loadpatents
Patent applications and USPTO patent grants for Umotoy; Sal.The latest application filed is for "method for removing oxides".
Patent | Date |
---|---|
Method for removing oxides Grant 8,846,163 - Kao , et al. September 30, 2 | 2014-09-30 |
Method For Removing Oxides App 20120244704 - KAO; Chien-Teh ;   et al. | 2012-09-27 |
Method For Removing Oxides App 20110223755 - KAO; CHIEN-TEH ;   et al. | 2011-09-15 |
Method for front end of line fabrication Grant 7,767,024 - Kao , et al. August 3, 2 | 2010-08-03 |
Method For Removing Oxides App 20090111280 - Kao; Chien-Teh ;   et al. | 2009-04-30 |
Lid assembly for front end of line fabrication Grant 7,520,957 - Kao , et al. April 21, 2 | 2009-04-21 |
Method For Front End Of Line Fabrication App 20080268645 - KAO; CHIEN-TEH ;   et al. | 2008-10-30 |
Method for front end of line fabrication Grant 7,396,480 - Kao , et al. July 8, 2 | 2008-07-08 |
In-situ dry clean chamber for front end of line fabrication App 20050230350 - Kao, Chien-Teh ;   et al. | 2005-10-20 |
Lid assembly for front end of line fabrication App 20050218507 - Kao, Chien-Teh ;   et al. | 2005-10-06 |
Substrate support for in-situ dry clean chamber for front end of line fabrication App 20050221552 - Kao, Chien-Teh ;   et al. | 2005-10-06 |
Method for front end of line fabrication App 20050205110 - Kao, Chien-Teh ;   et al. | 2005-09-22 |
Ceramic substrate support Grant 6,494,955 - Lei , et al. December 17, 2 | 2002-12-17 |
Processing chamber with multi-layer brazed lid App 20020072164 - Umotoy, Sal ;   et al. | 2002-06-13 |
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