Patent | Date |
---|
Semi-transparent film grayscale mask Grant 8,685,596 - Gao , et al. April 1, 2 | 2014-04-01 |
Method for forming an iridium oxide (IrOx) nanowire neural sensor array Grant 7,905,013 - Zhang , et al. March 15, 2 | 2011-03-15 |
Error diffusion-derived sub-resolutional grayscale reticle Grant 7,897,302 - Ulrich , et al. March 1, 2 | 2011-03-01 |
Sub-resolutional grayscale reticle Grant 7,887,980 - Ulrich , et al. February 15, 2 | 2011-02-15 |
Method of fabricating grayscale mask using smart cut.RTM. wafer bonding process Grant 7,838,174 - Gao , et al. November 23, 2 | 2010-11-23 |
Nanorod sensor with single-plane electrodes Grant 7,759,150 - Zhang , et al. July 20, 2 | 2010-07-20 |
Method of etching a TE/PCMO stack using an etch stop layer Grant 7,727,897 - Ulrich , et al. June 1, 2 | 2010-06-01 |
Method of fabricating a grayscale mask using a wafer bonding process Grant 7,682,761 - Gao , et al. March 23, 2 | 2010-03-23 |
Method of making a grayscale reticle using step-over lithography for shaping microlenses Grant 7,678,512 - Ono , et al. March 16, 2 | 2010-03-16 |
Sub-Resolutional Grayscale Reticle App 20100040958 - Ulrich; Bruce D. ;   et al. | 2010-02-18 |
Error Diffusion-Derived Sub-Resolutional Grayscale Reticle App 20100040959 - Ulrich; Bruce D. ;   et al. | 2010-02-18 |
Semi-transparent Film Grayscale Mask App 20090142673 - Gao; Wei ;   et al. | 2009-06-04 |
MOCVD PGO thin films deposited on indium oxide for feram applications Grant 7,531,207 - Li , et al. May 12, 2 | 2009-05-12 |
IrOx nanowire protein sensor App 20090017197 - Zhang; Fengyan ;   et al. | 2009-01-15 |
IrOx nanowire neural sensor App 20080299381 - Zhang; Fengyan ;   et al. | 2008-12-04 |
Nanorod sensor with single-plane electrodes App 20080290431 - Zhang; Fengyan ;   et al. | 2008-11-27 |
Grayscale reticle for precise control of photoresist exposure Grant 7,439,187 - Ono , et al. October 21, 2 | 2008-10-21 |
Method of fabricating a grayscale mask using a wafer bonding process App 20080197107 - Gao; Wei ;   et al. | 2008-08-21 |
Method of fabricating grayscale mask using smart cut.RTM. wafer bonding process App 20080176392 - Gao; Wei ;   et al. | 2008-07-24 |
Method of making a grayscale reticle using step-over lithography for shaping microlenses App 20080176148 - Ono; Yoshi ;   et al. | 2008-07-24 |
Silicon nanostructures and fabrication thereof App 20080166878 - Li; Tingkai ;   et al. | 2008-07-10 |
Grayscale reticle for precise control of photoresist exposure App 20080102641 - Ono; Yoshi ;   et al. | 2008-05-01 |
Selective etching processes of SiO.sub.2 , Ti and In.sub.2 O.sub.3 thin films for FeRAM device applications Grant 7,364,665 - Li , et al. April 29, 2 | 2008-04-29 |
Selective etching processes of silicon nitride and indium oxide thin films for FeRAM device applications Grant 7,338,907 - Li , et al. March 4, 2 | 2008-03-04 |
Integration processes for fabricating a conductive metal oxide gate ferroelectric memory transistor Grant 7,329,548 - Li , et al. February 12, 2 | 2008-02-12 |
Integration Processes For Fabricating A Conductive Metal Oxide Gate Ferroelectric Memory Transistor App 20080003697 - Li; Tingkai ;   et al. | 2008-01-03 |
Method of forming a microlens array having a high fill factor Grant 7,297,473 - Ono , et al. November 20, 2 | 2007-11-20 |
Method for densifying sol-gel films to form microlens structures App 20070259127 - Ono; Yoshi ;   et al. | 2007-11-08 |
Ultra-shallow metal oxide surface channel MOS transistor Grant 7,256,465 - Li , et al. August 14, 2 | 2007-08-14 |
Method of forming a microlens array having a high fill factor App 20070105056 - Ono; Yoshi ;   et al. | 2007-05-10 |
Step-over lithography to produce parabolic photoresist profiles for microlens formation Grant 7,190,526 - Ulrich , et al. March 13, 2 | 2007-03-13 |
Method of etching a TE/PCMO stack using an etch stop layer App 20070049029 - Ulrich; Bruce D. ;   et al. | 2007-03-01 |
One mask Pt/PCMO/Pt stack etching process for RRAM applications Grant 7,169,637 - Zhang , et al. January 30, 2 | 2007-01-30 |
Method for determining pattern misalignment over a substrate Grant 7,160,656 - Ulrich January 9, 2 | 2007-01-09 |
Method for determining pattern misalignment over a substrate App 20060121374 - Ulrich; Bruce D. | 2006-06-08 |
Pt/PGO etching process for FeRAM applications Grant 7,041,511 - Zhang , et al. May 9, 2 | 2006-05-09 |
Selective etching processes of SiO2, Ti and In2O3 thin films for FeRAM device applications App 20060091107 - Li; Tingkai ;   et al. | 2006-05-04 |
Selective etching processes of silicon nitride and indium oxide thin films for FeRAM device applications App 20060073706 - Li; Tingkai ;   et al. | 2006-04-06 |
Method of fabricating an X/Y alignment vernier Grant 7,008,756 - Ulrich March 7, 2 | 2006-03-07 |
Directly patternable microlens App 20060046204 - Ono; Yoshi ;   et al. | 2006-03-02 |
Pt/PGO etching process for FeRAM applications App 20060040413 - Zhang; Fengyan ;   et al. | 2006-02-23 |
Lens formation by pattern transfer of a photoresist profile App 20060029890 - Ulrich; Bruce D. ;   et al. | 2006-02-09 |
One mask Pt/PCMO/Pt stack etching process for RRAM applications App 20060003489 - Zhang; Fengyan ;   et al. | 2006-01-05 |
Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard mask Grant 6,951,825 - Li , et al. October 4, 2 | 2005-10-04 |
MOCVD PGO thin films deposited on indium oxide for feram applications App 20050178656 - Li, Tingkai ;   et al. | 2005-08-18 |
Ultra-shallow metal oxide surface channel MOS transistor App 20050156254 - Li, Tingkai ;   et al. | 2005-07-21 |
X/Y alignment vernier and method of fabricating same App 20050084780 - Ulrich, Bruce D. | 2005-04-21 |
X/Y alignment vernier formed on a substrate Grant 6,864,589 - Ulrich March 8, 2 | 2005-03-08 |
Selectively deposited PGO thin film and method for forming same Grant 6,825,519 - Li , et al. November 30, 2 | 2004-11-30 |
Selectively deposited PGO thin film method for forming same App 20040188743 - Li, Tingkai ;   et al. | 2004-09-30 |
Method of etching a SiN/Ir/TaN or SiN/Ir/Ti stack using an aluminum hard mask App 20040185669 - Li, Tingkai ;   et al. | 2004-09-23 |
MOCVD selective deposition of c-axis oriented Pb5Ge3O11 thin films on high-k gate oxides Grant 6,794,198 - Li , et al. September 21, 2 | 2004-09-21 |
MFMOS capacitors with high dielectric constant materials Grant 6,716,645 - Li , et al. April 6, 2 | 2004-04-06 |
Self-aligned shallow trench isolation process having improved polysilicon gate thickness control Grant 6,716,691 - Evans , et al. April 6, 2 | 2004-04-06 |
Method Of Making Self-aligned Shallow Trench Isolation App 20030186503 - Evans, David R. ;   et al. | 2003-10-02 |
Method of making self-aligned shallow trench isolation Grant 6,627,510 - Evans , et al. September 30, 2 | 2003-09-30 |
X/Y alignment vernier and method of fabricating same App 20030180637 - Ulrich, Bruce D. | 2003-09-25 |
MFMOS capacitors with high dielectric constant materials App 20030119242 - Li, Tingkai ;   et al. | 2003-06-26 |
High-k gate oxides with buffer layers of titanium for MFOS single transistor memory applications App 20030082909 - Li, Tingkai ;   et al. | 2003-05-01 |
Method of making a ferroelectric memory transistor App 20030032206 - Hsu, Sheng Teng ;   et al. | 2003-02-13 |
Method of making MFMOS capacitors with high dielectric constant materials Grant 6,503,763 - Li , et al. January 7, 2 | 2003-01-07 |
MFMOS capacitors with high dielectric constant materials and a method of making the same App 20020142487 - Li, Tingkai ;   et al. | 2002-10-03 |