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Gallium nitride structure, piezoelectric element, method of manufacturing piezoelectric element, and resonator using piezoelectric element Grant 11,451,211 - Umeda , et al. September 20, 2 | 2022-09-20 |
Resonance Device App 20210194454 - Umeda; Keiichi ;   et al. | 2021-06-24 |
Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element Grant 11,012,787 - Umeda , et al. May 18, 2 | 2021-05-18 |
Resonance device Grant 10,998,857 - Umeda , et al. May 4, 2 | 2021-05-04 |
Piezoelectric thin film and piezoelectric vibrator Grant 10,965,270 - Aida , et al. March 30, 2 | 2021-03-30 |
Mems Device App 20200290865 - Umeda; Keiichi ;   et al. | 2020-09-17 |
Resonance Device App 20200244222 - Umeda; Keiichi ;   et al. | 2020-07-30 |
Resonator manufacturing method Grant 10,727,807 - Umeda , et al. | 2020-07-28 |
Piezoelectric thin film, manufacturing method therefor, and piezoelectric element Grant 10,608,164 - Umeda , et al. | 2020-03-31 |
Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film Grant 10,475,984 - Umeda , et al. Nov | 2019-11-12 |
Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element Grant 10,397,708 - Umeda , et al. A | 2019-08-27 |
Piezoelectric Device App 20190245133 - Umeda; Keiichi ;   et al. | 2019-08-08 |
Resonance device and manufacturing method therefor Grant 10,374,569 - Umeda , et al. | 2019-08-06 |
Piezoelectric Element, Piezoelectric Microphone, Piezoelectric Resonator And Method For Manufacturing Piezoelectric Element App 20190238996 - UMEDA; Keiichi ;   et al. | 2019-08-01 |
Piezoelectric device Grant 10,312,427 - Umeda , et al. | 2019-06-04 |
Vibration device and manufacturing method of the same Grant 10,291,202 - Yamada , et al. | 2019-05-14 |
Piezoelectric vibrator and piezoelectric vibration device Grant 10,224,896 - Nishimura , et al. | 2019-03-05 |
Gallium Nitride Structure, Piezoelectric Element, Method Of Manufacturing Piezoelectric Element, And Resonator Using Piezoelectric Element App 20190007026 - Umeda; Keiichi ;   et al. | 2019-01-03 |
Piezoelectric resonator and method for manufacturing the same Grant 10,069,473 - Umeda September 4, 2 | 2018-09-04 |
Resonance Device And Manufacturing Method Therefor App 20180226937 - Umeda; Keiichi ;   et al. | 2018-08-09 |
Piezoelectric Element, Piezoelectric Microphone, Piezoelectric Resonator And Method For Manufacturing Piezoelectric Element App 20180192203 - Umeda; Keiichi ;   et al. | 2018-07-05 |
Piezoelectric thin film and method for manufacturing the same, and piezoelectric element Grant 9,972,769 - Umeda , et al. May 15, 2 | 2018-05-15 |
Surface acoustic wave device Grant 9,948,274 - Umeda , et al. April 17, 2 | 2018-04-17 |
Vibrating device Grant 9,905,748 - Nishimura , et al. February 27, 2 | 2018-02-27 |
Method for manufacturing piezoelectric bulk acoustic wave element and piezoelectric bulk acoustic wave element Grant 9,893,270 - Araki , et al. February 13, 2 | 2018-02-13 |
Vibrating device Grant 9,866,199 - Nishimura , et al. January 9, 2 | 2018-01-09 |
Piezoelectric member that achieves high sound speed, acoustic wave apparatus, and piezoelectric member manufacturing method Grant 9,831,416 - Umeda , et al. November 28, 2 | 2017-11-28 |
Piezoelectric Thin Film And Piezoelectric Vibrator App 20170294894 - AIDA; YASUHIRO ;   et al. | 2017-10-12 |
Resonator Manufacturing Method App 20170272050 - Umeda; Keiichi ;   et al. | 2017-09-21 |
Vibrating device Grant 9,584,093 - Nishimura , et al. February 28, 2 | 2017-02-28 |
Vibrating device and manufacturing method therfor Grant 9,553,561 - Umeda , et al. January 24, 2 | 2017-01-24 |
Aluminum Nitride Piezoelectric Thin Film, Piezoelectric Material, Piezoelectric Component, And Method For Manufacturing Aluminum Nitride Piezoelectric Thin Film App 20160372653 - UMEDA; KEIICHI ;   et al. | 2016-12-22 |
Piezoelectric Vibrator And Piezoelectric Vibration Device App 20160329877 - NISHIMURA; TOSHIO ;   et al. | 2016-11-10 |
Bulk wave resonator having an aluminum nitride film containing scandium and ScAlN protective layer Grant 9,461,616 - Umeda October 4, 2 | 2016-10-04 |
Piezoelectric Device App 20160284974 - UMEDA; KEIICHI ;   et al. | 2016-09-29 |
Piezoelectric Thin Film, Manufacturing Method Therefor, And Piezoelectric Element App 20160254438 - UMEDA; KEIICHI ;   et al. | 2016-09-01 |
Variable capacitance device Grant 9,418,793 - Umeda August 16, 2 | 2016-08-16 |
Vibration Device And Manufacturing Method Of The Same App 20160197597 - Yamada; Hiroshi ;   et al. | 2016-07-07 |
Thin film device and method for manufacturing thin film device Grant 9,368,247 - Umeda June 14, 2 | 2016-06-14 |
Piezoelectric Resonator And Method For Manufacturing The Same App 20160156332 - Umeda; Keiichi | 2016-06-02 |
Variable capacitance device Grant 9,355,783 - Umeda , et al. May 31, 2 | 2016-05-31 |
Vibrating Device App 20160072473 - Nishimura; Toshio ;   et al. | 2016-03-10 |
Vibrating Device App 20160065173 - NISHIMURA; TOSHIO ;   et al. | 2016-03-03 |
Vibrating Device App 20160064642 - NISHIMURA; TOSHIO ;   et al. | 2016-03-03 |
Piezoelectric thin-film resonator and method for producing piezoelectric thin film Grant 9,246,079 - Umeda , et al. January 26, 2 | 2016-01-26 |
Duplexer Grant 9,231,557 - Umeda , et al. January 5, 2 | 2016-01-05 |
Piezoelectric Thin Film And Method For Manufacturing The Same, And Piezoelectric Element App 20150357555 - Umeda; Keiichi ;   et al. | 2015-12-10 |
Piezoelectric Member, Acoustic Wave Apparatus, And Piezoelectric Member Manufacturing Method App 20150287905 - UMEDA; Keiichi ;   et al. | 2015-10-08 |
Vibrating Device And Manufacturing Method Therfor App 20150180449 - Umeda; Keiichi ;   et al. | 2015-06-25 |
Piezoelectric Device App 20150162523 - Umeda; Keiichi ;   et al. | 2015-06-11 |
Bulk Wave Resonator App 20150084719 - Umeda; Keiichi | 2015-03-26 |
Surface Acoustic Wave Device App 20150069882 - UMEDA; Keiichi ;   et al. | 2015-03-12 |
Method For Manufacturing Piezoelectric Bulk Acoustic Wave Element And Piezoelectric Bulk Acoustic Wave Element App 20140354110 - Araki; Kiyoto ;   et al. | 2014-12-04 |
Thin Film Device And Method For Manufacturing Thin Film Device App 20140078640 - UMEDA; Keiichi | 2014-03-20 |
Piezoelectric thin-film filter Grant 8,610,516 - Umeda December 17, 2 | 2013-12-17 |
Variable Capacitance Device App 20130170092 - UMEDA; Keiichi | 2013-07-04 |
Piezoelectric Thin-film Resonator And Method For Producing Piezoelectric Thin Film App 20130127300 - UMEDA; Keiichi ;   et al. | 2013-05-23 |
Variable Capacitance Device App 20120206857 - UMEDA; Keiichi ;   et al. | 2012-08-16 |
Duplexer App 20110102102 - FUJIO; Kouhei ;   et al. | 2011-05-05 |
Piezoelectric resonator and piezoelectric filter having a heat-radiating film Grant 7,924,120 - Umeda April 12, 2 | 2011-04-12 |
Piezoelectric resonator including an acoustic reflector portion Grant 7,868,519 - Umeda January 11, 2 | 2011-01-11 |
Piezoelectric Resonator App 20100148638 - UMEDA; Keiichi | 2010-06-17 |
Piezoelectric Resonator and Piezoelectric Filter Device App 20100134210 - Umeda; Keiichi | 2010-06-03 |
Piezoelectric Thin-film Filter App 20100013573 - Umeda; Keiichi | 2010-01-21 |
Piezoelectric resonator and piezoelectric filter Grant 7,649,304 - Umeda , et al. January 19, 2 | 2010-01-19 |
Duplexer App 20090315640 - UMEDA; Keiichi ;   et al. | 2009-12-24 |
Piezoelectric Resonator And Piezoelectric Filter App 20090261922 - Umeda; Keiichi | 2009-10-22 |
Piezoelectric thin-film resonator Grant 7,535,154 - Umeda , et al. May 19, 2 | 2009-05-19 |
Thin-film piezoelectric resonator utilizing a second or higher harmonic mode Grant 7,504,910 - Kawamura , et al. March 17, 2 | 2009-03-17 |
Piezoelectic Resonator And Piezoelectric Filter App 20090001848 - UMEDA; Keiichi ;   et al. | 2009-01-01 |
Piezoelectric thin-film filter Grant 7,414,497 - Umeda , et al. August 19, 2 | 2008-08-19 |
Piezoelectric Thin-film Resonator App 20080179995 - UMEDA; Keiichi ;   et al. | 2008-07-31 |
Piezoelectric Thin-Film Filter App 20080048803 - Umeda; Keiichi ;   et al. | 2008-02-28 |
Piezoelectric thin-film resonator and process for producing same Grant 7,276,836 - Umeda , et al. October 2, 2 | 2007-10-02 |
Electronic component and method for manufacturing the same Grant 7,180,390 - Umeda , et al. February 20, 2 | 2007-02-20 |
Thin-film piezoelectric resonator App 20070035207 - Kawamura; Hideki ;   et al. | 2007-02-15 |
Piezoelectric thin-film resonator and process for producing same App 20060119230 - Umeda; Keiichi ;   et al. | 2006-06-08 |
Electronic component and method for manufacturing the same App 20050035829 - Umeda, Keiichi ;   et al. | 2005-02-17 |