Ullal; Saurabh J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ullal; Saurabh J..The latest application filed is for "showerhead electrode assembly with gas flow modification for extended electrode life".

Company Profile

0.14.10

Ullal; Saurabh J. - South San Francisco CA
Ullal; Saurabh J. - Union City CA
Ullal; Saurabh J. - Berkeley CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 9,093,483 - Augustino , et al. July 28, 2	2015-07-28
Plasma confinement ring assembly for plasma processing chambers Grant 9,076,826 - de la Llera , et al. July 7, 2	2015-07-07
Showerhead Electrode Assembly With Gas Flow Modification For Extended Electrode Life App 20140187049 - Augustino; Jason ; et al.	2014-07-03
Upper electrode backing member with particle reducing features Grant 8,709,202 - De La Llera , et al. April 29, 2	2014-04-29
Showerhead electrode assembly with gas flow modification for extended electrode life Grant 8,702,866 - Augustino , et al. April 22, 2	2014-04-22
Plasma Confinement Ring Assembly For Plasma Processing Chambers App 20120073754 - de la Llera; Anthony ; et al.	2012-03-29
Plasma processing chamber with guard ring for upper electrode assembly Grant 7,939,778 - Larson , et al. May 10, 2	2011-05-10
Upper Electrode Backing Member With Particle Reducing Features App 20110086513 - De La Llera; Anthony ; et al.	2011-04-14
Upper electrode backing member with particle reducing features Grant 7,854,820 - De La Llera , et al. December 21, 2	2010-12-21
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control Grant 7,767,584 - Singh , et al. August 3, 2	2010-08-03
Plasma Processing Chamber With Guard Ring For Upper Electrode Assembly App 20090127234 - Larson; Dean J. ; et al.	2009-05-21
Quartz guard ring Grant 7,482,550 - Larson , et al. January 27, 2	2009-01-27
Showerhead electrode assembly with gas flow modification for extended electrode life App 20080141941 - Augustino; Jason ; et al.	2008-06-19
Quartz guard ring App 20080099448 - Larson; Dean J. ; et al.	2008-05-01
Upper electrode backing member with particle reducing features App 20080090417 - De La Llera; Anthony ; et al.	2008-04-17
Components for a plasma processing apparatus App 20080087641 - De La Llera; Anthony ; et al.	2008-04-17
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control Grant 7,204,913 - Singh , et al. April 17, 2	2007-04-17
In-situ cleaning of a polymer coated plasma processing chamber Grant 6,994,769 - Singh , et al. February 7, 2	2006-02-07
In-situ cleaning of a polymer coated plasma processing chamber App 20040231800 - Singh, Harmeet ; et al.	2004-11-25
In-situ cleaning of a polymer coated plasma processing chamber Grant 6,776,851 - Singh , et al. August 17, 2	2004-08-17
High pressure wafer-less auto clean for etch applications App 20030005943 - Singh, Harmeet ; et al.	2003-01-09

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