Patent | Date |
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Method Of Cleaning, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20200095678 - HARADA; Kazuhiro ;   et al. | 2020-03-26 |
Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium Grant 9,895,727 - Nakamura , et al. February 20, 2 | 2018-02-20 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,881,789 - Hashimoto , et al. January 30, 2 | 2018-01-30 |
Method for manufacturing semiconductor device and substrate processing apparatus Grant 9,856,560 - Kameda , et al. January 2, 2 | 2018-01-02 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170178902 - HASHIMOTO; Yoshitomo ;   et al. | 2017-06-22 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,620,357 - Hashimoto , et al. April 11, 2 | 2017-04-11 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170087606 - NAKAMURA; Yoshinobu ;   et al. | 2017-03-30 |
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,587,308 - Kameda , et al. March 7, 2 | 2017-03-07 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170025271 - HASHIMOTO; Yoshitomo ;   et al. | 2017-01-26 |
Boat for substrate processing apparatus Grant D740,769 - Takagi , et al. October 13, 2 | 2015-10-13 |
Boat for substrate processing apparatus Grant D739,831 - Takagi , et al. September 29, 2 | 2015-09-29 |
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150232986 - KAMEDA; Kenji ;   et al. | 2015-08-20 |
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium Grant 8,741,783 - Kameda , et al. June 3, 2 | 2014-06-03 |
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus App 20130068159 - MAEDA; Takahiro ;   et al. | 2013-03-21 |
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Recording Medium App 20130065402 - Kameda; Kenji ;   et al. | 2013-03-14 |
Manufacturing method of semiconductor device and substrate processing apparatus Grant 8,304,328 - Maeda , et al. November 6, 2 | 2012-11-06 |
Method for manufacturing semiconductor device and substrate processing method App 20090170328 - Kameda; Kenji ;   et al. | 2009-07-02 |
Method for manufacturing semiconductor device and substrate processing apparatus App 20090149032 - Kameda; Kenji ;   et al. | 2009-06-11 |
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus App 20090087964 - Maeda; Takahiro ;   et al. | 2009-04-02 |
Fluoride single-crystal material for thermoluminescence dosimeter, and thermoluminescence dosimeter App 20060033025 - Ichinose; Noboru ;   et al. | 2006-02-16 |
Thermoelectric conversion material and thermoelectric conversion device Grant 6,777,609 - Ichinose , et al. August 17, 2 | 2004-08-17 |
Electroluminescent device and oxide phosphor for use therein Grant 6,707,249 - Minami , et al. March 16, 2 | 2004-03-16 |
Thermoelectric conversion material and thermoelectric conversion device App 20020157699 - Ichinose, Noboru ;   et al. | 2002-10-31 |