Unno; Yutaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Unno; Yutaka.The latest application filed is for "ceramic heater".
Company Profile
6.20.30
- Unno; Yutaka - Handa JP
- UNNO; Yutaka - Handa-City JP
- UNNO; Yutaka - Handa-shi JP
Patent Activity
| Patent | Date |
|---|---|
| Ceramic heater and manufacturing method for tubular shaft Grant 11,367,631 - Unno June 21, 2 | 2022-06-21 |
| Ceramic Heater App 20220174788 - HARA; Tomohiro ; et al. | 2022-06-02 |
| Ceramic Heater App 20220112599 - HARA; Tomohiro ; et al. | 2022-04-14 |
| Electrostatic chuck having an annular outer region covered by an insulating film Grant 11,223,302 - Watanabe , et al. January 11, 2 | 2022-01-11 |
| Wafer Placement Table And Method For Manufacturing The Same App 20210007181 - UNNO; Yutaka ; et al. | 2021-01-07 |
| Multi-zone Heater App 20200396801 - UNNO; Yutaka ; et al. | 2020-12-17 |
| Wafer support Grant 10,861,680 - Maeda , et al. December 8, 2 | 2020-12-08 |
| Electrostatic-chuck Heater App 20200312696 - UNNO; Yutaka ; et al. | 2020-10-01 |
| Ceramic Heater App 20200163165 - Unno; Yutaka | 2020-05-21 |
| Electrostatic-chuck Heater App 20200126773 - UNNO; Yutaka ; et al. | 2020-04-23 |
| Electrostatic Chuck App 20200111697 - WATANABE; Reo ; et al. | 2020-04-09 |
| Wafer Support Table App 20200090964 - UNNO; Yutaka ; et al. | 2020-03-19 |
| Ceramic Heater And Manufacturing Method For Tubular Shaft App 20200075361 - UNNO; Yutaka | 2020-03-05 |
| Ceramic heater Grant 10,566,218 - Unno , et al. Feb | 2020-02-18 |
| Wafer Support App 20180218885 - Maeda; Daiki ; et al. | 2018-08-02 |
| Ceramic Heater App 20180204748 - Unno; Yutaka ; et al. | 2018-07-19 |
| Joined Structure App 20170069520 - UNNO; Yutaka | 2017-03-09 |
| Member for semiconductor manufacturing apparatus and method for manufacturing the same Grant 9,548,226 - Unno , et al. January 17, 2 | 2017-01-17 |
| Heating device and semiconductor manufacturing apparatus Grant 9,123,757 - Unno , et al. September 1, 2 | 2015-09-01 |
| Member For Semiconductor Manufacturing Apparatus And Method For Manufacturing The Same App 20140117119 - UNNO; Yutaka ; et al. | 2014-05-01 |
| Heating Device And Semiconductor Manufacturing Apparatus App 20130248509 - UNNO; Yutaka ; et al. | 2013-09-26 |
| Processing device Grant 8,394,199 - Tomita , et al. March 12, 2 | 2013-03-12 |
| Uniform temperature heater Grant 8,193,473 - Unno June 5, 2 | 2012-06-05 |
| Position accuracy evaluation method and position accuracy evaluation apparatus Grant 7,948,516 - Unno , et al. May 24, 2 | 2011-05-24 |
| Susceptor for semiconductor manufacturing apparatus Grant 7,686,889 - Kiku , et al. March 30, 2 | 2010-03-30 |
| Gas providing member and processing device Grant 7,632,356 - Tomita , et al. December 15, 2 | 2009-12-15 |
| Heating Unit App 20090200289 - UNNO; Yutaka | 2009-08-13 |
| Substrate processing device Grant 7,560,668 - Tomita , et al. July 14, 2 | 2009-07-14 |
| Heating device Grant 7,432,474 - Unno , et al. October 7, 2 | 2008-10-07 |
| Susceptor For Semiconductor Manufacturing Apparatus App 20080236479 - Kiku; Taiji ; et al. | 2008-10-02 |
| Method of manufacturing a substrate heating device Grant 7,401,399 - Unno , et al. July 22, 2 | 2008-07-22 |
| Heater and method of manufacturing the same Grant 7,345,260 - Unno March 18, 2 | 2008-03-18 |
| Heating apparatus Grant 7,279,661 - Okajima , et al. October 9, 2 | 2007-10-09 |
| Heating Device App 20070221648 - UNNO; Yutaka ; et al. | 2007-09-27 |
| Heating device Grant 7,173,220 - Unno , et al. February 6, 2 | 2007-02-06 |
| Heater and method of manufacturing the same App 20060289449 - Unno; Yutaka | 2006-12-28 |
| Substrate processing device App 20060280875 - Tomita; Yasumitsu ; et al. | 2006-12-14 |
| Plasma processing device App 20060267494 - Tomita; Yasumitsu ; et al. | 2006-11-30 |
| Processing device App 20060219176 - Tomita; Yasumitsu ; et al. | 2006-10-05 |
| Position accuracy evaluation method and position accuracy evaluation apparatus App 20060207987 - Unno; Yutaka ; et al. | 2006-09-21 |
| Gas providing member and processing device App 20060207509 - Tomita; Yasumitsu ; et al. | 2006-09-21 |
| Ceramic heaters Grant 6,958,462 - Unno , et al. October 25, 2 | 2005-10-25 |
| Heating device App 20050211691 - Unno, Yutaka ; et al. | 2005-09-29 |
| Substrate heating device and manufacturing method for the same App 20050210974 - Unno, Yutaka ; et al. | 2005-09-29 |
| Heating system Grant 6,875,960 - Yamaguchi , et al. April 5, 2 | 2005-04-05 |
| Heater and method of manufacturing same App 20040104211 - Unno, Yutaka | 2004-06-03 |
| Ceramic heaters App 20030173349 - Unno, Yutaka ; et al. | 2003-09-18 |
| Heating apparatus App 20030075537 - Okajima, Hisakazu ; et al. | 2003-04-24 |
| Heating system App 20030071032 - Yamaguchi, Shinji ; et al. | 2003-04-17 |
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