| Patent | Date |
|---|
CMOS integrated moving-gate transducer with silicon as a functional layer
Grant 9,725,298 - Feyh , et al. August 8, 2 | 2017-08-08 |
CMOS Integrated Moving-Gate Transducer with Silicon as a Functional Layer
App 20160115013 - Feyh; Ando ; et al. | 2016-04-28 |
CMOS integrated moving-gate transducer with silicon as a functional layer
Grant 9,255,000 - Feyh , et al. February 9, 2 | 2016-02-09 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 9,003,885 - Pan , et al. April 14, 2 | 2015-04-14 |
Method for controlling a device and a device for controlling the device
Grant 8,786,419 - Ulm , et al. July 22, 2 | 2014-07-22 |
CMOS Integrated Moving-Gate Transducer with Silicon as a Functional Layer
App 20140175525 - Feyh; Ando ; et al. | 2014-06-26 |
Tri-axis Accelerometer Having A Single Proof Mass And Fully Differential Output Signals
App 20140102194 - PAN; Zhiyu ; et al. | 2014-04-17 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 8,418,559 - Pan , et al. April 16, 2 | 2013-04-16 |
Sensor device
Grant 8,276,446 - Ulm , et al. October 2, 2 | 2012-10-02 |
Method of producing a device
Grant 8,020,266 - Ulm , et al. September 20, 2 | 2011-09-20 |
Microelectromechanical systems encapsulation process
Grant 7,898,046 - Ulm , et al. March 1, 2 | 2011-03-01 |
Tri-axis Accelerometer Having A Single Proof Mass And Fully Differential Output Signals
App 20100263447 - Pan; Zhiyu ; et al. | 2010-10-21 |
Method For Controlling A Device And A Device For Controlling The Device
App 20100225500 - ULM; Markus ; et al. | 2010-09-09 |
Sensor device
App 20100192689 - Ulm; Markus ; et al. | 2010-08-05 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
Grant 7,757,555 - Pan , et al. July 20, 2 | 2010-07-20 |
Microelectromechanical devices and fabrication methods
Grant 7,671,515 - Metz , et al. March 2, 2 | 2010-03-02 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
Grant 7,625,773 - Lutz , et al. December 1, 2 | 2009-12-01 |
Microelectromechanical Systems Encapsulation Process
App 20090278214 - Ulm; Markus ; et al. | 2009-11-12 |
Microelectromechanical systems encapsulation process with anti-stiction coating
Grant 7,582,514 - Vancura , et al. September 1, 2 | 2009-09-01 |
Microelectromechanical systems encapsulation process
Grant 7,563,633 - Ulm , et al. July 21, 2 | 2009-07-21 |
Component for impedance change in a coplanar waveguide and method for producing a component
Grant 7,535,325 - Mueller-Fiedler , et al. May 19, 2 | 2009-05-19 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
App 20090065928 - Lutz; Markus ; et al. | 2009-03-12 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
Grant 7,449,355 - Lutz , et al. November 11, 2 | 2008-11-11 |
Energy Harvesting Device Manufactured by Print Forming Processes
App 20080265712 - Ulm; Markus ; et al. | 2008-10-30 |
Energy harvesting device manufactured by print forming processes
Grant 7,414,351 - Ulm , et al. August 19, 2 | 2008-08-19 |
Microelectromechanical devices and fabrication methods
App 20080122020 - Metz; Matthias ; et al. | 2008-05-29 |
Energy harvesting device manufactured by print forming processes
App 20080079333 - Ulm; Markus ; et al. | 2008-04-03 |
Tri-axis accelerometer having a single proof mass and fully differential output signals
App 20080053228 - Pan; Zhiyu ; et al. | 2008-03-06 |
Microelectromechanical Systems Encapsulation Process with Anti-Stiction Coating
App 20080050861 - Vancura; Cyril ; et al. | 2008-02-28 |
Microelectromechanical systems encapsulation process
App 20080050845 - Ulm; Markus ; et al. | 2008-02-28 |
Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component
App 20070229198 - Mueller-Fiedler; Roland ; et al. | 2007-10-04 |
Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component
Grant 7,229,694 - Mueller , et al. June 12, 2 | 2007-06-12 |
Structural element having a coplanar line
Grant 7,224,239 - Ulm , et al. May 29, 2 | 2007-05-29 |
Anti-stiction technique for electromechanical systems and electromechanical device employing same
App 20060246631 - Lutz; Markus ; et al. | 2006-11-02 |
Electrical system, especially a microelectronic or microelectromechanical high frequency system
App 20060097388 - Breitschwerdt; Klaus ; et al. | 2006-05-11 |
Structural element having a coplanar line
App 20050128022 - Ulm, Markus ; et al. | 2005-06-16 |
Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch
Grant 6,882,255 - Mueller-Fiedler , et al. April 19, 2 | 2005-04-19 |
Capacitive finger coupling element on a silicon support for coupling a strip line structure
Grant 6,876,268 - Walter , et al. April 5, 2 | 2005-04-05 |
Coplanar switch
Grant 6,762,923 - Mueller-Fiedler , et al. July 13, 2 | 2004-07-13 |
Coupling element for a hf stripline structure
App 20040036549 - Walter, Thomas ; et al. | 2004-02-26 |
Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component
App 20040033372 - Mueller, Lutz ; et al. | 2004-02-19 |
Coplanar waveguide switch
Grant 6,686,810 - Mueller-Fiedler , et al. February 3, 2 | 2004-02-03 |
Device Having A Capicator With Alterable Capacitance, In Particular A High-frequency Microswitch
App 20030146804 - Mueller-Fiedler, Roland ; et al. | 2003-08-07 |
Coplanar switch
App 20030103315 - Mueller-Fiedler, Roland ; et al. | 2003-06-05 |
Coplanar waveguide switch
App 20030030505 - Mueller-Fiedler, Roland ; et al. | 2003-02-13 |
Controllable damping member, method of controlling, and system using the damping member
App 20020190699 - Mueller-Fiedler, Roland ; et al. | 2002-12-19 |
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