loadpatents
Patent applications and USPTO patent grants for Ushikawa; Harunori.The latest application filed is for "method for the formation of co film and method for the formation of cu interconnection film".
Patent | Date |
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Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatus Grant 8,815,737 - Higuchi , et al. August 26, 2 | 2014-08-26 |
Method for the formation of Co film and method for the formation of Cu interconnection film Grant 8,809,193 - Kumamoto , et al. August 19, 2 | 2014-08-19 |
Method for forming tantalum nitride film Grant 8,796,142 - Gonohe , et al. August 5, 2 | 2014-08-05 |
Method for forming Ni film Grant 8,669,191 - Uehigashi , et al. March 11, 2 | 2014-03-11 |
Method for forming Cu electrical interconnection film Grant 8,476,161 - Kumamoto , et al. July 2, 2 | 2013-07-02 |
Purge gas assembly Grant 8,377,207 - Kagami , et al. February 19, 2 | 2013-02-19 |
Method For The Formation Of Co Film And Method For The Formation Of Cu Interconnection Film App 20130023116 - Kumamoto; Shoichiro ;   et al. | 2013-01-24 |
Method For Forming Ni Film App 20120264310 - Uehigashi; Toshimitsu ;   et al. | 2012-10-18 |
Method For Forming Nisi Film, Method For Forming Silicide Film, Method For Forming Metal Film For Use In Silicide-annealing, Apparatus For Vacuum Processing And Film-forming Apparatus App 20120244701 - Higuchi; Yasushi ;   et al. | 2012-09-27 |
Method for forming tantalum nitride film Grant 8,158,198 - Gonohe , et al. April 17, 2 | 2012-04-17 |
Method for forming tantalum nitride film Grant 8,158,197 - Gonohe , et al. April 17, 2 | 2012-04-17 |
Method for forming tantalum nitride film Grant 8,105,468 - Gonohe , et al. January 31, 2 | 2012-01-31 |
Method For Forming Tantalum Nitride Film And Film-forming Apparatus For Forming The Same App 20110318505 - Yamamoto; Akiko ;   et al. | 2011-12-29 |
Method For Forming Cu Electrical Interconnection Film App 20110104890 - Kumamoto; Shoichiro ;   et al. | 2011-05-05 |
Method for Forming Tantalum Nitride Film App 20100206716 - Gonohe; Narishi ;   et al. | 2010-08-19 |
Purge Gas Assembly App 20100139556 - Kagami; Tsuyoshi ;   et al. | 2010-06-10 |
Method For Forming Tantalum Nitride Film App 20090246375 - Gonohe; Narishi ;   et al. | 2009-10-01 |
Method for Forming Tantalum Nitride Film App 20090159430 - Gonohe; Narishi ;   et al. | 2009-06-25 |
Method for Forming Tantalum Nitride Film App 20090162565 - Gonohe; Narishi ;   et al. | 2009-06-25 |
Method for Forming Tantalum Nitride Film App 20090159431 - Gonohe; Narishi ;   et al. | 2009-06-25 |
Method for Forming Tantalum Nitride Film App 20090104775 - Gonohe; Narishi ;   et al. | 2009-04-23 |
Method for Forming Cu Film App 20090078580 - Yoshihama; Tomoyuki ;   et al. | 2009-03-26 |
Method for Forming Tantalum Nitride Film App 20080199601 - Gonohe; Narishi ;   et al. | 2008-08-21 |
Capacitor for analog circuit, and manufacturing method thereof App 20020160577 - Hosoda, Keizo ;   et al. | 2002-10-31 |
Method and device for treating semiconductor with treating gas while substrate is heated Grant 6,140,256 - Ushikawa October 31, 2 | 2000-10-31 |
Single-substrate-processing apparatus in semiconductor processing system Grant 6,007,633 - Kitamura , et al. December 28, 1 | 1999-12-28 |
Transfer apparatus, transfer method, treatment apparatus and treatment method Grant 5,984,607 - Oosawa , et al. November 16, 1 | 1999-11-16 |
Heating device, method of manufacturing the same, and processing apparatus using the same Grant 5,904,872 - Arami , et al. May 18, 1 | 1999-05-18 |
Heat treatment process for preventing slips in semiconductor wafers Grant 5,775,889 - Kobayashi , et al. July 7, 1 | 1998-07-07 |
Processing apparatus Grant 5,536,320 - Ushikawa , et al. July 16, 1 | 1996-07-16 |
Treating device Grant 5,378,283 - Ushikawa January 3, 1 | 1995-01-03 |
Heat treatment apparatus having a wafer boat Grant 5,310,339 - Ushikawa May 10, 1 | 1994-05-10 |
Method of forming a phosphorus doped silicon film Grant 5,225,378 - Ushikawa July 6, 1 | 1993-07-06 |
Method of forming semiconductor film Grant 5,116,784 - Ushikawa May 26, 1 | 1992-05-26 |
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