1 | 1997-04-01 |
Ceramic articles Grant 5,573,690 - Nobori , et al. November 12, 1 | 1996-11-12 |
Heating units for use in semiconductor-producing apparatuses and production thereof Grant 5,490,228 - Soma , et al. February 6, 1 | 1996-02-06 |
Corrosion-resistant member for chemical apparatus using halogen series corrosive gas Grant 5,306,895 - Ushikoshi , et al. April 26, 1 | 1994-04-26 |
Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means Grant 5,280,156 - Niori , et al. January 18, 1 | 1994-01-18 |
Wafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heaters Grant 5,231,690 - Soma , et al. July 27, 1 | 1993-07-27 |
Hysteresis magnet coupling for roots type pumps Grant 5,215,501 - Ushikoshi June 1, 1 | 1993-06-01 |
Leakless pump Grant 4,762,461 - Ushikoshi August 9, 1 | 1988-08-09 |