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System and method for generation of wafer inspection critical areas
Grant 11,410,291 - Uppaluri , et al. August 9, 2 | 2022-08-09 |
Methods and systems for inspection of semiconductor structures with automatically generated defect features
Grant 11,379,967 - George , et al. July 5, 2 | 2022-07-05 |
Method for process monitoring with optical inspections
Grant 11,379,969 - Plihal , et al. July 5, 2 | 2022-07-05 |
Diagnostic methods for the classifiers and the defects captured by optical tools
Grant 11,237,119 - Plihal , et al. February 1, 2 | 2022-02-01 |
Defect candidate generation for inspection
Grant 11,114,324 - Plihal , et al. September 7, 2 | 2021-09-07 |
Method For Process Monitoring With Optical Inspections
App 20210035282 - Plihal; Martin ; et al. | 2021-02-04 |
System and Method for Determining Defects Using Physics-Based Image Perturbations
App 20210027445 - Plihal; Martin ; et al. | 2021-01-28 |
System and Method for Generation of Wafer Inspection Critical Areas
App 20200334807 - Uppaluri; Prasanti ; et al. | 2020-10-22 |
Defect Candidate Generation for Inspection
App 20200328104 - Plihal; Martin ; et al. | 2020-10-15 |
Methods And Systems For Inspection Of Semiconductor Structures With Automatically Generated Defect Features
App 20200234428 - George; Jacob ; et al. | 2020-07-23 |
System and method for generation of wafer inspection critical areas
Grant 10,706,522 - Uppaluri , et al. | 2020-07-07 |
Mode selection for inspection
Grant 10,670,536 - Plihal , et al. | 2020-06-02 |
Creating defect samples for array regions
Grant 10,620,134 - Anantha , et al. | 2020-04-14 |
Creating Defect Samples for Array Regions
App 20190346375 - Anantha; Vidyasagar ; et al. | 2019-11-14 |
Mode Selection for Inspection
App 20190302031 - Plihal; Martin ; et al. | 2019-10-03 |
Optimizing training sets used for setting up inspection-related algorithms
Grant 10,267,748 - Plihal , et al. | 2019-04-23 |
System and method for defect classification based on electrical design intent
Grant 10,209,628 - Uppaluri , et al. Feb | 2019-02-19 |
Diagnostic Methods for the Classifiers and the Defects Captured by Optical Tools
App 20180197714 - Plihal; Martin ; et al. | 2018-07-12 |
System and Method for Generation of Wafer Inspection Critical Areas
App 20180130195 - Uppaluri; Prasanti ; et al. | 2018-05-10 |
Optimizing Training Sets Used for Setting Up Inspection-Related Algorithms
App 20180106732 - Plihal; Martin ; et al. | 2018-04-19 |
System and Method for Defect Classification Based on Electrical Design Intent
App 20170344695 - Uppaluri; Prasanti ; et al. | 2017-11-30 |
Layout versus schematic error system and method
Grant 8,397,194 - Uppaluri , et al. March 12, 2 | 2013-03-12 |
Layout Versus Schematic Error System And Method
App 20120227024 - UPPALURI; Prasanti ; et al. | 2012-09-06 |
Pattern decomposition method
Grant 8,209,656 - Wang , et al. June 26, 2 | 2012-06-26 |
Layout versus schematic error system and method
Grant 8,181,137 - Uppaluri , et al. May 15, 2 | 2012-05-15 |
Layout Versus Schematic Error System And Method
App 20090064077 - Uppaluri; Prasanti ; et al. | 2009-03-05 |
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