Uitterdijk; Tammo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Uitterdijk; Tammo.The latest application filed is for "lithographic apparatus, substrate table, and method".

Company Profile

3.33.37

Uitterdijk; Tammo - Wilton CT
- Wilton CT US
Uitterdijk; Tammo - De Bilt NL
Uitterdijk; Tammo - GJ de Bilt N/A NL
Uitterdijk; Tammo - Bilt NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus Grant RE49,066 - Lafarre , et al. May 10, 2	2022-05-10
Lithographic Apparatus, Substrate Table, And Method App 20220082953 - LIPSON; Matthew ; et al.	2022-03-17
Burls with altered surface topography for holding an object in lithography applications Grant 11,270,906 - Akbas , et al. March 8, 2	2022-03-08
A Method To Manufacture Nano Ridges In Hard Ceramic Coatings App 20210405539 - AKBAS; Mehmet Ali ; et al.	2021-12-30
Burls With Altered Surface Topography For Holding An Object In Lithography Applications App 20210202293 - AKBAS; Mehmet Ali ; et al.	2021-07-01
Lithographic apparatus and method Grant 10,908,518 - Delpuerto , et al. February 2, 2	2021-02-02
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus Grant 10,324,383 - Lafarre , et al.	2019-06-18
Electrostatic clamp and a method for manufacturing the same Grant 10,310,391 - Lipson , et al.	2019-06-04
Electrostatic clamp and a method for manufacturing the same Grant 10274842 -	2019-04-30
Lithographic Apparatus And Device Manufacturing Method App 20190086819 - LOOPSTRA; Erik Roelof ; et al.	2019-03-21
Lithographic apparatus and device manufacturing method Grant 10,146,142 - Loopstra , et al. De	2018-12-04
Chucks And Clamps For Holding Objects Of A Lithographic Apparatus And Methods For Controlling A Temperature Of An Object Held By A Clamp Of A Lithographic Apparatus App 20180321602 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2018-11-08
Lithographic Apparatus And Method App 20180267414 - DELPUERTO; Santiago E. ; et al.	2018-09-20
Lithographic apparatus and method Grant 10,001,713 - Del Puerto , et al. June 19, 2	2018-06-19
An Electrostatic Clamp and a Method for Manufacturing the Same App 20170242345 - LIPSON; Matthew ; et al.	2017-08-24
Lithographic Apparatus And Device Manufacturing Method App 20170160650 - LOOPSTRA; Erik Roelof ; et al.	2017-06-08
Lithographic apparatus and device manufacturing method Grant 9,606,448 - Loopstra , et al. March 28, 2	2017-03-28
Lithographic apparatus, control system and device manufacturing method Grant 9,482,967 - Van De Kerkhof , et al. November 1, 2	2016-11-01
Lithographic apparatus and device manufacturing method Grant 9,442,388 - Loopstra , et al. September 13, 2	2016-09-13
Lithographic Apparatus and Method App 20150370180 - DEL PUERTO; Santiago E. ; et al.	2015-12-24
Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor Grant 9,170,498 - Van De Kerkhof , et al. October 27, 2	2015-10-27
Lithographic apparatus and device manufacturing method Grant 8,913,225 - Uitterdijk , et al. December 16, 2	2014-12-16
Lithographic Apparatus And Device Manufacturing Method App 20140347642 - LOOPSTRA; Erik Roelof ; et al.	2014-11-27
Lithographic apparatus and device manufacturing method Grant 8,675,173 - Liebregts , et al. March 18, 2	2014-03-18
Lithographic Apparatus And Device Manufacturing Method App 20140071420 - Loopstra; Erik Roelof ; et al.	2014-03-13
Method of manufacturing a miniaturized device Grant 8,542,342 - Schwab , et al. September 24, 2	2013-09-24
Lithographic Apparatus and a Method for Determining a Polarization Property App 20130176547 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2013-07-11
Lithographic Apparatus, Control System And Device Manufacturing Method App 20120008113 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2012-01-12
Lithographic Apparatus And Device Manufacturing Method App 20110279796 - Uitterdijk; Tammo ; et al.	2011-11-17
Lithographic apparatus, control system and device manufacturing method Grant 8,045,134 - Van De Kerkhof , et al. October 25, 2	2011-10-25
Lithographic apparatus and device manufacturing method Grant 8,013,978 - Uitterdijk , et al. September 6, 2	2011-09-06
Lithographic Apparatus And Device Manufacturing Method App 20110159441 - LIEBREGTS; Paulus Martinus Maria ; et al.	2011-06-30
Lithographic apparatus and device and device manufacturing method Grant 7,924,403 - Liebregts , et al. April 12, 2	2011-04-12
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto Grant 7,843,552 - Bruls , et al. November 30, 2	2010-11-30
Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography tool App 20100182582 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-07-22
Lithographic projection system and projection lens polarization sensor App 20100118288 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-05-13
Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor Thereof App 20100045956 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-02-25
Method of reducing a wave front aberration, and computer program product Grant 7,580,113 - Tel , et al. August 25, 2	2009-08-25
Method Of Manufacturing A Miniaturized Device App 20090190116 - Schwab; Markus ; et al.	2009-07-30
Lithographic apparatus, aberration correction device and device manufacturing method Grant 7,538,952 - Uitterdijk , et al. May 26, 2	2009-05-26
Lithographic apparatus and methods for use thereof Grant 7,538,875 - Van Dijk , et al. May 26, 2	2009-05-26
Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,535,644 - De Boeij , et al. May 19, 2	2009-05-19
Method of manufacturing a miniaturized device Grant 7,508,489 - Schwab , et al. March 24, 2	2009-03-24
Lithographic apparatus and device manufacturing method App 20080259296 - Uitterdijk; Tammo ; et al.	2008-10-23
Lithographic apparatus, aberration correction device and device manufacturing method App 20080212183 - Uitterdijk; Tammo ; et al.	2008-09-04
Lithographic apparatus and device manufacturing method Grant 7,405,805 - Uitterdijk , et al. July 29, 2	2008-07-29
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20080137049 - Jasper; Johannes Christiaan Maria ; et al.	2008-06-12
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle Grant 7,379,154 - Bruls , et al. May 27, 2	2008-05-27
Lithographic apparatus Grant 7,375,799 - Van De Kerkhof , et al. May 20, 2	2008-05-20
Lithographic apparatus, aberration correction device and device manufacturing method Grant 7,372,633 - Uitterdijk , et al. May 13, 2	2008-05-13
Lithographic apparatus, aberration correction device and device manufacturing method App 20080024874 - Uitterdijk; Tammo ; et al.	2008-01-31
Method of reducing a wave front aberration, and computer program product App 20070296938 - Tel; Wim Tjibbo ; et al.	2007-12-27
Lithographic apparatus, control system and device manufacturing method App 20070211233 - Van De Kerkhof; Marcus Adrianus ; et al.	2007-09-13
Lithographic apparatus and device manufacturing method Grant 7,239,370 - Jansen , et al. July 3, 2	2007-07-03
Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby App 20070035845 - De Boeij; Wilhelmus Petrus ; et al.	2007-02-15
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle Grant 7,136,152 - Bruls , et al. November 14, 2	2006-11-14
Lithographic apparatus and a method for determining a polarization property App 20060203221 - Van De Kerkhof; Marcus Adrianus ; et al.	2006-09-14
Lithographic apparatus App 20060192937 - Kerkhof; Marcus Adrianus Van De ; et al.	2006-08-31
Lithographic apparatus and device and device manufacturing method App 20060158628 - Maria Liebregts; Paulus Martinus ; et al.	2006-07-20
Method of manufacturing a miniaturized device App 20060146304 - Schwab; Markus ; et al.	2006-07-06
Lithographic apparatus and device manufacturing method App 20060139589 - Uitterdijk; Tammo ; et al.	2006-06-29
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle App 20060109448 - Bruls; Richard Joseph ; et al.	2006-05-25
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto App 20050280789 - Bruls, Richard Joseph ; et al.	2005-12-22
Lithographic apparatus and methods for use thereof App 20050206879 - Van Dijk, Remco Marcel ; et al.	2005-09-22
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle App 20050140949 - Jasper, Johannes Christiaan Maria ; et al.	2005-06-30
Lithographic apparatus and device manufacturing method App 20040174509 - Jansen, Albert Johannes Maria ; et al.	2004-09-09

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