UMEKAWA; Atsushi

Patent Applications and Registrations

Patent applications and USPTO patent grants for UMEKAWA; Atsushi.The latest application filed is for "substrate processing apparatus and method of manufacturing semiconductor device".

Company Profile

7.17.19

UMEKAWA; Atsushi - Toyama-shi JP
Umekawa; Atsushi - Toyama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20220275515 - OHNO; Mikio ; et al.	2022-09-01
Substrate processing apparatus and method of manufacturing semiconductor device Grant 11,365,482 - Ohno , et al. June 21, 2	2022-06-21
Substrate processing apparatus, and thermocouple Grant 11,300,456 - Osaka , et al. April 12, 2	2022-04-12
Substrate Processing Apparatus, And Thermocouple App 20220082447 - OSAKA; Akihiro ; et al.	2022-03-17
Heating part, substrate processing apparatus, and method of manufacturing semiconductor device Grant 11,198,935 - Sugiura , et al. December 14, 2	2021-12-14
Substrate processing apparatus and manufacturing method of semiconductor device Grant 10,998,205 - Miyashita , et al. May 4, 2	2021-05-04
Inner tube of reactor for semiconductor fabrication Grant D901,406 - Kagaya , et al. November 10, 2	2020-11-10
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20200232097 - OHNO; Mikio ; et al.	2020-07-23
Substrate processing apparatus, and thermocouple Grant 10,684,174 - Osaka , et al.	2020-06-16
Substrate Processing Apparatus, And Thermocouple App 20200166413 - OSAKA; Akihiro ; et al.	2020-05-28
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,640,872 - Ohno , et al.	2020-05-05
Substrate Processing Apparatus And Manufacturing Method Of Semiconductor Device App 20200090965 - MIYASHITA; Tomoyasu ; et al.	2020-03-19
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20190106787 - OHNO; Mikio ; et al.	2019-04-11
Substrate processing apparatus, and thermocouple Grant 10,228,291 - Osaka , et al.	2019-03-12
Substrate Processing Apparatus, And Thermocouple App 20180328790 - OSAKA; Akihiro ; et al.	2018-11-15
Substrate Processing Apparatus, Recording Medium, And Fluid Circulation Mechanism App 20180040488 - FUJINO; Toshiki ; et al.	2018-02-08
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,646,862 - Hamano , et al. May 9, 2	2017-05-09
Heating Part, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device App 20170107620 - SUGIURA; Shinobu ; et al.	2017-04-20
Substrate Processing Apparatus, And Thermocouple App 20160245704 - OSAKA; Akihiro ; et al.	2016-08-25
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160093476 - TOYODA; Kazuyuki ; et al.	2016-03-31
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, And Recording Medium App 20160002789 - KONTANI; Tadashi ; et al.	2016-01-07
Substrate processing apparatus and method for manufacturing semiconductor device Grant 9,171,724 - Yashima , et al. October 27, 2	2015-10-27
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20150147894 - HAMANO; Katsuyoshi ; et al.	2015-05-28
Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same Grant 8,987,645 - Ogawa , et al. March 24, 2	2015-03-24
Substrate processing apparatus and method of manufacturing a semiconductor device Grant 8,557,720 - Akao , et al. October 15, 2	2013-10-15
Substrate processing apparatus and method of manufacturing a semiconductor device Grant 8,486,222 - Akao , et al. July 16, 2	2013-07-16
Substrate Processing Apparatus And Method For Manufacturing Semiconductor Device App 20130072034 - YASHIMA; Shinji ; et al.	2013-03-21
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20120129358 - OGAWA; Unryu ; et al.	2012-05-24
Substrate Processing Apparatus And Method Of Manufacturing A Semiconductor Device App 20120108061 - AKAO; Tokunobu ; et al.	2012-05-03
Substrate Processing Apparatus And Method Of Manufacturing A Semiconductor Device App 20120108080 - AKAO; Tokunobu ; et al.	2012-05-03
Substrate Processing Apparatus And Substrate Processing Method App 20110233198 - OKUNO; Masahisa ; et al.	2011-09-29

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