Urban; Lukas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Urban; Lukas.The latest application filed is for "wafer carrier having retention pockets with compound radii for chemical vapor deposition systems".

Company Profile

3.6.12

Urban; Lukas - Boulder CO
Urban; Lukas - Liberec CZ
Urban; Lukas - Plainview NY
Urban; Lukas - Princeton NJ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems Grant 11,248,295 - Krishnan , et al. February 15, 2	2022-02-15
Work cell for a production robot Grant 10,782,676 - Besik , et al. Sept	2020-09-22
Wafter carrier for chemical vapor deposition systems Grant 10,316,412 - Krishnan , et al.	2019-06-11
Wafer Carrier Having Retention Pockets With Compound Radii For Chemical Vapor Deposition Systems App 20190169745 - Krishnan; Sandeep ; et al.	2019-06-06
Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems Grant 10,167,571 - Krishnan , et al. J	2019-01-01
Wafer carrier having retention pockets with compound radii for chemical vapor desposition systems Grant 10,145,013 - Krishnan , et al. De	2018-12-04
Work Cell For A Production Robot App 20180210424 - Besik; Martin ; et al.	2018-07-26
Planetary Wafer Carriers App 20170076972 - Krishnan; Sandeep ; et al.	2017-03-16
Process-specific Wafer Carrier Correction To Improve Thermal Uniformity In Chemical Vapor Deposition Systems And Processes App 20170053049 - Urban; Lukas ; et al.	2017-02-23
Wafer Carrier Having Retention Pockets With Compound Radii For Chemical Vapor Desposition Systems App 20150211148 - Krishnan; Sandeep ; et al.	2015-07-30
Wafer Carrier Having Provisions For Improving Heating Uniformity In Chemical Vapor Deposition Systems App 20140261187 - Krishnan; Sandeep ; et al.	2014-09-18
Automated Process Chamber Cleaning In Material Deposition Systems App 20130298831 - Shamoun; Bassam ; et al.	2013-11-14
Wafter Carrier For Chemical Vapor Deposition Systems App 20130276704 - Krishnan; Sandeep ; et al.	2013-10-24
Wafer Carrier With Thermal Features App 20130065403 - Paranjpe; Ajit ; et al.	2013-03-14

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