Ugajin; Hajime
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ugajin; Hajime.The latest application filed is for "substrate processing method and substrate processing apparatus".
- Ugajin; Hajime - Nirasaki N/A JP
- Ugajin; Hajime - Yamanashi JP
- UGAJIN; Hajime - Nirasaki City JP
- Ugajin; Hajime - Kanagawa JP
| Patent | Date |
|---|---|
| Substrate processing apparatus Grant 8,968,475 - Odagiri , et al. March 3, 2 | 2015-03-03 |
| Substrate processing method and substrate processing apparatus Grant 8,956,546 - Ugajin , et al. February 17, 2 | 2015-02-17 |
| Substrate Processing Method And Substrate Processing Apparatus App 20130130499 - Ugajin; Hajime ; et al. | 2013-05-23 |
| Substrate etching method and system Grant 8,440,568 - Ugajin May 14, 2 | 2013-05-14 |
| Substrate Processing Apparatus App 20120180883 - ODAGIRI; Masaya ; et al. | 2012-07-19 |
| Substrate treatment apparatus and substrate treatment method Grant 7,979,942 - Hiraoka , et al. July 19, 2 | 2011-07-19 |
| Substrate Etching Method And System App 20100240218 - UGAJIN; Hajime | 2010-09-23 |
| Substrate Treatment Apparatus And Substrate Treatment Method App 20070226926 - Hiraoka; Nobuyasu ; et al. | 2007-10-04 |
| Etching method and etching device Grant 7,252,778 - Iwamoto , et al. August 7, 2 | 2007-08-07 |
| Etching Method And Etching Device App 20060244078 - Iwamoto; Hayato ; et al. | 2006-11-02 |
| Etching method and etching device App 20050000940 - Iwamoto, Hayato ; et al. | 2005-01-06 |
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