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Optical system for a holographic microscope including a spatial filter Grant 9,360,423 - Yu , et al. June 7, 2 | 2016-06-07 |
Method and device of measuring wavefront aberration, method of manufacturing optical system, and recording medium Grant 9,347,853 - Unno May 24, 2 | 2016-05-24 |
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Wavefront optical measuring apparatus Grant 9,091,614 - Ohkubo , et al. July 28, 2 | 2015-07-28 |
Objective Optical System And Image Acquisition Apparatus App 20150130922 - Tanaka; Kazumasa ;   et al. | 2015-05-14 |
Interferometric method and digital holographic microscope Grant 8,896,840 - Matsubara , et al. November 25, 2 | 2014-11-25 |
Method And Device Of Measuring Wavefront Aberration, Method Of Manufacturing Optical System, And Recording Medium App 20140139825 - Unno; Yasuyuki | 2014-05-22 |
Method And Device Of Measuring Wavefront Aberration, Method Of Manufacturing Optical System, And Recording Medium App 20140139826 - Unno; Yasuyuki | 2014-05-22 |
Interferometric Method And Digital Holographic Microscope App 20130286403 - Matsubara; Isao ;   et al. | 2013-10-31 |
Hologram, hologram data generation method, and exposure apparatus Grant 8,531,747 - Matsubara , et al. September 10, 2 | 2013-09-10 |
Device, method, and system for measuring image profiles produced by an optical lithography system Grant 8,432,530 - Unno April 30, 2 | 2013-04-30 |
Optical System For A Holographic Microscope App 20130003073 - Yu; Chung-Chieh ;   et al. | 2013-01-03 |
Wavefront Optical Measuring Apparatus App 20120296591 - Ohkubo; Akinori ;   et al. | 2012-11-22 |
Method and apparatus for measuring surface profile of an object Grant 8,314,938 - Ohkubo , et al. November 20, 2 | 2012-11-20 |
Method And Apparatus For Measuring Surface Profile Of An Object App 20120026511 - Ohkubo; Akinori ;   et al. | 2012-02-02 |
Apparatus, Method, And Lithography System App 20110222041 - Unno; Yasuyuki | 2011-09-15 |
Hologram And Exposure Apparatus App 20110216296 - Matsubara; Isao ;   et al. | 2011-09-08 |
Apparatus and method for improving detected resolution and/or intensity of a sampled image Grant 7,911,709 - Unno March 22, 2 | 2011-03-22 |
Hologram, Hologram Data Generation Method, And Exposure Apparatus App 20100328742 - Matsubara; Isao ;   et al. | 2010-12-30 |
Device, Method, And System For Measuring Image Profiles Produced By An Optical Lithography System App 20100020303 - Unno; Yasuyuki | 2010-01-28 |
Device For Measuring An Aerial Image Produced By An Optical Lithography System App 20090116694 - Unno; Yasuyuki | 2009-05-07 |
Apparatus for measuring aerial images produced by an optical lithography system Grant 7,508,598 - Unno March 24, 2 | 2009-03-24 |
Apparatus for Measuring Aerial Images Produced by an Optical Lithography System App 20080074758 - Unno; Yasuyuki | 2008-03-27 |
Optical element and manufacturing method therefor Grant 7,262,920 - Unno , et al. August 28, 2 | 2007-08-28 |
Apparatus and method for improving detected resolution and/or intensity of a sampled image App 20070091386 - Unno; Yasuyuki | 2007-04-26 |
Optical element and manufacturing method thereof Grant 7,102,828 - Unno , et al. September 5, 2 | 2006-09-05 |
Projection optical system and projection exposure apparatus having the same App 20040263814 - Unno, Yasuyuki | 2004-12-30 |
Projection optical system and projection exposure apparatus having the same Grant 6,829,041 - Unno December 7, 2 | 2004-12-07 |
Optical element and manufacturing method therefor App 20040136084 - Unno, Yasuyuki ;   et al. | 2004-07-15 |
Method for making element Grant 6,641,985 - Unno , et al. November 4, 2 | 2003-11-04 |
Projection optical system and projection exposure apparatus having the same App 20030128349 - Unno, Yasuyuki | 2003-07-10 |
Optical element and manufacturing method thereof App 20030000453 - Unno, Yasuyuki ;   et al. | 2003-01-02 |
Image processing system and method using system characteristic and image information Grant 6,476,869 - Sekine , et al. November 5, 2 | 2002-11-05 |
Optical element manufacturing method Grant 6,120,950 - Unno September 19, 2 | 2000-09-19 |
Photomask and scanning exposure apparatus and device manufacturing method using same Grant 6,077,631 - Unno June 20, 2 | 2000-06-20 |
Multilevel optical diffraction device with antireflection film and exposure apparatus Grant 5,995,285 - Unno November 30, 1 | 1999-11-30 |
Projection exposure apparatus and device manufacturing method capable of controlling polarization direction Grant 5,933,219 - Unno August 3, 1 | 1999-08-03 |
Projection exposure apparatus and microdevice manufacturing method Grant 5,805,273 - Unno September 8, 1 | 1998-09-08 |
Image projection method and device manufacturing method using the image projection method Grant 5,459,000 - Unno October 17, 1 | 1995-10-17 |
Projection exposure apparatus with an aberration compensation device of a projection lens Grant 5,184,176 - Unno , et al. February 2, 1 | 1993-02-02 |