Umatate; Toshikazu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Umatate; Toshikazu.The latest application filed is for "pattern forming method and method for producing device".
- Umatate; Toshikazu - Hino N/A JP
- UMATATE; Toshikazu - Hino-shi JP
- Umatate; Toshikazu - Tokyo JP
- Umatate; Toshikazu - Kawasaki JP
| Patent | Date |
|---|---|
| Pattern forming method and method for producing device Grant 8,795,953 - Umatate , et al. August 5, 2 | 2014-08-05 |
| Pattern Forming Method And Method For Producing Device App 20120225388 - UMATATE; Toshikazu ; et al. | 2012-09-06 |
| Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus Grant 6,040,096 - Kakizaki , et al. March 21, 2 | 2000-03-21 |
| Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus Grant 5,894,056 - Kakizaki , et al. April 13, 1 | 1999-04-13 |
| Lithography information control system Grant 5,243,377 - Umatate , et al. September 7, 1 | 1993-09-07 |
| Method of and apparatus for aligning a substrate Grant 4,833,621 - Umatate May 23, 1 | 1989-05-23 |
| Method for successive alignment of chip patterns on a substrate Grant 4,780,617 - Umatate , et al. October 25, 1 | 1988-10-25 |
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