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Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask
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Process For Producing Gray Tone Mask
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Half-tone Mask, Half-tone Mask Blank And Method For Manufacturing Half-tone Mask
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Phase shifter film and process for the same
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Phase shifter film and process for the same
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Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
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Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
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Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
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Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
App 20050011862 - Sasaki, Takaei ; et al. | 2005-01-20 |
Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
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Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
App 20040101767 - Sasaki, Takaei ; et al. | 2004-05-27 |
Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
App 20040094504 - Sasaki, Takaei ; et al. | 2004-05-20 |
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank
Grant 6,689,515 - Yoshioka , et al. February 10, 2 | 2004-02-10 |
Method And Apparatus For Dry-etching Half-tone Phase-shift Films Half-tone Phase-shift Photomasks And Method For The Preparation Thereof And Semiconductor Circuits And Method For The Fabrication Thereof
Grant 6,685,848 - Sasaki , et al. February 3, 2 | 2004-02-03 |
Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices
Grant 6,569,577 - Isao , et al. May 27, 2 | 2003-05-27 |
Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
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Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
App 20020139476 - Sasaki, Takaei ; et al. | 2002-10-03 |
Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
App 20020136967 - Sasaki, Takaei ; et al. | 2002-09-26 |
Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof
Grant 6,391,791 - Sasaki , et al. May 21, 2 | 2002-05-21 |
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank
App 20010018154 - Yoshioka, Nobuyuki ; et al. | 2001-08-30 |
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank
Grant 6,228,541 - Isao , et al. May 8, 2 | 2001-05-08 |
Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask
Grant 5,952,128 - Isao , et al. September 14, 1 | 1999-09-14 |
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
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Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
Grant 5,691,090 - Isao , et al. November 25, 1 | 1997-11-25 |
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
Grant 5,674,647 - Isao , et al. October 7, 1 | 1997-10-07 |
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region
Grant 5,629,114 - Isao , et al. May 13, 1 | 1997-05-13 |
Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them
Grant 5,605,776 - Isao , et al. February 25, 1 | 1997-02-25 |
Phase shift mask and manufacturing method thereof
Grant 5,482,799 - Isao , et al. January 9, 1 | 1996-01-09 |
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