Umstadter; Karl R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Umstadter; Karl R..The latest application filed is for "methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation".

Company Profile

0.6.10

Umstadter; Karl R. - Livermore CA US
Umstadter; Karl R. - San Diego CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Advanced debris mitigation of EUV light source Grant 9,268,031 - Umstadter February 23, 2	2016-02-23
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation Grant 9,156,068 - Klebanoff , et al. October 13, 2	2015-10-13
System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source Grant 9,155,180 - Umstadter October 6, 2	2015-10-06
Methods And Apparatus For Cleaning Objects In A Chamber Of An Optical Instrument By Generating Reactive Ions Using Photon Radiation App 20140374619 - Klebanoff; Leonard E. ; et al.	2014-12-25
Multiplexing EUV sources in reticle inspection Grant 8,917,432 - Wack , et al. December 23, 2	2014-12-23
Apparatus, System, And Method For Separating Gases And Mitigating Debris In A Controlled Pressure Environment App 20140166051 - Umstadter; Karl R. ; et al.	2014-06-19
Optical Component With Blocking Surface And Method Thereof App 20140158914 - Klebanoff; Leonard E. ; et al.	2014-06-12
Multiplexing Euv Sources In Reticle Inspection App 20140036333 - Wack; Daniel ; et al.	2014-02-06
Advanced Debris Mitigation Of Euv Light Source App 20130313423 - Umstadter; Karl R.	2013-11-28
System and method for vaporizing powders App 20070172601 - Putvinski; Sergei ; et al.	2007-07-26
System and method for vaporizing a solid material App 20060261522 - Ohkawa; Tihiro ; et al.	2006-11-23
System and method for vaporizing a metal App 20060233968 - Ohkawa; Tihiro ; et al.	2006-10-19

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