Patent | Date |
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Surface contamination analyzer for semiconductor wafers Grant 7,795,593 - Ushiki , et al. September 14, 2 | 2010-09-14 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Grant 7,700,380 - Ushiki , et al. April 20, 2 | 2010-04-20 |
Surface Contamination Analyzer For Semiconductor Wafers, Method Used Therein And Process For Fabricating Semiconductor Device App 20090039274 - USHIKI; Takeo ;   et al. | 2009-02-12 |
Semiconductor device tester Grant 7,385,195 - Yamada , et al. June 10, 2 | 2008-06-10 |
Production managing system of semiconductor device Grant 7,321,805 - Yamada , et al. January 22, 2 | 2008-01-22 |
Semiconductor device tester App 20060202119 - Yamada; Keizo ;   et al. | 2006-09-14 |
Film thickness measuring apparatus and a method for measuring a thickness of a film Grant 7,002,361 - Yamada , et al. February 21, 2 | 2006-02-21 |
Semiconductor device tester Grant 6,975,125 - Yamada , et al. December 13, 2 | 2005-12-13 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device App 20050230622 - Ushiki, Takeo ;   et al. | 2005-10-20 |
Semiconductor device tester Grant 6,946,857 - Yamada , et al. September 20, 2 | 2005-09-20 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Grant 6,943,043 - Ushiki , et al. September 13, 2 | 2005-09-13 |
Film Thickness Measuring Apparatus And A Method For Measuring A Thickness Of A Film App 20050116726 - Yamada, Keizo ;   et al. | 2005-06-02 |
Production managing system of semiconductor device App 20050106803 - Yamada, Keizo ;   et al. | 2005-05-19 |
Film thickness measuring apparatus and a method for measuring a thickness of a film Grant 6,850,079 - Yamada , et al. February 1, 2 | 2005-02-01 |
Production managing system of semiconductor device Grant 6,842,663 - Yamada , et al. January 11, 2 | 2005-01-11 |
Semiconductor manufacturing device Grant 6,837,936 - Ushiki , et al. January 4, 2 | 2005-01-04 |
Semiconductor device tester App 20040239347 - Yamada, Keizo ;   et al. | 2004-12-02 |
Semiconductor device tester App 20040207415 - Yamada, Keizo ;   et al. | 2004-10-21 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device App 20040206903 - Ushiki, Takeo ;   et al. | 2004-10-21 |
Production managing system of semiconductor device App 20040167656 - Yamada, Keizo ;   et al. | 2004-08-26 |
Semiconductor device tester which measures information related to a structure of a sample in a depth direction Grant 6,768,324 - Yamada , et al. July 27, 2 | 2004-07-27 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device Grant 6,753,194 - Ushiki , et al. June 22, 2 | 2004-06-22 |
Production managing system of semiconductor device Grant 6,711,453 - Yamada , et al. March 23, 2 | 2004-03-23 |
Method and apparatus for measuring thickness of thin film Grant 6,683,308 - Itagaki , et al. January 27, 2 | 2004-01-27 |
Semiconductor device inspecting apparatus Grant 6,614,244 - Yamada , et al. September 2, 2 | 2003-09-02 |
Method and apparatus for measuring thickness of thin film App 20030132381 - Itagaki, Yosuke ;   et al. | 2003-07-17 |
Film thickness measuring apparatus and a method for measuring a thickness of a film App 20030132765 - Yamada, Keizo ;   et al. | 2003-07-17 |
Production managing system of semiconductor device App 20020123818 - Yamada, Keizo ;   et al. | 2002-09-05 |
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device App 20020123161 - Ushiki, Takeo ;   et al. | 2002-09-05 |
Semiconductor manufacturing device App 20020118348 - Ushiki, Takeo ;   et al. | 2002-08-29 |
Semiconductor device inspecting apparatus App 20020070738 - Yamada, Keizo ;   et al. | 2002-06-13 |
Treating method and apparatus utilizing chemical reaction Grant 6,258,244 - Ohmi , et al. July 10, 2 | 2001-07-10 |
SOI bonding structure Grant 6,255,731 - Ohmi , et al. July 3, 2 | 2001-07-03 |