Unaxis Balzers Aktiengesellschaft

Patent Applications and Registrations

Patent applications and USPTO patent grants for Unaxis Balzers Aktiengesellschaft.The latest application filed is for "rf plasma reactor having a distribution chamber with at least one grid".

Company Profile

0.50.21

Unaxis Balzers Aktiengesellschaft - Fuerstentum LI
Unaxis Balzers Aktiengesellschaft - LI LI
Unaxis Balzers Aktiengesellschaft - Balzers LI
Unaxis Balzers Aktiengesellschaft -
Unaxis Balzers Aktiengesellschaft - Furstentum LI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
RF Plasma Reactor Having a Distribution Chamber with at Least One Grid App 20080093341 - Turlot; Emmanuel ; et al.	2008-04-24
RF plasma reactor having a distribution chamber with at least one grid Grant 7,306,829 - Turlot , et al. December 11, 2	2007-12-11
Method for diamond coating substrates Grant 7,192,483 - Franz , et al. March 20, 2	2007-03-20
Planetary system workpiece support and method for surface treatment of workpieces Grant 7,081,166 - Zaech , et al. July 25, 2	2006-07-25
Method for the generation of light of a given polarization state Grant 7,070,280 - Edlinger , et al. July 4, 2	2006-07-04
Method for producing a unit having a three-dimensional surface patterning, and use of this method Grant 7,067,241 - Grabher , et al. June 27, 2	2006-06-27
Spectral light division and recombining with incident face for light to be divided Grant 7,052,137 - Heine May 30, 2	2006-05-30
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers Grant 7,033,471 - Dubs , et al. April 25, 2	2006-04-25
Optical element and its manufacturing process Grant 6,998,003 - Edlinger February 14, 2	2006-02-14
Waveguide plate and process for its production and microtitre plate App 20060008206 - Maisenhoelder; Bernd ; et al.	2006-01-12
Waveguide plate and process for its production and microtitre plate Grant 6,961,490 - Maisenhoelder , et al. November 1, 2	2005-11-01
Switch for the optical switching of a light path Grant 6,934,432 - Rudigier August 23, 2	2005-08-23
Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber App 20050172983 - Ramm, Juergen ; et al.	2005-08-11
Light coupling element Grant 6,922,287 - Wiki , et al. July 26, 2	2005-07-26
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers Grant 6,899,795 - Dubs , et al. May 31, 2	2005-05-31
Processes for vacuum treating workpieces, and corresponding process equipment Grant 6,890,862 - Wagner , et al. May 10, 2	2005-05-10
Method For Producing A Grid Structure, An Optical Element, An Evanescence Field Sensor Plate, Microtitre Plate And An Optical Communication Engineering Coupler As Well As A Device For Monitoring A Wavelength Grant 6,873,764 - Maisenholder , et al. March 29, 2	2005-03-29
Installation and method for vacuum treatment or powder production App 20050028737 - Karner, Johann ; et al.	2005-02-10
Waveguide and process for the production thereof App 20050031292 - Edlinger, Johannes ; et al.	2005-02-10
Tool with tool body and protective layer system Grant 6,844,069 - Braendle , et al. January 18, 2	2005-01-18
Coating apparatus for disk-shaped workpieces Grant 6,841,048 - Matt January 11, 2	2005-01-11
Method for producing coated substrates Grant 6,835,414 - Ramm December 28, 2	2004-12-28
Method for controlling plasma density or the distribution thereof Grant 6,821,397 - Krassnitzer November 23, 2	2004-11-23
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece Grant 6,818,108 - Schertler November 16, 2	2004-11-16
Vacuum treatment chamber and method for treating surfaces Grant 6,814,838 - Weichart November 9, 2	2004-11-09
Arrangement for orienting the magnetization direction of magnetic layers Grant 6,790,482 - Maass September 14, 2	2004-09-14
Light splitting and recombining arrangement Grant 6,781,765 - Edlinger , et al. August 24, 2	2004-08-24
Method for producing a hybrid disk and hybrid disks Grant 6,776,882 - Dubs August 17, 2	2004-08-17
Magnetron atomization source and method of use thereof Grant 6,776,881 - Gruenenfelder , et al. August 17, 2	2004-08-17
Spectral light division and recombining with incident face for light to be divided App 20040145706 - Heine, Claus	2004-07-29
Workpiece support Grant 6,761,772 - Giacri , et al. July 13, 2	2004-07-13
Structural element and process for its production App 20040087150 - Ramm, Jurgen	2004-05-06
Method for manufacturing disk-shaped workpieces with a sputter station Grant 6,730,194 - Schertler May 4, 2	2004-05-04
Installation and method for vacuum treatment or powder production Grant 6,703,081 - Karner , et al. March 9, 2	2004-03-09
Coating workpiece method using beam of plasma Grant 6,685,994 - Karner , et al. February 3, 2	2004-02-03
Coating apparatus for disk-shaped workpieces App 20040003992 - Matt, Thomas	2004-01-08
Plasma treatment apparatus and method for operating same Grant 6,673,255 - Marxer , et al. January 6, 2	2004-01-06
Vacuum valve Grant 6,669,170 - Kersken , et al. December 30, 2	2003-12-30
Method for vacuum treatment of workpieces and vacuum treatment facility Grant 6,669,987 - Schaefer , et al. December 30, 2	2003-12-30
Coating installation for disk-form workpieces Grant 6,656,330 - Matt December 2, 2	2003-12-02
Metod For Manufacturing A Cathodic Arc Coated Workpiece App 20030209424 - Brandle, Hans ; et al.	2003-11-13
Optical data storage disk Grant 6,645,352 - Weinzerl , et al. November 11, 2	2003-11-11
Method for removing the hard material coating applied on a hard metal workpiece and a holding device for at least one workpiece Grant 6,627,064 - Hans September 30, 2	2003-09-30
Waveguide and the process for production thereof Grant 6,610,222 - Edlinger , et al. August 26, 2	2003-08-26
Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber Grant 6,605,175 - Ramm , et al. August 12, 2	2003-08-12
Coating a workpiece and operating a cathodic arc discharge Grant 6,602,390 - Brandle , et al. August 5, 2	2003-08-05
Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece App 20030106789 - Schertler, Roman	2003-06-12
Procedure and device for the production of a plasma App 20030075522 - Weichart, Jurgen ; et al.	2003-04-24
Spectral light division and recombination configuration as well as process for the spectrally selective modulation of light Grant 6,550,919 - Heine April 22, 2	2003-04-22
RF plasma reactor App 20030070761 - Turlot, Emmanuel ; et al.	2003-04-17
Magnetron sputtering source and method of use thereof Grant 6,540,883 - Gruenenfelder , et al. April 1, 2	2003-04-01
Use of a cleaning process, a cleaning process, a connection process and a workpiece pair App 20030051792 - Dommann, Alex ; et al.	2003-03-20
Method for improving the rate of a plasma enhanced vacuum treatment Grant 6,533,534 - Schmitt , et al. March 18, 2	2003-03-18
Spectral light division and recombination configuration as well as process for the spectrally selective modulation of light App 20030025882 - Heine, Claus	2003-02-06
Magnetron atomization source and method of use thereof App 20030019740 - Gruenenfelder, Pius ; et al.	2003-01-30
Holding device Grant 6,511,543 - Stauss , et al. January 28, 2	2003-01-28
Waveguide plate and process for its production and microtitre plate Grant 6,510,263 - Maisenholder , et al. January 21, 2	2003-01-21
Design of gas injection for the electrode in a capacitively coupled RF plasma reactor Grant 6,502,530 - Turlot , et al. January 7, 2	2003-01-07
Method of manufacturing an object in a vacuum recipient App 20020153242 - Signer, Hans ; et al.	2002-10-24
Combination pressure sensor with capactive and thermal elements App 20020129657 - Walchli, Urs ; et al.	2002-09-19
Light Splitter And Optical Transmitter Configuration With A Light Splitter App 20020126260 - Edlinger, Johannes ; et al.	2002-09-12
Optical data storage disk App 20020054973 - Weinzerl, Helfried ; et al.	2002-05-09
Process for manufacturing coated plastic body Grant 6,383,573 - Beck , et al. May 7, 2	2002-05-07
Plasma treatment apparatus and method for operating same App 20020026984 - Marxer, Alexander ; et al.	2002-03-07
Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process Grant 6,342,970 - Sperger , et al. January 29, 2	2002-01-29
Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source Grant 6,337,001 - Haag , et al. January 8, 2	2002-01-08
Light splitter and optical transmitter configuration with a light splitter Grant 6,288,844 - Edlinger , et al. September 11, 2	2001-09-11
Capacitively coupled RF-plasma reactor Grant 6,281,469 - Perrin , et al. August 28, 2	2001-08-28
Tool with tool body and protective layer system Grant 6,274,249 - Braendle , et al. August 14, 2	2001-08-14
Process and apparatus for sputter etching or sputter coating Grant 6,248,219 - Wellerdieck , et al. June 19, 2	2001-06-19
Method For Improving The Rate Of A Plasma Enhanced Vacuum Treatment App 20010003272 - SCHMITT, JACQUES ; et al.	2001-06-14

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