University of Texas System, Board of Regents, UT System
Patent Applications and Registrations
Patent applications and USPTO patent grants for University of Texas System, Board of Regents, UT System.The latest application filed is for "method of manufacturing a vacuum chuck used in imprint lithography".
- University of Texas System, Board of Regents, UT System - Austin TX
| Patent | Date |
|---|---|
| Method of manufacturing a vacuum chuck used in imprint lithography App 20040149687 - Choi, Byung Jin ; et al. | 2004-08-05 |
| Device for holding a template for use in imprint lithography App 20040141163 - Bailey, Todd ; et al. | 2004-07-22 |
| Imprint lithography template comprising alignment marks App 20040141168 - Sreenivasan, S. V. ; et al. | 2004-07-22 |
| High resolution overlay alignment systems for imprint lithography App 20040086793 - Sreenivasan, S. V. ; et al. | 2004-05-06 |
| Method of varying template dimensions to achieve alignment during imprint lithography App 20040053146 - Sreenivasan, S.V. ; et al. | 2004-03-18 |
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