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Method Of Making Semiconductor Ferroelectric Memory Element, And Semiconductor Ferroelectric Memory Transistor App 20200279927 - SAKAI; Shigeki ;   et al. | 2020-09-03 |
Method of making semiconductor ferroelectric memory element, and semiconductor ferroelectric memory transistor Grant 10,686,043 - Sakai , et al. | 2020-06-16 |
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Ferroelectric Device And Method For Manufacturing Same App 20180130909 - SAKAI; Shigeki ;   et al. | 2018-05-10 |
Vaporizer, center rod used therein, and method for vaporizing material carried by carrier gas Grant 9,885,113 - Umeda , et al. February 6, 2 | 2018-02-06 |
Ferroelectric device and method of its manufacture Grant 9,818,869 - Sakai , et al. November 14, 2 | 2017-11-14 |
Method Of Making Semiconductor Ferroelectric Memory Element, And Semiconductor Ferroelectric Memory Transistor App 20170309488 - SAKAI; Shigeki ;   et al. | 2017-10-26 |
Evaporation method and film deposition method Grant 9,644,264 - Toda , et al. May 9, 2 | 2017-05-09 |
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Film-forming Apparatus App 20150284845 - Toda; Masayuki ;   et al. | 2015-10-08 |
Method for cooling and dispersing a carrier gas, and method for vaporizing a carrier gas Grant 9,108,120 - Toda , et al. August 18, 2 | 2015-08-18 |
Center rod for use in the carburetor or carburetor for MOCVD Grant 9,020,332 - Toda , et al. April 28, 2 | 2015-04-28 |
Method For Cooling And Dispersing A Carrier Gas, And Method For Vaporizing A Carrier Gas App 20150069642 - TODA; Masayuki ;   et al. | 2015-03-12 |
Carburetor, Carburetor For Mocvd Using Same, Center Rod For Use In The Carburetor Or Carburetor7 For Mocvd, Method For Dispersing Carrier Gas, And Method For Vaporizing Carrier Gas App 20150053137 - TODA; Masayuki ;   et al. | 2015-02-26 |
Carburetor, carburetor for MOCVD using same, center rod for use in the carburetor or carburetor for MOCVD, method for dispersing carrier gas, and method for vaporizing carrier gas Grant 8,897,627 - Toda , et al. November 25, 2 | 2014-11-25 |
Vaporizer, Center Rod Used Therein, And Method For Vaporizing Material Carried By Carrier Gas App 20140050852 - Umeda; Masaru ;   et al. | 2014-02-20 |
Vaporizer App 20130291797 - Kusuhara; Masaki ;   et al. | 2013-11-07 |
Evaporation Method And Film Deposition Method App 20130273249 - TODA; Masayuki ;   et al. | 2013-10-17 |
Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus Grant 8,486,196 - Toda , et al. July 16, 2 | 2013-07-16 |
Carburetor, Carburetor For Mocvd Using Same, Center Rod For Use In The Carburetor Or Carburetor For Mocvd, Method For Dispersing Carrier Gas, And Method For Vaporizing Carrier Gas App 20120040098 - Toda; Masayuki ;   et al. | 2012-02-16 |
Vaporizing Apparatus And Film Forming Apparatus Provided With Vaporizing Apparatus App 20100173073 - Toda; Masayuki ;   et al. | 2010-07-08 |
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD Grant 7,744,698 - Toda , et al. June 29, 2 | 2010-06-29 |
Levitation Transportation Device And Levitation Transportation Method App 20100104380 - TODA; Masayuki ;   et al. | 2010-04-29 |
Levitation transportation device and levitation transportation method Grant 7,704,019 - Toda , et al. April 27, 2 | 2010-04-27 |
Vaporizer and various devices using the same and an associated vaporizing method Grant 7,673,856 - Toda , et al. March 9, 2 | 2010-03-09 |
Vaporizer and various devices using the same and an associated vaporizing method App 20080193645 - Toda; Masayuki ;   et al. | 2008-08-14 |
Levitation Transportation Device And Levitation Transportation Method App 20080031696 - Toda; Masayuki ;   et al. | 2008-02-07 |
Substrate Surface Treating Apparatus App 20070289535 - Umeda; Masaru | 2007-12-20 |
Carburetor, various types of devices using the carburetor, and method of vaporization Grant 7,246,796 - Toda , et al. July 24, 2 | 2007-07-24 |
Vaporizer, various apparatuses including the same and method of vaporization App 20060037539 - Toda; Masayuki ;   et al. | 2006-02-23 |
Manufacturing method for semiconductor device, and system to which semiconductor is applied App 20050189620 - Sugino, Takashi ;   et al. | 2005-09-01 |
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD Grant 6,931,203 - Toda , et al. August 16, 2 | 2005-08-16 |
Semiconductor device and method for fabricating the same and semiconductor device application system App 20050124176 - Sugino, Takashi ;   et al. | 2005-06-09 |
Method and apparatus for forming low permittivity film and electronic device using the film App 20050064724 - Sugino, Takashi ;   et al. | 2005-03-24 |
Method and apparatus for forming film having low dielectric constant, and electronic device using the film App 20040241964 - Sugino, Takashi ;   et al. | 2004-12-02 |
Deposition method, deposition apparatus, insulating film and semiconductor integrated circuit App 20040157472 - Sugino, Takashi ;   et al. | 2004-08-12 |
Carburetor, various types of devices using the carburetor, and method of vaporization App 20040113289 - Toda, Masayuki ;   et al. | 2004-06-17 |
Solid state device and its manufacturing method App 20040084775 - Sugino, Takashi ;   et al. | 2004-05-06 |
Electrode and device using the same App 20040041508 - Sugino, Takashi ;   et al. | 2004-03-04 |
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD App 20040020437 - Toda, Masayuki ;   et al. | 2004-02-05 |
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD App 20030221625 - Toda, Masayuki ;   et al. | 2003-12-04 |
Vaporizer for MOCVD and method of vaporizing raw material solutions for MOCVD Grant 6,540,840 - Toda , et al. April 1, 2 | 2003-04-01 |
Air stream transfer apparatus Grant 6,398,464 - Yagai , et al. June 4, 2 | 2002-06-04 |
Air stream particulate collecting transfer apparatus Grant 6,315,501 - Yagai , et al. November 13, 2 | 2001-11-13 |
Thin film forming equipment Grant 6,074,538 - Ohmi , et al. June 13, 2 | 2000-06-13 |
Thin film forming equipment Grant 5,683,072 - Ohmi , et al. November 4, 1 | 1997-11-04 |
Reduced pressure device Grant 5,591,267 - Ohmi , et al. January 7, 1 | 1997-01-07 |
Wafer carrying device and wafer carrying method Grant 5,518,360 - Toda , et al. May 21, 1 | 1996-05-21 |
Method of forming a monocrystalline film having a closed loop step portion on the substrate Grant 5,362,672 - Ohmi , et al. November 8, 1 | 1994-11-08 |
Gas supply piping device for a process apparatus Grant 5,313,982 - Ohmi , et al. May 24, 1 | 1994-05-24 |
Vapor drier Grant 5,249,371 - Saito , et al. October 5, 1 | 1993-10-05 |
Piping system for supplying ultra-pure water Grant 5,160,429 - Ohmi , et al. November 3, 1 | 1992-11-03 |
Process and apparatus for recovering a lower alcohol from a mixture thereof with water Grant 5,138,105 - Ninomiya , et al. August 11, 1 | 1992-08-11 |
Wafer succeptor apparatus Grant 5,119,541 - Ohmi , et al. June 9, 1 | 1992-06-09 |
Reduced pressure surface treatment apparatus Grant 5,110,438 - Ohmi , et al. May 5, 1 | 1992-05-05 |
Semiconductor device wirings with hillocks Grant 4,984,060 - Ohmi , et al. January 8, 1 | 1991-01-08 |
Apparatus for forming film with surface reaction Grant 4,977,855 - Ohmi , et al. December 18, 1 | 1990-12-18 |
Process gas supply piping system Grant 4,917,136 - Ohmi , et al. April 17, 1 | 1990-04-17 |
Cylinder cabinet piping system Grant 4,869,301 - Ohmi , et al. September 26, 1 | 1989-09-26 |