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Patent applications and USPTO patent grants for Upham; Allan.The latest application filed is for "selective etching of silicon wafer".
Patent | Date |
---|---|
Selective etching of silicon wafer Grant 9,378,966 - Peethala , et al. June 28, 2 | 2016-06-28 |
Selective Etching Of Silicon Wafer App 20150357197 - Peethala; Brown C. ;   et al. | 2015-12-10 |
Selective Etching Of Silicon Wafer App 20150357207 - Peethala; Brown C. ;   et al. | 2015-12-10 |
Method for forming damascene structure utilizing planarizing material coupled with compressive diffusion barrier material Grant 7,326,651 - Baks , et al. February 5, 2 | 2008-02-05 |
Method For Forming Damascene Structure Utilizing Planarizing Material Coupled With Compressive Diffusion Barrier Material App 20050079701 - Baks, Heidi ;   et al. | 2005-04-14 |
Apparatus and method for in-situ cleaning of a throttle valve in a CVD system App 20050011445 - Upham, Allan | 2005-01-20 |
Apparatus and method for in-situ cleaning of a throttle valve in a CVD system App 20020185067 - Upham, Allan | 2002-12-12 |
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