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Silicon Precursor Compound, Preparation Method Therefor, And Silicon-containing Film Formation Method Using Same App 20210269463 - KIM; Jin Sik ;   et al. | 2021-09-02 |
Aluminum Compounds And Methods Of Forming Aluminum- Containing Film Using The Same App 20210147450 - HAN; Won Seok ;   et al. | 2021-05-20 |
Group 4 Metal Element-containing Compounds, Method Of Preparing The Same, Precursor Compositions Including The Same For Forming A Film, And Method Of Forming A Film Using The Same App 20200361969 - HAN; Won Seok ;   et al. | 2020-11-19 |
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition Grant 10,763,001 - Han , et al. Sep | 2020-09-01 |
Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the same Grant 10,577,385 - Han , et al. | 2020-03-03 |
Group 5 Metal Compound, Method For Preparing The Same, Precursor Composition For Depositing Layer Containing The Same, And Metho App 20190202847 - HAN; Won Seok ;   et al. | 2019-07-04 |
Copper metal film, method for preparing the same, and method for forming copper interconnect for semiconductor device using the same Grant 10,287,681 - Lee , et al. | 2019-05-14 |
Method for manufacturing silicon-containing thin film Grant 10,290,493 - Han , et al. | 2019-05-14 |
Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same Grant 10,131,680 - Han , et al. November 20, 2 | 2018-11-20 |
Liquid Precursor Compositions, Preparation Methods Thereof, And Methods For Forming Layer Using The Composition App 20180286529 - HAN; Won Seok ;   et al. | 2018-10-04 |
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition Grant 10,014,089 - Han , et al. July 3, 2 | 2018-07-03 |
Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same Grant 10,005,795 - Han , et al. June 26, 2 | 2018-06-26 |
Group 4 Metal Element-containing Compound, Method Of Preparing The Same, Precursor Composition Including The Same For Depositing Film, And Method Of Depositing Film Using The Same App 20180162882 - HAN; Won Seok ;   et al. | 2018-06-14 |
Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using same Grant 9,957,614 - Han , et al. May 1, 2 | 2018-05-01 |
Novel Ruthenium Compound, Preparation Method Therefor, Precursor Composition For Film Deposition Containing Same, And Method For Depositing Film By Using Same App 20170226638 - Han; Won Seok ;   et al. | 2017-08-10 |
Indium-containing Film And Composition For Forming The Same App 20160326008 - Koh; Wonyong ;   et al. | 2016-11-10 |
Liquid Precursor Compositions, Preparation Methods Thereof, And Methods For Forming Layer Using The Composition App 20160314980 - HAN; Won Seok ;   et al. | 2016-10-27 |
Copper Metal Film, Method For Preparing The Same, And Method For Forming Copper Interconnect For Semiconductor Device Using The Same App 20160305024 - Lee; Won-Jun ;   et al. | 2016-10-20 |
Indium-containing oxide film and preparing method thereof Grant 9,431,144 - Koh , et al. August 30, 2 | 2016-08-30 |
Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same Grant 9,353,437 - Han May 31, 2 | 2016-05-31 |
Deposition Method For Tungsten-containing Film Using Tungsten Compound, And Precursor Composition For Depositing Tungsten-containing Film, Comprising Tungsten Compound App 20160122867 - HAN; Won Seok ;   et al. | 2016-05-05 |
Aluminum precursor composition Grant 9,255,324 - Koh , et al. February 9, 2 | 2016-02-09 |
Method For Manufacturing Silicon-containing Thin Film App 20150235834 - Han; Won Seok ;   et al. | 2015-08-20 |
Indium-containing Oxide Film And Preparing Method Thereof App 20140335363 - Koh; Wonyong ;   et al. | 2014-11-13 |
Aluminum Precursor Composition App 20140050848 - Koh; Wonyong ;   et al. | 2014-02-20 |
Diazadiene-based Metal Compound, Method For Preparing Same And Method For Forming A Thin Film Using Same App 20130251903 - Han; Won Seok | 2013-09-26 |
Method for thin film vapor deposition of a dialkyl amido dihydroaluminum compound Grant 7,985,450 - Shin , et al. July 26, 2 | 2011-07-26 |