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Patent applications and USPTO patent grants for Ueyama; Tsutomu.The latest application filed is for "thin film forming apparatus and thin film forming method".
Patent | Date |
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Thin film forming apparatus and thin film forming method App 20060113021 - Ueyama; Tsutomu ;   et al. | 2006-06-01 |
Thin film forming apparatus and thin film forming method Grant 7,017,637 - Ueyama , et al. March 28, 2 | 2006-03-28 |
Thin film forming apparatus and thin film forming method App 20050230035 - Ueyama, Tsutomu ;   et al. | 2005-10-20 |
Thin film forming apparatus and thin film forming method Grant 6,926,057 - Ueyama , et al. August 9, 2 | 2005-08-09 |
Thin film forming apparatus and thin film forming method Grant 6,918,421 - Ueyama , et al. July 19, 2 | 2005-07-19 |
Thin film forming apparatus and thin film forming method App 20050139313 - Ueyama, Tsutomu ;   et al. | 2005-06-30 |
Substrate processing apparatus and slit nozzle Grant 6,911,088 - Kitazawa , et al. June 28, 2 | 2005-06-28 |
Substrate processing apparatus and substrate processing method Grant 6,893,805 - Iseki , et al. May 17, 2 | 2005-05-17 |
Apparatus for and method of heat treatment by light irradiation Grant 6,859,616 - Kusuda , et al. February 22, 2 | 2005-02-22 |
Apparatus for and method of heat treatment by light irradiation App 20040112890 - Kusuda, Tatsufumi ;   et al. | 2004-06-17 |
Substrate processing apparatus and slit nozzle App 20030183167 - Kitazawa, Hiroyuki ;   et al. | 2003-10-02 |
Thin film forming apparatus and thin film forming method App 20030079829 - Ueyama, Tsutomu ;   et al. | 2003-05-01 |
Substrate processing apparatus and substrate processing method App 20030064609 - Iseki, Izuru ;   et al. | 2003-04-03 |
Thin film forming apparatus and thin film forming method App 20030056725 - Ueyama, Tsutomu ;   et al. | 2003-03-27 |
Thin film forming apparatus and thin film forming method App 20030056890 - Ueyama, Tsutomu ;   et al. | 2003-03-27 |
Substrate spin treating apparatus Grant 5,916,366 - Ueyama , et al. June 29, 1 | 1999-06-29 |
Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus Grant 5,571,325 - Ueyama , et al. November 5, 1 | 1996-11-05 |
Method and device for loading and unloading a film on and out of a rotary drum in the exposure/recording apparatus Grant 4,770,404 - Ueyama , et al. September 13, 1 | 1988-09-13 |
Linear actuator Grant 4,757,223 - Ueyama July 12, 1 | 1988-07-12 |
Film end holding device Grant 4,707,123 - Ueyama November 17, 1 | 1987-11-17 |
Device of switching a scanning beam diameter Grant 4,642,701 - Maeda , et al. February 10, 1 | 1987-02-10 |
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