Ueta; Toshio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ueta; Toshio.The latest application filed is for "stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage".

Company Profile

0.8.7

Ueta; Toshio - Kumagaya JP
Ueta; Toshio - Menuma-machi JP
Ueta, Toshio - Oho sato gun JP
Ueta; Toshio - Redwood City CA
Ueta; Toshio - Foster City CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage Grant 8,582,080 - Binnard , et al. November 12, 2	2013-11-12
Stage Assembly With Measurement System Initialization, Vibration Compensation, Low Transmissibility, And Lightweight Fine Stage App 20080278705 - Binnard; Michael ; et al.	2008-11-13
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage Grant 7,417,714 - Binnard , et al. August 26, 2	2008-08-26
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage App 20060101928 - Binnard; Michael ; et al.	2006-05-18
Stage counter mass system Grant 6,963,821 - Binnard , et al. November 8, 2	2005-11-08
Stage counter mass system App 20040158427 - Binnard, Michael ; et al.	2004-08-12
Wafer stage assembly, servo control system, and method for operating the same Grant 6,686,991 - Binnard , et al. February 3, 2	2004-02-03
Devices and methods for compensating for tilting of a leveling table in a microlithography apparatus Grant 6,618,120 - Ueta September 9, 2	2003-09-09
Moving magnet type planar motor control App 20030102722 - Ueta, Toshio ; et al.	2003-06-05
Moving coil type planar motor control App 20030102721 - Ueta, Toshio ; et al.	2003-06-05
Devices and methods for compensating for tilting of a leveling table in a microlithography apparatus App 20030071981 - Ueta, Toshio	2003-04-17
Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems App 20030057619 - Ueta, Toshio ; et al.	2003-03-27
Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems Grant 6,523,695 - Ueta , et al. February 25, 2	2003-02-25
Stage device, control system, and method for stabilizing wafer stage and wafer table Grant 6,504,162 - Binnard , et al. January 7, 2	2003-01-07

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.