Unno; Yasuyuki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Unno; Yasuyuki.The latest application filed is for "detection apparatus, lithography apparatus, and article manufacturing method".

Company Profile

3.30.22

Unno; Yasuyuki - Tochigi JP
Unno; Yasuyuki - Utsunomiya JP
Unno; Yasuyuki - Utsunomiya-shi JP
Unno; Yasuyuki - Tucson AZ US
Unno; Yasuyuki - Irvine CA US
Unno, Yasuyuki - Tochigi-ken JP
Unno; Yasuyuki - Minamikawachi-machi JP
Unno; Yasuyuki - Kanagawa-ken JP
Unno; Yasuyuki - Hadano JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Detection Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20220236650 - Nakayama; Ryo ; et al.	2022-07-28
Detector, Imprint Apparatus, And Method Of Manufacturing Article App 20210372776 - Komaki; Takamitsu ; et al.	2021-12-02
Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method Grant 10,777,440 - Iwai , et al. Sept	2020-09-15
Detection Device, Imprint Apparatus, Planarization Device, Detection Method, And Article Manufacturing Method App 20190371642 - Iwai; Toshiki ; et al.	2019-12-05
Optical system for a holographic microscope including a spatial filter Grant 9,360,423 - Yu , et al. June 7, 2	2016-06-07
Method and device of measuring wavefront aberration, method of manufacturing optical system, and recording medium Grant 9,347,853 - Unno May 24, 2	2016-05-24
Method and device of measuring wavefront aberration, method of manufacturing optical system, and recording medium Grant 9,170,171 - Unno October 27, 2	2015-10-27
Hologram with cells to control phase in two polarization directions and exposure apparatus Grant 9,116,303 - Matsubara , et al. August 25, 2	2015-08-25
Wavefront optical measuring apparatus Grant 9,091,614 - Ohkubo , et al. July 28, 2	2015-07-28
Objective Optical System And Image Acquisition Apparatus App 20150130922 - Tanaka; Kazumasa ; et al.	2015-05-14
Interferometric method and digital holographic microscope Grant 8,896,840 - Matsubara , et al. November 25, 2	2014-11-25
Method And Device Of Measuring Wavefront Aberration, Method Of Manufacturing Optical System, And Recording Medium App 20140139825 - Unno; Yasuyuki	2014-05-22
Method And Device Of Measuring Wavefront Aberration, Method Of Manufacturing Optical System, And Recording Medium App 20140139826 - Unno; Yasuyuki	2014-05-22
Interferometric Method And Digital Holographic Microscope App 20130286403 - Matsubara; Isao ; et al.	2013-10-31
Hologram, hologram data generation method, and exposure apparatus Grant 8,531,747 - Matsubara , et al. September 10, 2	2013-09-10
Device, method, and system for measuring image profiles produced by an optical lithography system Grant 8,432,530 - Unno April 30, 2	2013-04-30
Optical System For A Holographic Microscope App 20130003073 - Yu; Chung-Chieh ; et al.	2013-01-03
Wavefront Optical Measuring Apparatus App 20120296591 - Ohkubo; Akinori ; et al.	2012-11-22
Method and apparatus for measuring surface profile of an object Grant 8,314,938 - Ohkubo , et al. November 20, 2	2012-11-20
Method And Apparatus For Measuring Surface Profile Of An Object App 20120026511 - Ohkubo; Akinori ; et al.	2012-02-02
Apparatus, Method, And Lithography System App 20110222041 - Unno; Yasuyuki	2011-09-15
Hologram And Exposure Apparatus App 20110216296 - Matsubara; Isao ; et al.	2011-09-08
Apparatus and method for improving detected resolution and/or intensity of a sampled image Grant 7,911,709 - Unno March 22, 2	2011-03-22
Hologram, Hologram Data Generation Method, And Exposure Apparatus App 20100328742 - Matsubara; Isao ; et al.	2010-12-30
Device, Method, And System For Measuring Image Profiles Produced By An Optical Lithography System App 20100020303 - Unno; Yasuyuki	2010-01-28
Device For Measuring An Aerial Image Produced By An Optical Lithography System App 20090116694 - Unno; Yasuyuki	2009-05-07
Apparatus for measuring aerial images produced by an optical lithography system Grant 7,508,598 - Unno March 24, 2	2009-03-24
Apparatus for Measuring Aerial Images Produced by an Optical Lithography System App 20080074758 - Unno; Yasuyuki	2008-03-27
Optical element and manufacturing method therefor Grant 7,262,920 - Unno , et al. August 28, 2	2007-08-28
Apparatus and method for improving detected resolution and/or intensity of a sampled image App 20070091386 - Unno; Yasuyuki	2007-04-26
Optical element and manufacturing method thereof Grant 7,102,828 - Unno , et al. September 5, 2	2006-09-05
Projection optical system and projection exposure apparatus having the same App 20040263814 - Unno, Yasuyuki	2004-12-30
Projection optical system and projection exposure apparatus having the same Grant 6,829,041 - Unno December 7, 2	2004-12-07
Optical element and manufacturing method therefor App 20040136084 - Unno, Yasuyuki ; et al.	2004-07-15
Method for making element Grant 6,641,985 - Unno , et al. November 4, 2	2003-11-04
Projection optical system and projection exposure apparatus having the same App 20030128349 - Unno, Yasuyuki	2003-07-10
Optical element and manufacturing method thereof App 20030000453 - Unno, Yasuyuki ; et al.	2003-01-02
Image processing system and method using system characteristic and image information Grant 6,476,869 - Sekine , et al. November 5, 2	2002-11-05
Optical element manufacturing method Grant 6,120,950 - Unno September 19, 2	2000-09-19
Photomask and scanning exposure apparatus and device manufacturing method using same Grant 6,077,631 - Unno June 20, 2	2000-06-20
Multilevel optical diffraction device with antireflection film and exposure apparatus Grant 5,995,285 - Unno November 30, 1	1999-11-30
Projection exposure apparatus and device manufacturing method capable of controlling polarization direction Grant 5,933,219 - Unno August 3, 1	1999-08-03
Projection exposure apparatus and microdevice manufacturing method Grant 5,805,273 - Unno September 8, 1	1998-09-08
Image projection method and device manufacturing method using the image projection method Grant 5,459,000 - Unno October 17, 1	1995-10-17
Projection exposure apparatus with an aberration compensation device of a projection lens Grant 5,184,176 - Unno , et al. February 2, 1	1993-02-02

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